• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.04a
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• pp.161-166
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• 2002

Recently, researches on precision machining of nato-order, especially in the field of optical components and semi-conductors have been under development very actively. A accuracy of machining and positioning in a critical issue in ultra-precision machining. This paper proposes a new positioning system which can give excellent dynamic characteristics and reduce errors in horizontal, vertical, pitching, and yawing motions. In this paper, we suggest a connecting mechanism (the couplings) to reduce motion errors such as chatter and runout while preserving the positioning accuracy. We verified the good performance in the new connecting systems with various coupling types, which we classified into the fixed type, the spring type, the aeroctatic-nozzle type, and the aeroctatic-porous type according to the way of reducing the chatter and error.