• 제목/요약/키워드: yong-mo

검색결과 1,928건 처리시간 0.048초

MO-COMPOUNDS AS A DIFFUSION BARRIER BETWEEN Cu AND Si

  • Kim, Ji-Hyung;Lee, Yong-Hyuk;Kwon, Yong-Sung;Yeom, Geun-Young;Song, Jong-Han
    • 한국표면공학회지
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    • 제29권6호
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    • pp.683-690
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    • 1996
  • In this study, the diffusion barrier properties of $1000 \AA$ thick molybdenum compounds (Mo, Mo-N, $MoSi_2$, Mo-Si-N) were investigated using sheet resistance measurements, X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), Scanning electron microscopy (SEM), and Rutherford backscattering spectrometry (RBS). Each barrier material was deposited by the dc magnetron sputtering, and annealed at 300-$800^{\circ}C$ for 30min in vacuum. Mo and $MoSi_2$ barrier were failed at low temperature due to Cu diffusion through grain bound-aries and defects of Mo thin film and the reaction of Cu with Si within $MoSi_2$ respectively. A failure temperature could be raised to $650^{\circ}C$-30min in the Mo barrier system and to $700^{\circ}C$-30min in the Mo-silicide system by replacing Mo and $MoSi_2$ with Mo-N and Mo-Si-N, respectively. The crystallization temperature in the Mo-silicide film was raised by the addition of $N_2$. It is considered that not only the N, stuffing effect but also the variation of crystallization temperature affects the reaction of Cu with Si within Mo-silicide. It was found that Mo-Si-N is more effective barrier than Mo, $MoSi_2$, or Mo-N to copper penetration preventing Cu reaction with the substrate for 30min at a temperature higher than $650^{\circ}C$.

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아크 이온 플레이팅법을 이용한 CIGS용 Mo 후면전극 제조에 관한 연구 (Study on manufacture of Mo back contact films for CIGS solar cell by the cathodic arc ion plating)

  • 김강삼;조용기;정용덕;김제하
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2011년도 춘계학술대회 및 Fine pattern PCB 표면 처리 기술 워크샵
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    • pp.128-129
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    • 2011
  • Mo 박막은 전기전도성과 열적 안전성이 우수하여 CIGS 용 후면전극으로 사용되고 있다. 많은 연구자들이 스퍼터링법을 이용하여 Mo 박막을 이중 박막으로 제조하고 있으며, CIGS 용 기판재로 SLG(Soda Lime Glass)와 연성기판재등이 주로 이용되고 있다. 연구에서는 SLG 기판재를 이용하여 스퍼터링법과 증착속도 및 이온화 등이 우수한 아크 이온 플레이팅법으로 Mo 박막을 제조하였으며, 제조된 Mo 박막을 CIGS 증착공정을 통하여 태양전지 효율을 측정하였다. 스퍼터링법과 아크 이온 플레이팅법으로 제조된 CIGS용 Mo 후면전극 위에 CIGS 박막 제조시 최대 효율은 11.43%, 11.14% 을 나타내었으며 Fill factor 는 67%와 57.3% 의 결과을 얻었다. 제조된 CIGS 셀의 단면 구조를 분석하기 위해 SEM 과 EDS 를 이용하였다. 두 공정방법으로 제조된 CIGS 셀의 단면을 관찰하여 Mo 전극위에 CIGS 박막 성장시의 입자크기가 스퍼터링법보다 아크 이온 플레이팅법이 박막성장이 더딘 것을 알 수 있었다. 그리고 아크 이온 플레이팅법을 이용한 SLG 기판재위에 CIGS 용 Mo 후면전극의 제조와 적용 가능성에 대해 알아보았다.

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Structural Analysis of Simulated Fission-Produced Noble Metal Alloys and Their Superconductivities

  • 박용준;이광용;이종규;허용득;김원호
    • Bulletin of the Korean Chemical Society
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    • 제21권12호
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    • pp.1187-1192
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    • 2000
  • Ternary (Mo-Ru-Pd) and binary (Mo-Ru, Mo-Pd) alloys have been prepared using an Ar arc melting furnace. Mo and the noble metals, Ru and Pd, are the constituents of metallic insoluble residues, which were found in the early days of post-irradiation studies on uranium oxide fuels. In the present study, the structure of the alloys was evaluated using a powder X-ray diffractometer. Unit cell parameters were determined by least squares refinements of powder X-ray diffraction data. Scanning electron microscopic analyses of the surface of the alloys indicated that surface morphology was dependent on the crystallographic structure as well as its composition. Measurements of the magnetic susceptibility of the alloys showed evidence of superconducting transition from 3 to 9.2 K. Among the ternary and binary alloys, the ${\sigma}-phase$ showed the highest superconducting transition temperature,~9.2 K.

