Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2007.07a
- /
- Pages.1349-1350
- /
- 2007
Characterization of Al:ZnO thin films deposited at different oxygen pressure
산소 분위기압의 변화에 따른 Al:ZnO 박막의 특성
- No, I.J. (InHa Univ.) ;
- Kim, Il (InHa Univ.) ;
-
Shin, P.K.
(InHa Univ.)
;
- Song, J.H. (Sejong Tech. Ltd.) ;
- Kim, Y.W. (Saekyung Coll.) ;
-
Kim, C.Y.
(WooSuk Univ)
;
- Jeung, Y.S. (InCheon Univ.)
- Published : 2007.07.18
Abstract
Epitaxial thin films of aluminum-doped zinc oxide (AZO) have been deposited on commercial corning glass using an Nd:YAG pulsed laser deposition technology. The structural, electrical and optical properties of these films were investigated as a function of oxygen pressure. The experimental results show that the electrical resistivity of films deposited at 5 mTorr with substrate temperature of
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