Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1994.11a
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- Pages.43-44
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- 1994
Comparison of the CVD Cu film with electroless plated Cu film on TiN
TIN위에 증착시킨 CVD Cu막과 electroless plated Cu막의 특성 비교
Abstract
Keywords