Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2004.11a
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- Pages.586-589
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- 2004
A study on characteristics of AZO thin film by variation of thickness
막두께 변화에 따른 AZO 박막의 특성 연구
- Kim, H.W. (Kyungwon Uni) ;
- Keum, M.J. (Kyungwon Uni) ;
- Lee, W.J. (Kyungwon Collage) ;
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Jang, K.U.
(Kyungwon Collage)
;
- Choi, H.W. (Kyungwon Uni) ;
- Kim, K.H. (Kyungwon Uni)
- Published : 2004.11.11
Abstract
In this study, AZO(ZnO:Al) thin film were prepared by FTS(Facing Target Sputtering) system. The electrical, optical properties and crystalline of AZO thin film with thickness have been investigated. The thickness, transmittance, crystalline and electrical properties of AZO thin film were measured by a-step, UV-VIS spectrometer, hall effect measurement system, XRD and four-point probe, respectively. As a result, AZO thin film deposited with the transmittance over 80% and the resistivity about