An Electromechanical ${\sum}{\triangle}$ Modulator for MEMS Gyroscope

This paper presents a design and analysis of electromechanical sigma-delta modulator for MEMS gyroscope, which enables us to control the proof mass and to obtain an exact digital output without additional A/D conversion. The system structure and the circuit realization of the sigma-delta modulation are simpler than those of the analog sensing and feedback circuit. Based on the electrical sigma-delta modulator theory, a compensator is designed to improve the closed loop resolution of the sensor. With the designed compensator, we could obtain enhanced closed-loop performances of the gyroscope such as larger bandwidth, lower noise, and digital output comparing with the results of analog open-loop system.