Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2004.07a
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- Pages.393-396
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- 2004
Study on working gas ratio dependance of BST thin film
작업가스비에 따른 BST 박막의 특성
- Cui, Ming-Lu (Dept. Electronic Engineering, Chongju University) ;
- Kwon, Hak-Yong (Dept. Electronic Engineering, Chongju University) ;
- Park, In-Chul (Dept. Electronic Engineering, Chongju University) ;
- Kim, Hong-Bae (Division of Information and Communication Engineering, Chongju University)
- Published : 2004.07.05
Abstract
본 논문에서는 완충층용 MgO 박막을 P-type(100)Si 기판위에 작업가스