한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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- Pages.842-845
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- 2003
마이크로웨이브 화학기상증착법으로 성장된 다이아몬드상 카본박막의 물리적인 특성연구
Physical Properties of Diamond-like Carbon Thin Films Prepared by a Microwave Plasma-Enhanced Chemical Vapor Deposition
- Choi, Won-Seok (School of Information and Communication Engineering, Sungkyunkwan Univ.) ;
- Hong, Byung-You (School of Information and Communication Engineering, Sungkyunkwan Univ.)
- 발행 : 2003.07.10
초록
DLC thin films were prepared by microwave plasma-enhanced chemical vapor deposition method on silicon substrates using methane (
키워드