Comparison between $d_{31}\;and\;d_{33}$ actuation characterization of the PZT micro-actuator for RF MEMS switch

RF 스위치 적용을 위한 박막 PZT 엑추에이터의 $d_{31}$ 구동과 $d_{33}$ 구동 특성 비교

In this work, we present the comparison between $d_{31}\;and\;d_{33}$ mode characterization using the PZT micro-actuator for large displacement. The PZT micro-actuator consisted of Si, PZT, and Pt layer on SOI wafer. The electrode shapes were laminated and interdigitated for $d_{31}\;and\;d_{33}$ mode, respectively. In order to characterize the actuation mode, we measured the displacement using laser interferometer. The maximum displacement of d31 mode was $12.2{\mu}m$ at 10V, the actuation characterization of d31 was better than that of d33 mode. We estimated that displacement of d33 mode would be larger than that of d31 above 30V.