Proceedings of the KSME Conference (대한기계학회:학술대회논문집)
- 2003.04a
- /
- Pages.1073-1077
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- 2003
Nano-mold fabrication for imprinting lithography
나도 Imprinting 을 위한 몰드 제작에 관한 연구
- Lee, Jin-Hyung (Micro Biochip Center) ;
- Lim, Hyun-Uoo (Micro Biochip Center) ;
- Kim, Tae-Gon (Micro Biochip Center) ;
- Lee, Seung-Seoup ;
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Park, Jin-Goo
(Micro Biochip Center) ;
- Lee, Eun-Kyu (Micro Biochip Center) ;
- Kim, Yang-Sun (Micro Biochip Center) ;
- Han, Chang-Su
- Published : 2003.04.23
Abstract
This study aims to investigate the fabrication process of nano silicon mold using electron beam lithography (EBL) to generate the nanometer level patterns by nano-imprinting technology. the nano-patterned mold including 100mm pattern size has been fabricated by EBL with different doses ranged from 22 to 38