• 제목/요약/키워드: x-ray diffraction(XRD)

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RF 마그네트론 스퍼터링 법으로 제작한 ITZO 박막의 구조 및 광학적 특성 (Structural and Optical Properties of ITZO Deposited by RF Magnetron Sputtering)

  • 김동렬;배지환;황동현;손영국
    • 한국표면공학회지
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    • 제48권6호
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    • pp.292-296
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    • 2015
  • Indium tin zinc oxide (ITZO) thin films were deposited on glass and quartz substrates by RF magnetron sputtering. The substrate temperature varied from $100^{\circ}C$ to $400^{\circ}C$. The structural and optical properties of thin films were investigated by X-ray diffraction (XRD), Field Emission Scanning electron microscopy (FESEM) and UV-Visible transmission spectra. It has been found from X-ray diffraction patterns that increasing the substrate temperature, the amorphous structure changes into polycrystalline structure. The FESEM results showed that all ITZO thin films have a smooth surface. The average optical transmittance (400 - 800 nm) was 82% and 80% at all films deposited at $200^{\circ}C$. The band gap energy ranges 3.41 to 3.57eV and 2.81 to 3.44eV with a maximum value at $200^{\circ}C$ all substrates temperature.

Phase identification of $C_3N_4$ in CN films prepared by rf plasma chemical vapor deposition and dc magnetron sputtering

  • Fu, Dejun;Wu, Dawei;Zhang, Zhihong;Meng, Xianquan;He, Mengbing;Guo, Huaixi;Peng, Yougui;Fan, Xiangjun
    • 한국진공학회지
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    • 제7권s1호
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    • pp.140-148
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    • 1998
  • We prepared $C_3N_4$ films by rf plasma enhanced chemical vapor deposition(PCVD) and alternating $C_3N_4$/TiN composite films by dc magnetron sputtering. X-ray diffraction (XRD) and transmission electron diffraction (TED) revealed that the structure of the films is amorphous or polycrystalline, depending on deposition conditions and heat treatment. X-ray photoelectron spectroscopy (XPS) and Fourier transform infrared (FTIR) spectroscopy confirmed the presence of $sp_3\; and sp _2$ hybridized C atoms bonded with N atoms in the tetrahedral and hexagonal configurations, respectively. Graphite-free $C_3N_4$ films were obtained by PCVD under optimal conditions. To prepare well crystallized $C_3N_4$ films by magnetron sputtering, we introduced negatively biased gratings in the sputtering system. CN films deposited at grating voltages (Vg) lower than 400V are amorphous. Crystallites of cubic and $\beta$-$C_3N_4$ were formed at increased voltages.

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Study on the Electrical Conductivity and Catalytic Property by Structural Change of 70V2O5-10Fe2O3-13P2O5-7B2O3 Glass with Crystallization

  • Jeong, Hwa-Jin;Cha, Jae-Min;Ryu, Bong-Ki
    • 한국세라믹학회지
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    • 제54권5호
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    • pp.406-412
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    • 2017
  • $70V_2O_5-10Fe_2O_3-13P_2O_5-7B_2O_3$ glasses were prepared to study the electrical conductivity and catalytic properties of the structural change with crystallization. The structural changes were analyzed by determining the molecular volume from the sample density; using X-Ray Diffraction (XRD) analysis, which indicated that $V_2O_5$, $VO_2$ and $B_2O_3$ crystals in heat-treated more than 1h samples. Especially a new crystalline phase of non-stoichiometric $Fe_{0.12}V_2O_5$ was formed after 6 h heat treatment. The V-O bonding change after crystallization was analyzed by Fourier Transform Infrared Spectroscopy (FTIR); V ion change from $V^{5+}$ to $V^{4+}$ was shown by XPS. Conductivity and catalytic properties were examined based on the polaronic hopping of V and Fe ions, which exhibited different valence states with crystallization.

