압전박막을 이용한 air-gap type FBAR 필터설계

Thin Film Bulk Acoustic Resonators(FBAR) filters design Air-gap type using piezoelectric thin film

  • 정중연 (경원대학교 전자.전기정보공학부) ;
  • 김용천 (경원대학교 전자.전기정보공학부) ;
  • 김상종 (KIST 박막연구센터) ;
  • 김경환 (경원대학교 전자.전기정보공학부) ;
  • 윤석진 (KIST 박막연구센터) ;
  • 최형욱 (경원대학교 전자.전기정보공학부)
  • 발행 : 2003.07.10

초록

The aim of the study is to scrutinize the relationship between the area of resonance and insertion loss by analyzing the characteristics of 2-port resonator. This was done through designing an air-gap type Film Bulk Acoustic Resonator (FBAR) by using CAD model for the application of bandpass filter of high-frequency band with piezoelectric thin film. Moreover, through the design of ladder-type BPF, we were able to observe changes in bandwidth, resonation, out-of-band rejection depending on the number and area of resonator.

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