The Couplings for ball-screw on high precision positioning

고정도 이송을 위한 공기정압커플링에 관한 연구

Recently, researches on precision machining of nato-order, especially in the field of optical components and semi-conductors have been under development very actively. A accuracy of machining and positioning in a critical issue in ultra-precision machining. This paper proposes a new positioning system which can give excellent dynamic characteristics and reduce errors in horizontal, vertical, pitching, and yawing motions. In this paper, we suggest a connecting mechanism (the couplings) to reduce motion errors such as chatter and runout while preserving the positioning accuracy. We verified the good performance in the new connecting systems with various coupling types, which we classified into the fixed type, the spring type, the aeroctatic-nozzle type, and the aeroctatic-porous type according to the way of reducing the chatter and error.