한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
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- Pages.72-73
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- 2005
W-B-C-N 확산방지막에서 질소농도에 따른 Stress 에 대한 연구
초록
Stress behavior was studied to investigate the internal behaviors of boron, carbon, and nitrogen in the 1000