• 한국정밀공학회지
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• 제24권2호
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• pp.134-139
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• 2007

Usually nanosecond pulsed laser processing of metal is mainly affected by the thermal ablation. Many studies of the theoretical analysis and modeling to predict the laser ablation of metal are suggested on the basis of the photothermal mechanism at higher laser fluence. In this paper, we investigate the etching depth and laser fluence of laser ablation of copper foils and propose the simplified SSB Model(Srinivasan-Smrtic-Babu model) to study the photothermal effect of nanosecond pulsed laser ablation. The experimental results show that the photothermal ablation of the 355nm DPSS $NdYVO_{4}$ laser is useful to process the copper thin foils.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.616-619
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• 2003

Photochemical and photothermal effects have correlation with each other and depend on laser wavelength. Multi-scanning laser ablation process of polymer with DPSS(Diode Pumped Solid State) 3rd harmonic Nd:YVO$_4$ laser with wavelength of 355nm is applied to fabricate three-dimensional micro shape. The DPSSL photomachining system can rapidly and cheaply fabricate 2D pattern or 3D shape with high efficiency because we only use CAD/CAM software and precision stages instead of complex projection mask. Photomachinability of polymer is highly influenced by laser wavelength and its own chemical structure. So the optical characteristics of polymers for 355nm laser source is investigated by experimentally and theoretically.

• 대한기계학회논문집B
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• 제27권6호
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• pp.804-812
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• 2003

This paper introduces optical methods for in-situ measurement of surface temperature and pressure transient in thermal processes having nanosecond time scales. In the temperature measurement, a p -Si thin film whose refractive index is calibrated as a function of temperature is embedded beneath the sample surface and the photothermal reflectance is monitored for estimating the surface temperature. The pressure transients are measured using the photoacoustic optical deflection method. The experimental technique is used to analyze the nanosecond laser induced vaporization process that is central to numerous engineering and bio-medical applications. Based on the experimental results, discussions are made on the experimental technique and the physical mechanisms of laser-driven explosive vaporization phenomena.

• 한국레이저가공학회지
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• 제6권1호
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• pp.33-40
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• 2003

The ablative decomposition mechanism of PMMA(polymethyl methacrylate) and PET(polyethylene terephthalate) with KrF excimer laser(λ : 248nm, pulse duration: 5㎱) is investigated. The UV/Vis spectrometer analysis showed that PMMA is a weak absorber and PET is a strong absorber at the wavelength of 248nm. The results(surface debris, melt, etch depth, etching shape) from drilling and direct writing experiments imply that ablation mechanism of PMMA is dominated by photothermal process, while that of PET is dominated by photochemical process.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1857-1860
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• 2003

The ablative decomposition mechanism of PMMA(polymethyt methacrylate), PET(polyethylene terephthalate) and PC(polycarbonate) with KrF excimer laser(λ: 248nm, pulse duration: 5ns) is investigated. The UV/Vis spectrometer analysis showed that PMMA is a weak absorber and PET, PC are a strong absorber at the wavelength of 248nm. The results(surface debris, melt, etch depth, etching shape) from drilling and direct writing experiments imply that ablation mechanism of PMMA is dominated by photothermal process, while that of PET, PC are dominated by photochemical process.

• 한국정밀공학회지
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• 제21권12호
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• pp.13-20
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• 2004

Manufacturing process for the microfluidic device can include such sequential steps as master fabrication, electroforming, and injection molding. The laser ablation using masks has been applied to the fabrication of channels in microfluidic devices. In this study, manufacturing of polymer master and mold insert for micro injection molding was investigated. Ablation of PET (polyethylene terephthalate) by the excimer laser radiation could be used successfully to make three dimensional master fur nickel mold insert. The mechanism fur ablative decomposition of PET with KrF excimer laser $({\lambda}: 248 nm, pulse duration: 5 ns)$ was explained by photochemical process, while ablation mechanism of PMMA (polymethyl methacrylate) is dominated by photothermal process, the .eaction between PC (polycarbonate) and KrF excimer laser beam generate too much su.face debris. Thus, PET was adopted in polymer master for nickel mold insert. Nickel electroforming using laser ablated PET master was preferable for replication method. Finally, it was shown that excimer laser ablation can substitute for X-ray lithography of LIGA process in microstructuring.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.609-610
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• 2011

