Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1998.11c
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- Pages.895-897
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- 1998
optical emission spectra of microwave plasma
마이크로파 플라즈마의 광방출 스펙트럼
- Park, Sang-Hyun (Kyungnam Uni.) ;
- Gu, Hyo-Keun (Masan Coll.) ;
- Sim, Jung-Bong (Kepco.) ;
- Kim, Kyoung-Hwan (Kyungnam Uni.) ;
- Park, Jae-Yoon (Kyungnam Uni.) ;
- Lee, Duck-Chool (Inha Uni.)
- Published : 1998.11.28
Abstract
The optical spectra of microwave plasma by four kinds of gases(
Keywords