• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.693-694
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• 2010

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.373-373
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• 2012

We fabricated conductive zinc oxide (ZnO) thin film at low temperature by UV-enhanced atomic layer deposition. The atomic layer deposition relies on alternate pulsing of the precursor gases onto the substrate surface and subsequent chemisorption of the precursors. In this experiment, diethylzinc (DEZ) and $H_2O$ were used as precursors with UV light. The UV light was very effective to improve the conductivity of the ZnO thin film. The thickness, transparency and resistivity were investigated by ellisometry, UV-visible spectroscopy and Four-point probe.

• 한국재료학회지
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• 제22권5호
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• pp.237-242
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• 2012

We report on the NO gas sensing properties of Al-doped zinc oxide-carbon nanotube (ZnO-CNT) wire-like layered composites fabricated by coaxially coating Al-doped ZnO thin films on randomly oriented single-walled carbon nanotubes. We were able to wrap thin ZnO layers around the CNTs using the pulsed laser deposition method, forming wire-like nanostructures of ZnO-CNT. Microstructural observations revealed an ultrathin wire-like structure with a diameter of several tens of nm. Gas sensors based on ZnO-CNT wire-like layered composites were found to exhibit a novel sensing capability that originated from the genuine characteristics of the composites. Specifically, it was observed by measured gas sensing characteristics that the gas sensors based on ZnO-CNT layered composites showed a very high sensitivity of above 1,500% for NO gas in dry air at an optimal operating temperature of $200^{\circ}C$; the sensors also showed a low NO gas detection limit at a sub-ppm level in dry air. The enhanced gas sensing properties of the ZnO-CNT wire-like layered composites are ascribed to a catalytic effect of Al elements on the surface reaction and an increase in the effective surface reaction area of the active ZnO layer due to the coating of CNT templates with a higher surface-to-volume ratio structure. These results suggest that ZnO-CNT composites made of ultrathin Al-doped ZnO layers uniformly coated around carbon nanotubes can be promising materials for use in practical high-performance NO gas sensors.

• 전기학회논문지
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• 제61권5호
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• pp.705-710
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• 2012

An anti-reflection layer (AR) is used in the solar cell to improve the amount of the irradiated light, resulting in the improvement of the performance of the solar cell. In this study, the zinc oxide (ZnO) AR is applied to the dye-sensitized solar cell (DSC) by using zinc nitrate solution. The conditions such as solution concentration and sintering temperature for fabricating the ZnO AR are changed to optimize the performance of the AR. As a result, the best performance is shown when the zinc nitrate solution with 100mM concentration is used and the sintering temperature is $600^{\circ}C$. And then, the ZnO AR formed with these optimal conditions is applied to the DSC. Consequently, a DSC with a ZnO AR had an increased current density up to 13.86$mA/cm^2$ and an enhanced efficiency of 6.32%.

• 한국세라믹학회지
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• 제41권1호
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• pp.57-61
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• 2004

Zinc Oxide (ZnO)은 wurtzite 결정구조를 가지고 있으며, 밴드갭 에너지가 약 3.3eV로 반도성 산화물이다. $In_2O_3$이 첨가된 ZnO 박막을 점자빔증착법을 이용하여 1737F 유리기판에 제조하였다. $400^{\circ}C$의 증착온도에서 $In_2O_3$의 첨가량에 따른 ZnO 박막의 결정성, 미세구조를 비롯한 전기.광학적 특성을 조사하였다. 첨가되는 $In_2O_3$의 양에 따라 투명전도성 산화막으로써의 ZnO 박막의 특성이 변화되었다. $In_2O_3$의 첨가량이 감소할수록 비정질상에서 결정성의 ZnO 막을 얻을 수 있었다. 0.2at%의 $In_2O_3$가 첨가된 출발물질에서 제조된 $In_2O_3$-doped ZnO막은 약 $6.0 {\times} 10^{-3} {\Omega}cm$ 정도의 비저항값과 가시광선 영역에서 85% 이상의 광투과도를 나타내었다.