• 전자통신동향분석
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• 제13권3호통권51호
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• pp.71-83
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• 1998

반도체 제조용 웨이퍼의 온도를 측정하고 제어하는 기술의 진보로 열처리 장비 시장에서 점점 더 각광을 받고 있는 급속 열처리(rapid thermal process: RTP) 장치의 최근 기술 동향을 전반적으로 조사 분석하였다. RTP의 장점, 온도 제어 모델링 기술(model-based control), 최근에 개발된 여러 종류의 RTP 시스템 설계 및 이들 각각의 기술적인 문제들이 기술된다. 새롭게 개발된 단일 wafer furnace와 광자 효과를 이용한 rapid photothermal process (RPP)에 관해서도 기술하였다. 아울러 최근 열처리 장비 업체들의 현황과 열처리 장비 시장의 향후 전망에 관해서도 검토하였다.

• Bulletin of the Korean Chemical Society
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• 제24권3호
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• pp.318-324
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• 2003

A time-resolved probe beam deflection (PBD) technique was employed to study the energy relaxation dynamics of photofragments produced by photodissociation of $CH_3I$ at 266 nm. Under 500 torr argon environment, experimental PBD transients revealed two energy relaxation processes; a fast relaxation process occurring within an acoustic transit time (less than 0.2 ㎲ in this study) and a slow relaxation process with the relaxation time in several tens of ㎲. The fast energy relaxation of which signal intensity depended linearly on the excitation laser power was assigned to translational-to-translational energy transfer from the photofragments to the medium. As for the slow process, the signal intensity depended on square of the excitation laser power, and the relaxation time decreased as the photofragment concentration increased. Based on experimental findings and reaction rate constants reported previously, the slow process was assigned to methyl radical recombination reaction. In order to determine the rate constant for methyl radical recombination reaction, a theoretical equation of the PBD transient for a radical recombination reaction was derived and used to fit the experimental results. By comparing the experimental PBD curves with the calculated ones, the rate constant for methyl recombination is determined to be $3.3({\pm}1.0)\;{\times}\;10^6\;s^{-1}torr^{-1}$ at 295 ± 2 K in 500 torr Ar.

• 접착 및 계면
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• 제25권2호
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• pp.69-74
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• 2024

소프트 액추에이터는 구성 재료 자체가 가지는 유연성과 부드러운 움직임으로 인해 의료 산업과 제조업 등 다양한 분야에서의 응용이 기대되고 있다. 자극감응성 하이드로젤은 유연하며 다양한 주위 자극에 의해 큰 부피 변화를 보일 수 있는 물질로서 소프트 액추에이터 재료로서 적합하다. 하지만, 자극감응성 하이드로젤의 부피 변화는 온도 변화의 속도 및 용매의 확산 속도에 기인하여 대부분의 작동 조건에서 느린 속도로 진행되며 이는 액추에이터의 반응속도를 제한한다. 본 연구에서는 온도감응성 하이드로젤인 polydiethylacrylamide에 광열효과를 가지는 공액고분자를 도입하여 빛에 의해 구동되는 소프트 액추에이터를 구현하였고, 공액고분자의 광열효과에 의한 반응속도의 개선효과를 조사하였다. 공액고분자의 도입에 의해 반응시간이 41% 개선됨을 확인하였고 이는 열전달 효율의 개선에 의한 것으로 짐작할 수 있다. 최종적으로 이러한 개선된 반응속도의 하이드로젤이 적용된 소프트 그리퍼를 제작하였고 반응속도를 조사하였다.