Synthesis, Crystal Structures and Properties of Two Binuclear Supramolecular Complexes Based on Biphenyl-2,2'-dicarboxylic Acid Ligand

  • Tang, Jin-Niu;Pan, Gang-Hong;Li, Long;Tian, Wei-Man;Huang, Zhong-Jing
    • Bulletin of the Korean Chemical Society
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    • 제34권2호
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    • pp.374-378
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    • 2013
  • Two novel binuclear metal-organic coordination complexes [$Cd_2(Hdpa)_4(bpy)_2$] (1), [$Dy_2(dpa)_2(bpy)_2(NO_3)_2-(H_2O)_2$](bpy) (2) (where $H_2dpa$ = biphenyl-2,2'-dicarboxylic acid, bpy = 2,2'-bipyridine) have been synthesized under hydrothermal conditions and characterized by single crystal X-ray diffraction, spectral method (IR), elemental analysis (EA), powder X-ray diffraction (XRD), electronic spectra (UV-vis), fluorescent in the solid state and thermogravimetric analysis (TGA). Complexes 1-2 crystallizes isomorphously in the Triclinic space group P-1. The ${\pi}-{\pi}$ stacking interactions and hydrogen-bonds play a vital role in determining the crystal packing and construction of the extended 3-D supramolecular network.

Effect of process parameters on the recovery of thorium tetrafluoride prepared by hydrofluorination of thorium oxide, and their optimization

  • Kumar, Raj;Gupta, Sonal;Wajhal, Sourabh;Satpati, S.K.;Sahu, M.L.
    • Nuclear Engineering and Technology
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    • 제54권5호
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    • pp.1560-1569
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    • 2022
  • Liquid fueled molten salt reactors (MSRs) have seen renewed interest because of their inherent safety features, higher thermal efficiency and potential for efficient thorium utilisation for power generation. Thorium fluoride is one of the salts used in liquid fueled MSRs employing Th-U cycle. In the present study, ThF4 was prepared by hydro-fluorination of ThO2 using anhydrous HF gas. Process parameters viz. bed depth, hydrofluorination time and hydrofluorination temperature, were optimized for the preparation of ThF4 in a static bed reactor setup. The products were characterized with X-Ray diffraction and experimental conditions for complete conversion to ThF4 were established which also corroborated with the yield values. Hydrofluorination of ThO2 at 450 ℃ for half an hour at a bed depth of 6 mm gave the best result, with a yield of about 99.36% ThF4. No unconverted oxide or any other impurity was observed. Rietveld refinement was performed on the XRD data of this ThF4, and Chi2 value of 3.54 indicated good agreement between observed and calculated profiles.

SEM과 XRD를 이용한 수열온도별 화재피해 콘크리트의 Ca(OH)2 분석 (Analysis of Fire Damaged Concrete Ca(OH)2 by Heating Temperature Using Scanning Electron Microscope and X-ray Diffraction)

  • 임군수;한수환;현승용;김종;한민철;한천구
    • 한국건축시공학회:학술대회논문집
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    • 한국건축시공학회 2022년도 가을 학술논문 발표대회
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    • pp.149-150
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    • 2022
  • In Korea, there is no clearly established technology for diagnosing and evaluating the damage depth of concrete structures created by fire. There have been cases of repairing, reinforcing, and demolishing degraded structures without diagnosing the damage depth. The commonly used phenolphthalein-based carbonate thickness measurement does not satisfy the complete disappearance condition of Ca(OH)2 in the interval where the relatively stationary flow declines after exposure to high temperatures. Even a small amount of Portlandite[Ca(OH)2] reacts with a red color, and the damage depth is misjudged. It was confirmed by X-ray diffraction and scanning electron microscope that Ca(OH)2 existed from 300℃ to 500℃ where the residual compressive strength decreased.

