Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Surface morphology of Al cathode for OLED with Kr gas

Kr가스에 의한 OLED용 Al 음전극의 표면 형상

  • Kim, Hyun-Woong (Dept. of electrical & information engineering, Kyungwon University) ;
  • Keum, Min-Jong (Dept. of electrical & information engineering, Kyungwon University) ;
  • Kim, Kyung-Hwan (Dept. of electrical & information engineering, Kyungwon University)
  • 김현웅 (경원대학교 전기정보공학과) ;
  • 금민종 (경원대학교 전기정보공학과) ;
  • 김경환 (경원대학교 전기정보공학과)
  • Published : 2005.11.10
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Abstract

Al electrode for OLED was deposited by Facing Targets Sputtering(FTS) system which can reduce the damage of organic layer. The Al thin films were deposited on the slide glass as a function of working gas such as Ar, Kr or mixed gas. The film surface image was observed by AFM and SEM. In the results, when Al thin film were deposited using mixed gas, the surface morphology was improved in some region.

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