Proceedings of the KSME Conference (대한기계학회:학술대회논문집)

The Korean Society of Mechanical Engineers (대한기계학회)
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Synthesis and Control of Ultrafine Particles by Ion-Injection in Furnace

반응로내 이온주입에 의한 초미세입자의 합성 및 응집제어

  • 윤진욱 (한양대학교 기계공학과 대학원) ;
  • 김영원 (한양대학교 기계공학과 대학원) ;
  • 안강호 (한양대학교 기계공학과)
  • Published : 2001.06.27
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Abstract

Ultrafine particles have been widely used in many high technology industrial areas. The spherical nonagglomerated and uniform nanometer-size $SiO_{2}$ particles are synthesized by the injection of TEOS vapor, ions and reaction gas in furnace. Ions were generated by Corona discharge electrode and these ions charge $SiO_{2}$ particles. As a result, spherical, nonagglomerated and ultrafine particles are generated in various conditions, it's morphology, charging portion and size distribution are examined by using TEM, ESP and SMPS. As the applied voltage of electrode changes from 0 kV to 5.0 kV, it is observed that the mean diameter of $SiO_{2}$ particle decreases from 94 nm to 42 nm.

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