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기계적 합금화 시료에서 미소상 피이크의 소멸현상 해석(II) (Detail analysis of the peak disappearance of minor phase in mechanically alloyed samples(II))

  • 김혜성
    • 한국산업융합학회 논문집
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    • 제4권1호
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    • pp.27-34
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    • 2001
  • Refining of powder particles and their dissolution into the Al matrix during mechanical alloying(MA) were investigated by using X-ray diffraction(XRD) transmission electron microscopy (TEM) functions of alloy composition, milling time and ball to powder ratio(BPR). It is found that Ti particles less than 20nm are observed in a dark field image of mechanically alloyed Al-10wt%Ti whose XHD pattern exhibits no Ti peak. The observed change of lattice constant of AI indicates that about 1 wt%Ti can he solved in Al after MA for a long time, independent of alloy composition, milling time and BPR, suggesting that most of Ti particles arc retained in the Al matrix. It is concluded that the disappearance of XRD peaks in mechanically alloyed Al-10wt%Ti is not simply attributable to the dissolution of Ti into Al, but associated mainly with extreme refining and/or heavy straining of Ti Particles.

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Mo/Si 다층박막의 특성 평가에 관한 연구 (Study on the Evaluation for the Property of Mo-Si Multilayers)

  • 허성민;김형준;이동현;이승윤;이영태
    • 마이크로전자및패키징학회지
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    • 제8권2호
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    • pp.15-18
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    • 2001
  • Magnetron sputtering 장비를 이용하여 극자외선 노광 공정용 Mo/Si 다층 박막을 증착하였다. 증착 파워로는 Mo의 경우 DC파워를, Si의 경우 RF파워를 이용하였다. 각각의 target에 인가되는 DC 또는 RF 파워의 시간 및 파워 조절을 통해서 원하는 구조인자를 가진 다층박막을 증착하였다. 증착된 다층박막을 단면 TEM, low/high angle XRD 등을 이용하여 박막의 미세구조와 interfacial layer의 거동을 살펴 보았으며, low angle XRD로부터 다층박막을 간접적으로 평가할 수 있었으며, 단면 TEM으로부터 Si위에 형성되는 Mo의 interfacial layer가 Mo위에 형성되는 경우보다 두꺼운 것을 알 수 있었다.

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폐콘크리트 미분말을 이용하여 제조한 저탄소형 클링커의 XRD 및 영상분석 (XRD and Image Analyis of Low Carbon Type Recycled Cement Using Waste Concrete Powder)

  • 신현욱;송훈;추용식;이종규;박동천
    • 한국건축시공학회:학술대회논문집
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    • 한국건축시공학회 2014년도 춘계 학술논문 발표대회
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    • pp.252-253
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    • 2014
  • This study is to XRD and image analysis of low carbon type recycled cement from waste concrete powder and cement raw materials. Waste concrete powder possible to low carbon type recycled cement in small part of additive materials. Also, low carbon type recycled cement using waste concrete powder is suitable for ordinary portland cement.

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Determination of temperature and flux variations during ultra-thin InGaN quantum well growth on a 2" wafer for GaN Green LED

  • 김효정;김민호;정훈영;이현휘
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2010년도 제39회 하계학술대회 초록집
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    • pp.149-149
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    • 2010
  • The origin of the inhomogeneous distribution of photoluminescence (PL) peak wavelength on a commercial 2" GaN wafer for green light emitting diode has been investigated by wide momentum transfer (Q) range x-ray diffraction (XRD) profile of InGaN/GaN multiple quantum wells. Near the GaN (0004) Bragg peak, wide-Q range XRD (${\Delta}Q$ > $1.4{\AA}-1$) was measured along the growth direction. Wide-Q XRD gives precise and direct information of ultra-thin InGaN quantum well structure. Based on the QW structural information, the variation of PL spectra can be explained by the combined effect of temperature gradient and slightly uneven flow of atomic sources during the QW growth. In narrow variations of indium composition and thickness of QW, an effective indium composition can be a good character to match structural data to PL spectra.

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