Proceedings of the KSME Conference (대한기계학회:학술대회논문집)
- 2003.04a
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- Pages.1078-1082
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- 2003
Fabrication of Master Replication by Nanoimprint Lithography
나노 임프린트 리소그라피에 의한 마스터 복제 공정
Abstract
A feasibility study for the fabrication of master replication with nanostructures by Nanoimprint Lithography (NIL) was investigated for application of polymer Photonic Bandgap (PBG) devices used in photonic IC. Large area gratings of