박육구상흑연주철에 있어서 Mo 첨가 및 주물두께의 영향에 관한 연구 (Study on the Effect of Mo Addition and Casting Thickness on the Mechanical Properties of Thin Ductile Cast Iron)

  • 송병우;최양진;김영환;박용진
    • 한국주조공학회지
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    • 제13권2호
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    • pp.175-186
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    • 1993
  • In this study, the effect of Mo addition on the microstructure and mechanical properties of ductile cast iron have been investigated. The amounts of Mo and the thickness of specimen have been varied from 0 to 4.79wt% and 13mm, 10mm and 6mm, respectively. As the casting thickness decreases, the average size of spheroidal graphite is decreased and the hardness increases. By increasing the Mo content, the tensile strength of ferrite and pearlite matrix increases and shows maximum which is about $30{\sim}40%$ higher than ordinary ductile cast iron. After the maximum, adding more Mo results in gradual transformation of ferrite and pearlite to bainite and thus tensile strength decreases again. The elongation decreases continueously with Mo content. The addition of Mo about $0.5{\sim}1.0wt%$ improves the wear resistance and tensile strength of thin ductile cast iron.

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고 Si 구상흑연주철의 조직과 기계적성질에 미치는 Si과 Mo의 영향 (The Effects of Si and Mo on the Structures and Mechanical Properties in High Si Spheroidal Graphite Cast Iron)

  • 김종연;나형용
    • 한국주조공학회지
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    • 제10권3호
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    • pp.225-234
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    • 1990
  • Spheroidal graphite cast irons which are Fe-3%C-(4-6)%Si-(0-0.5)%Mo were studied to improve not only heat resistance but also mechanical properties. With increasing Mo content, the graphitization was decreased and carbide volume fraction was increased. The graphite spheroidization ratio was not decreased in Fe-3%C-6%Si-Mo system cast iron with increasing Mo content, but that was decreased in Fe-3%C-4%Si-Mo system and Fe-3%C-5%Si-Mo system cast irons. Hardness was increased with the Si and Mo contents. At constant Si content, tensile strength was increased with increasing Mo content, but that was decreased at 6%Si. In the experiment of oxidation, weight gain was decreased as the Si and/or Mo content increased, but increased at 1.5%Mo content.

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사상체질(四象體質) 진단법(診斷法)(용모(容貌), 체형(體形), 심성(心性))의 임상적(臨床的) 적용(適用)에 관한 연구(硏究) (The Study on the Clinical Application of the Methods of Sasang Constitution Diagnosis)

  • 김종원;정원교
    • 사상체질의학회지
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    • 제12권2호
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    • pp.34-42
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    • 2000
  • Background and Purpose ; Sasang Constitutional medicine is dividing individual's constitutions into four categories. Determination of an individual's constitution however, can be different according to what diagnostic standards apply. In this study, We investigated how different the applying results of the three diagnostic standards-the yong-mo(容貌), the body type(體形), and the mind(心性)-are and what the inter-diagnostic standard agreement is. Methods ; 36 patients in cerebral-infarction, admitted into the Dong-Eui Korean hospital from 1. May. 2000 to 12. October. 2000, were diagnosed by three diagnostic standards - the yong-mo(容貌), the body type(體形), and the mind(心性). Each patient was treated by Sasang constitutional medicine. The agreement of the final constitutional diagnosis and the result of each diagnostic standard was analyzed. Results 1. The number of Taeeumin was 13(40.6%), Soyangin was 10(31.3%), Soeumin was 9(28.1%). 2. In terms of analysis on the agreement of the final constitutional diagnosis and the result of each diagnostic standard, the yong-mo(容貌) showed the highest agreement of 93.8%, followed by 68.8% of the mind(心性), and the body type(體形) showed the lowest agreement of 53.1%. 3. The yong-mo(容貌) standard showed high diagnostic rate of the three constitutions(Soyangin, Taeeumin, Soeumin) generally and diagnostic rate of Soeumin was especially high. The body type(體形) standard showed low diagnostic rate of Taeeumin, and high diagnostic rate of Soeumin. The mind(心性) standard showed low diagnostic rate of Soeumin. 4. In terms of analysis on the agreement of inter-diagnostic standard result, the yong-mo(容貌) and the mind(心性) show the highest agreement, the mind(心性) and the body type(體形) showed the lowest agreement. 5. If the results come out that the three diagnostic standards have no concentration on one constitution, it was effective to choose the result of the yong-mo(容貌) standard. If it is the case the result of inter-diagnostic standard agreed more than two, it was better to follow the two agreed result than to follow the result of one specific characteristic standard.

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유도결합 플라즈마 파워에 따른 MoN 코팅막의 결정구조 및 기계·전기적 특성 변화 (Relationship between inductively coupled plasma and crystal structure, mechanical and electrical properties of MoN coatings)

  • Jang, Hoon;Chun, Sung-Yong
    • 한국표면공학회지
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    • 제55권2호
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    • pp.77-83
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    • 2022
  • Nanocrystalline MoN coatings were prepared by inductively coupled plasma magnetron sputtering (ICPMS) changing the plasma power from 0 W to 200 W. The properties of the coatings were analyzed by x-ray diffraction, field emission scanning electron microscopy, atomic force microscopy, nanoindentation tester and semiconductor characterization system. As the ICP power increases, the crystal structure of the MoN coatings changed from a mixed phase of γ-Mo2N and α-Mo to a single phase γ-Mo2N. MoN coatings deposited by ICPMS at 200 W showed the most compact microstructure with the highest nanoindentation hardness of 27.1 GPa. The electrical resistivity of the coatings decreased from 691.6 μΩ cm to 325.9 μΩ cm as the ICP power increased.