한국신재생에너지학회:학술대회논문집
- 2010.06a
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- Pages.83.1-83.1
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- 2010
Study of hydrogenated a-SiGe cell for middle cell of Triple junction solar cell
Triple junction 태양전지의 a-SiGe middle cell에 관한 연구
- Published : 2010.06.17
Abstract
Hydrogenated a-SiGe middle cell for triple junction solar cell was investigated with various process parameters. a-SiGe I-layer was deposited at substrate temperature