Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2003.07c
- /
- Pages.1912-1913
- /
- 2003
VOA fabrication with symmetric actuator
대칭구동기를 갖는 가변 광 감쇄기의 제작
- Kim, Tae-Youp (Microsystem Research Center, KIST) ;
- Hur, Jae-Sung (Microsystem Research Center, KIST) ;
-
Moon, Sung
(Microsystem Research Center, KIST)
;
-
Shin, Hyun-Joon
(Microsystem Research Center, KIST)
;
- Lee, Sang-Yeol (Dept. of Electrical and Electronic Eng., Yonsei)
- 김태엽 (한국과학기술연구원 마이크로시스템연구센터) ;
- 허재성 (한국과학기술연구원 마이크로시스템연구센터) ;
-
문성욱
(한국과학기술연구원 마이크로시스템연구센터)
;
-
신현준
(한국과학기술연구원 마이크로시스템연구센터)
;
- 이상렬 (연세대학교 전기전자공학과)
- Published : 2003.07.21
Abstract
This paper presents a variable optical attenuator (VOA) that is fabricated using bosch deep silicon etching process [1] with silicon-on- insulator (SOI) wafer. The VOA consists of driving electrode, ground electrode, actuating mirror, and mechanical slower. In this VOA, actuating mirror is driven by electrostatic force [2] and the pull-in voltage is close to 13V, 28 V, 46V come along with the spring width of