Annealing Effects of The Electrochromic $MoO_3$ Thin Films

전기변색 $MoO_3$ 박막의 열처리 효과

  • 임동규 (수원대학교 전자재료공학과) ;
  • 이진민 (수원대학교 전자재료공학과) ;
  • 조봉희 (전기전자공학부) ;
  • 김동진 (유한대학교 전자공학과) ;
  • 김영호 (수원대학교 전자재료공학과)
  • Published : 1999.05.01

Abstract

The effect of the heat treatment on electrochromic properties of $MoO_3$ thin films is investigated by studing optical modulation, optical density, response time, and cyclic voltammetry. From the results of XRD analysis, heat-treated at $450^{\circ}C$ in air for 1 hour $MoO_3$ thin films are found to be crystalline while as-deposited film and heat-treated at low temperature (${\leq}300^{\circ}C$) are amorphous. The electrochrornic devices using as-deposited $MoO_3$ films exhibits good electrochromic properties compare to those using the heat treated $MoO_3$ films. It has shown that the heat-treatment affected the stability and the electrochromic properties of $MoO_3$ films.

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