Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2004.07c
- /
- Pages.1597-1599
- /
- 2004
Structural properties and field-emission characteristics of CNTs grown on Ni and Invar catalysts employing an ICP-CVD method
ICP-CVD 방법을 이용하여 Ni 및 Invar 촉매 위에 성장시킨 탄소나노튜브의 구조적 물성 및 전계방출 특성
- Hong, Seong-Tae (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University) ;
- Kim, Jong-Pil (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University) ;
- Park, Chang-Kyun (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University) ;
- Uhm, Hyun-Seok (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University) ;
- Park, Jin-Seok (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University)
- 홍성태 (한양대학교 전자전기제어계측공학과) ;
- 김종필 (한양대학교 전자전기제어계측공학과) ;
- 박창균 (한양대학교 전자전기제어계측공학과) ;
- 엄현석 (한양대학교 전자전기제어계측공학과) ;
- 박진석 (한양대학교 전자전기제어계측공학과)
- Published : 2004.07.14
Abstract
Carbon nanotubes (CNTs) are grown on the TiN-coated silicon substrate by varying the thickness of Ni and Invar426 catalyst layers at 600
Keywords