한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2006년도 영호남 합동 학술대회 및 춘계학술대회 논문집 센서 박막 기술교육
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- Pages.144-145
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- 2006
ITO 박막의 산소 가스 의존성
Oxygen gas dependence of the ITO thin film
- Kim, Kyung-Hwan (Electrical and Information Eng. Kyungwon Univ.) ;
- Keum, Min-Jong (Electrical and Information Eng. Kyungwon Univ.)
- 발행 : 2006.05.19
초록
In this study, the Al doped ZnO thin films were prepared by the facing targets sputtering(FTS) apparatus. The electrical characteristics, transmittance of ITO thin films were investigated as a function of varying input current and oxygen gas flow rate. As a result, the ITO thin film was prepared with a resistivity