• 제목/요약/키워드: electrostatic bonding technique

검색결과 7건 처리시간 0.024초

용량형 압력센서의 설계 및 제작 (Design and Fabrication of Capacitive Pressure Sensor)

  • 이승준;김병태;권영수;정귀상
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 하계학술대회 논문집
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    • pp.561-564
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    • 2000
  • Silicon capacitive pressure sensor has been fabricated by using electrochemical etching stop and silicon-to-glass electrostatic bonding technique. A diaphragm structure is designed to compensate the nonlinear response. A cavity is etched into the silicon to the depth of 2$\mu\textrm{m}$ by anisotropic etching in 20wt.% TMAH solution at 80$^{\circ}C$. A fabricated sensor showed 3.3 pF zero-pressure capacitance, 297 pp.m/mmHg sensitivity, and a 7.4 7%F.S. nonlinear response in a 0-1 kgf/cm$^2$pressure range.

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Functional Layer-by-Layer Assembled Multilayers Based on Nucleophilic Substitution reaction

  • 조진한
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2011년도 춘계학술발표대회
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    • pp.9.2-9.2
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    • 2011
  • Ultrathin polyelectrolyte (PE) multilayer films prepared by the versatile layer-by layer (LbL) assembly method have been utilized for the preparation of light-emitting diodes, electrochromic, membrane, and drug delivery system, as well as for selective area patterning and particle surface modification because the various materials with specific properties can be inserted into the film with nano-level thickness irrespective of the size or the shape of substrate. Since the introduction of the LbL technique in 1991 by Decher and Hong, various hydrophilic materials can be inserted within LbL films through complementary interactions (i.e., electrostatic, hydrogen-bonding or covalent interaction). In this study, it is demonstrated that LbL SA multilayer films based on nucleophilic substitution reaction can allow the preparation of the highly efficient magnetic and/or optical films and nonvolatile memory devices.

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Fluorescence-Quenched Sensor for Trinitophenol in Aqueous Solution Based on Sulfur Doped Graphitic Carbon Nitride

  • Min, Kyeong Su;Manivannan, Ramalingam;Satheshkumar, Angu;Son, Young-A
    • 한국염색가공학회지
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    • 제30권2호
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    • pp.63-69
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    • 2018
  • In this study, we report on successful attempt towards the synthesis of sulfur self-doped $g-C_3N_4$ by directly heating thiourea in air. The synthesized materials were characterized using UV-vis spectral technique, FT-IR, XRD and TEM analysis. Further, the obtained material shows an excellent detection of carcinogenic TNP(Tri nitro phenol) in the presence of 10-fold excess of various other common interferences. The strong inner filter effect and molecular interactions(electrostatic, ${\pi}-{\pi}$, and hydrogen bonding interactions) between TNP and the $S-g-C_3N_4$ Nano sheets led to the fluorescence quenching of the $S-g-C_3N_4$ Nano sheets with an excellent selectivity and sensitivity towards TNP compared to that of other nitro aromatics under optimal conditions and the detection limit calculated was found to be 6.324 nM for TNP. The synthesized nanocomposite provides a promising platform for the development of sensors with improved reproducibility and stability for ultra-sensitive and selective sensing of TNP.

陽이온이 支持된 Layer Silicate 上에서의 水分의 吸着 (Adsorption of Water on Cation Supported Layer Silicates)

  • 김종택;손종락
    • 대한화학회지
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    • 제19권5호
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    • pp.317-324
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    • 1975
  • $Na^+,\;Ca^{2+},\;Ni^{2+},\;Al^{3+}$ 이온이 포화된 montmorillonite상에 여러 溫度에서 일어난 $H_2O와\;D_2O$의 氣相吸着에 관하여 연구하였다. 吸着으로 인하여 생긴 OH의 IR 신축진동 band를 computer에 의하지 않고 4개의 Gauss 成分으로 나누었다. 물과 silanol OH기와의 共鳴理論은 $3625cm^{-1}와\;2680cm^{-1}$로 증명되었다. $3400cm^{-1}$와 2475cm 에서의 broad한 吸收는 吸着된 물과 水素結合을 일으키고 있는 silanol OH의 신축진동에 의한 것이었고 $3650cm^{-1}와\;2345cm^{-1}$ band는 吸着된 $H_2O와\;D_2O$에 의한 것이었다. 吸着水와 表面 OH사이의 水素結合은 精電氣的 相互作用에 의한 것임이 밝혀졌다.

