Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2000.07a
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- Pages.561-564
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- 2000
Design and Fabrication of Capacitive Pressure Sensor
용량형 압력센서의 설계 및 제작
Abstract
Silicon capacitive pressure sensor has been fabricated by using electrochemical etching stop and silicon-to-glass electrostatic bonding technique. A diaphragm structure is designed to compensate the nonlinear response. A cavity is etched into the silicon to the depth of 2
Keywords
- silicon capacitive pressure sensor;
- electrochemical etching stop;
- electrostatic bonding technique;
- cavity