한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2000년도 하계학술대회 논문집
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- Pages.569-572
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- 2000
SOI와 드랜치 구조를 이용한 초저소비전력형 미세발열체의 제작
The fabrication of ultra-low consumption power type micro-heaters using SOI and trenche structures
초록
This paper presents the optimized fabrication and thermal characteristics of micro-heaters for thermal MEMS applications using a SDB SOI substrate. The micro-heater is based on a thermal measurement principle and contains for thermal isolation regions a 10