• Transactions on Electrical and Electronic Materials
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• 제14권2호
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• pp.59-62
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• 2013

At an infra-red (IR) wavelength of 1,064 nm, a diode-pumped Q-switched $Nd:YVO_4$ laser was used for the direct patterning of various transparent conductive oxide (TCO) thin films on glass substrate. With various laser beam conditions, the laser ablation results showed that the indium tin oxide (ITO) film was removed completely. In contrast, zinc oxide (ZnO) film was not etched for any laser beam conditions and indium gallium zinc oxide (IGZO) was only ablated with a low scanning speed. The difference in laser ablation is thought to be due to the crystal structures and the coefficient of thermal expansion (CTE) of ITO, IGZO, and ZnO. The width of the laser-patterned grooves was dependent on the film materials, the repetition rate, and the scanning speed of the laser beam.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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• pp.397-397
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• 2007

Multilayer transparent electrodes, having a much lower electrical resistance than the widely used transparent conducting oxide electrodes, were prepared by using radio frequency magnetron sputtering. The multilayer structure consisted of five layers, indium tin oxided(ITO)/zinc oxide(ZnO)/Ag/oxide(ZnO)/ITO. With about 50nm thick ITO films, the multilayer showed a high optical transmittance in the visible range of the spectrum and had color neutrality. The electrical and optical properties of ITO/ZnO/Ag/ZnO/ITO multilayer were changed mainly by Ag film properties, which were affected by the deposition process of the upper layer. Especially ZnO layer was improved to adhesion of Ag and ITO. A high quality transparent electrode, having a resistance as low as and a high optical transmittance of 91% at 550nm, was obtained. It could satisfy the requirement for the flexible OLED and LCD.

• 한국재료학회지
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• 제27권10호
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• pp.530-533
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• 2017

ZnO micro/nanocrystals with different morphologies were synthesized by thermal evaporation of various zinc source materials in an air atmosphere. Zinc acetate, zinc carbonate and zinc iodide were used as the source materials. No catalysts or substrates were used in the synthesis of the ZnO crystals. The scanning electron microscope(SEM) image showed that the morphology of ZnO crystals was strongly dependent on the source materials, which suggests that source material is one of the key factors in controlling the morphology of the obtained ZnO crystals. Tetrapods, nanogranular shaped crystals, spherical particles and crayon-shaped crystals were obtained using different source materials. The X-ray diffraction(XRD) pattern revealed that the all the ZnO crystals had hexagonal wurtzite crystalline structures. An ultraviolet emission was observed in the cathodoluminescence spectrum of the ZnO crystals prepared via thermal evaporation of Zn powder. However, a strong green emission centered at around 500 nm was observed in the cathodoluminescence spectra of the ZnO crystals prepared using zinc salts as the source materials.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.236.1-236.1
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• 2015

The surface morphology of front transparent conductive oxide (TCO) films is very important to achieve high current density in amorphous silicon (a-Si) thin film solar cells since it can scatter the light in a better way. In this study, we present the low cost hydrothermal deposited uniform zinc oxide (ZnO) nano-flower structure with various aspect ratios for a-Si thin film solar cells. The ZnO nano-flower structures with various aspect ratios were grown on the RF magnetron sputtered AZO films. The diameters and length of the ZnO nano-flowers was controlled by varying the annealing time. The length of ZnO nano-flowers were varied from 400 nm to $2{\mu}m$ while diameter was kept higher than 200 nm to obtain different aspect ratios. The ZnO nano-flowers with higher surface area as compared to conventional ZnO nano structure are preferred for the better light scattering. The conductivity and crystallinity of ZnO nano-flowers can be enhanced by annealing in hydrogen atmosphere at 350 oC. The vertical aligned ZnO nano-flowers showed higher haze ratio as compared to the commercially available FTO films. We also observed that the scattering in the longer wavelength region was favored for the high aspect ratio of ZnO nano-flowers. Therefore, we proposed low cost and vertically aligned ZnO nano-flowers for the high performance of thin film solar cells.

• 한국재료학회지
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• 제28권1호
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• pp.32-37
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• 2018

We report on the efficient detection of NO gas by an all-oxide semiconductor p-n heterojunction diode structure comprised of n-type zinc oxide (ZnO) nanorods embedded in p-type copper oxide (CuO) thin film. The CuO thin film/ZnO nanorod heterostructure was fabricated by directly sputtering CuO thin film onto a vertically aligned ZnO nanorod array synthesized via a hydrothemal method. The transport behavior and NO gas sensing properties of the fabricated CuO thin film/ZnO nanorod heterostructure were charcterized and revealed that the oxide semiconductor heterojunction exhibited a definite rectifying diode-like behavior at various temperatures ranging from room temperature to $250^{\circ}C$. The NO gas sensing experiment indicated that the CuO thin film/ZnO nanorod heterostructure had a good sensing performance for the efficient detection of NO gas in the range of 2-14 ppm under the conditions of an applied bias of 2 V and a comparatively low operating temperature of $150^{\circ}C$. The NO gas sensing process in the CuO/ZnO p-n heterostructure is discussed in terms of the electronic band structure.