한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2000년도 하계학술대회 논문집
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- Pages.573-576
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- 2000
CrN박막 세라믹 압력센서
Ceramic Pressure Sensors Based on CrN Thin-films
- Chung, Gwiy-Sang (Dongseo University) ;
- Seo, Jeong-Hwan (Dept.of Electronics Engineering, Pukyong National University) ;
- Ryu, Gl-kyu (Dept.of Electronics Engineering, Pukyong National University)
- 발행 : 2000.07.01
초록
The physical, electrical and piezoresitive characteristics of CrN(chromium nitride) thin-films on silicon substrates have been investigated for use as strain gauges. The thin-film depositions have been carried out by DC reactive magnetron sputtering in an argon-nitrogen atmosphere(Ar-(5∼25 %)Na
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