한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2000년도 하계학술대회 논문집
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- Pages.565-568
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- 2000
고온용 고감도 실리콘 홀 센서의 제작 및 특성
Fabrication and Characteristics of High-sensitivity Si Hall Sensors for High-temperature Applications
초록
This paper describes on the temperature characteristics of a SDB(silicon-wafer direct bonding) SOI(silicon-on-insulator) Hall sensor. Using the buried oxide