한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2009년도 하계학술대회 논문집
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- Pages.319-320
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- 2009
A Study on the Optical Property of Al-N-codoped p-type ZnO Thin Films Fabricated by DC Magnetron Sputtering Method
- Liu, Yan-Yan (Wonkwang University, WRISS) ;
- Jin, Hu-Jie (Wonkwang University, WRISS) ;
- Park, Choon-Bae (Wonkwang University, WRISS)
- 발행 : 2009.06.18
초록
In this study, high-quality Al-N doped p-type ZnO thin films were deposited on n-type Si (100) wafer or Si coated with buffer layer by DC magnetron sputtering in the mixture of
키워드