대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1996년도 하계학술대회 논문집 C
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- Pages.1835-1837
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- 1996
마이크로 유전체장벽 및 마이크로 공격의 방전 및 플라즈마 발생특성
Characteristics of Discharges and Plasma Generation in Micro-Air gaps and Micro-Dielectric Barriers
- Shon, Si-Ho (Dept. of Electrical Engg, Kyungpook Nat'l Univ.) ;
- Tae, Heung-Sik (Dept. of Electrical Engg, Kyungpook Nat'l Univ.) ;
- Hoon, Jae-Duk (Dept. of Electrical Engg, Kyungpook Nat'l Univ.)
- 발행 : 1996.07.22
초록
Characteristics of Discharge and nonthermal plasma generation in a micro-air gap spacing between a micro-dielectric barrier and a electrode have been investigated experimentally to chert the potential to be used as a micro-scale nonthermal plasma generator. It is found that the output ozone concentration, as a nonthermal plasma intensity parameter, of the micro-air gnp nonthermal plasma generator depended greatly upon the air gap spacing and thickness of the dielectric barrier. As a result, there is a optimal air gap sparing in the same micro dielectric barrier to generate ozone effectively. And the higher ozone concentration was generated from the thinner micro-barrier.
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