Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2003.06a
- /
- Pages.1857-1860
- /
- 2003
- /
- 2005-8446(pISSN)
A study of excimer laser ablation of polymer
폴리머의 엑시머레이저 어블레이션에 관한 연구
- Shin, Dong-Sik (KIMM, Laser application group) ;
-
Lee, Je-Hoon
(Dept. of Metallurgical System Engineering, Yonsei University)
;
- Seo, Jung (Dept. of Metallurgical System Engineering, Yonsei University) ;
- Kim, Do-Hoon (Dept. of Metallurgical System Engineering, Yonsei University)
- Published : 2003.06.01
Abstract
The ablative decomposition mechanism of PMMA(polymethyt methacrylate), PET(polyethylene terephthalate) and PC(polycarbonate) with KrF excimer laser(λ: 248nm, pulse duration: 5ns) is investigated. The UV/Vis spectrometer analysis showed that PMMA is a weak absorber and PET, PC are a strong absorber at the wavelength of 248nm. The results(surface debris, melt, etch depth, etching shape) from drilling and direct writing experiments imply that ablation mechanism of PMMA is dominated by photothermal process, while that of PET, PC are dominated by photochemical process.
Keywords