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저 압력 측정을 위한 실리콘 용량형 압력센서 (Silicon Capacitive Pressure Sensor for Low Pressure Measurements)

  • 서희돈;이윤희;박종대;최세곤
    • 센서학회지
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    • 제2권1호
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    • pp.19-27
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    • 1993
  • 본 논문은 $n^{+}$ 에피택셜층을 이용한 전기화학 에칭스톱과 글라스-실리콘의 양극 접합기술을 이용하여 저 압력측정을 위한 용량형 압력센서를 제작한 것이다. 제작된 센서는 하이브리드형으로 센서 커패시터와 기준 커패시터를 갖는 센서 칩과 두가지 출력검출회로 칩으로 구성되어 있다. 이 제작된 센서는 다이아프램 크기가 $1.0{\times}1.0 mm^{2}$이고, 두께가 $10{\mu}m$로 제작된 센서는 압력이 인가되지 않을 때 용량의 크기가 7.1 pF이고, 10 KPa 압력에서 감도가 5.2 %F.S.이다. 또 용량을 전압으로 검출하는 컨버터회로를 이용할 경우, $5{\sim}45^{\circ}C$ 온도범위에서 영점 온도특성과 감도 온도특성은 각각 0.051 %F.S./$^{\circ}C$와 0.12 %F.S./$^{\circ}C$ 이다.

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이온 빔 조사된 SiNx 박막의 전기 광학적 특성에 관한 연구 (Investigation on EO Characteristics of SiNx Thin Film Irradiated by Ion-beam)

  • 이상극;오병윤;김병용;한진우;김영환;옥철호;김종환;한정민;서대식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 추계학술대회 논문집
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    • pp.429-429
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    • 2007
  • For various applications of liquid crystal displays (LCDs), the uniform alignment of liquid crystal (LC) molecules on treated surfaces is significantly important. Generally, a rubbing method has been widely used to align the LC molecules on polyimide (PI) surfaces. Rubbed PI surfaces have suitable characteristics, such as uniform alignment. However, the rubbing method has some drawbacks, such as the generation of electrostatic charges and the creation of contaminating particles. Thus, we strongly recommend a non contact alignment technique for future generations of large high-resolution LCDs. Most recently, the LC aligning capabilities achieved by ultraviolet and ion-beam exposures which are non contact methods, on diamond-like carbon (DLC) inorganic thin film layers have been successfully studied because DLC thin films have a high mechanical hardness, a high electrical resistivity, optical transparency, and chemical inertness. In addition, nitrogen-doped DLC (NDLC) thin films exhibit properties similar to those of the DLC thin films and a higher thermal stability than the DLC thin films because C:N bonding in the NDLC thin filmsis stronger against thermal stress than C:H bonding in the DLC thin films. Our research group has already studied the NDLC thin films by an ion-beam alignment method. The $SiN_x$ thin films deposited by plasma-enhanced chemical vapor deposition are widely used as an insulation layer for a thin film transistor, which has characteristics similar to those of DLC inorganic thin films. Therefore, in this paper, we report on LC alignment effects and pretilt angle generation on a $SiN_x$, thin film treated by ion-beam irradiation for various N ratios

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액정 디스플레이 배향막을 위한 이온빔 표면조사에 관한 연구 (Ion beam irradiation for surface modification of alignment layers in liquid crystal displays)

  • 오병윤;김병용;이강민;김영환;한정민;이상극;서대식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 춘계학술대회 및 기술 세미나 논문집 디스플레이 광소자
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    • pp.41-41
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    • 2008
  • In general, polyimides (PIs) are used in alignment layers in liquid crystal displays (LCDs). The rubbing alignment technique has been widely used to align the LC molecules on the PI layer. Although this method is suitable for mass production of LCDs because of its simple process and high productivity, it has certain limitations. A rubbed PI surface includes debris left by the cloth, and the generation of electrostatic charges during the rubbing induces local defects, streaks, and a grating-like wavy surface due to nonuniform microgrooves that degrade the display resolution of computer displays and digital television. Additional washing and drying to remove the debris, and overwriting for multi-domain formation to improve the electro-optical characteristics such as the wide viewing angle, reduce the cost-effectiveness of the process. Therefore, an alternative to non-rubbing techniques without changing the LC alignment layer (i.e, PI) is proposed. The surface of LC alignment layers as a function of the ion beam (IE) energy was modified. Various pretilt angles were created on the IB-irradiated PI surfaces. After IB irradiation, the Ar ions did not change the morphology of the PI surface, indicating that the pretilt angle was not due to microgrooves. To verify the compositional behavior for the LC alignment, the chemical bonding states of the ill-irradiated PI surfaces were analyzed in detail by XPS. The chemical structure analysis showed that ability of LCs to align was due to the preferential orientation of the carbon network, which was caused by the breaking of C=O double bonds in the imide ring, parallel to the incident 18 direction. The potential of non-rubbing technology for fabricating display devices was further conformed by achieving the superior electro-optical characteristics, compared to rubbed PI.

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