Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2009.06a
- /
- Pages.201-202
- /
- 2009
저온공정에서 제작한 ZnO:Al 박막의 특성 분석
- Jung, Yu-Sup (Department of Electrical Engineering, Kyungwon University) ;
- Kim, Sang-Mo (Department of Electrical Engineering, Kyungwon University) ;
- Hong, Jung-Soo (Department of Electrical Engineering, Kyungwon University) ;
- Son, In-Hwan (Department of Digital & Electrical Engineering, Shinsung College) ;
- Kim, Kyung-Hwan (Department of Electrical Engineering, Kyungwon University)
- Published : 2009.06.18
Abstract
ZnO:Al transparent conductive films for solar cells were deposited on the glass substrates at room temperature by facing target sputtering (FTS) method. The sputtering targets were 100 mm diameter disks of 2w.t..%. AZO and Zn metal. ZnO:Al thin films were deposited as a function film thickness. A base pressure was