• 대한전기학회:학술대회논문집
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• 대한전기학회 1994년도 하계학술대회 논문집 C
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• pp.1236-1238
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• 1994

TiAlN thin films were prepared by a multi target r.f magnetron sputtering system under different conditions. We have investigated the resistivity and T.C.R. (Temperature Coefficient of Resistance) characteristics of TiAlN films deposited on $Al_2O_3$ and glass substrates by sputtering in an $Ar:N_2$ gas mixture. We used Al and Ti metal as Target Material and $Ar:N_2$ gas as working gas. We varied the partial pressure ratio of $N_2/Ar$ from 0.2/7 to 1.0/6.2 (SCCM). And the R.F power of Ti and Al Target also were varied as 160/240, 200/200 and 240/160(W). In this experiment, we can get the precision thin film resistor with a very low T.C.R. (Temperature Coefficient of Resistance) below 25 ppm ${\Omega}/^{\circ}C$.

• 대한기계학회논문집B
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• 제24권9호
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• pp.1185-1194
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• 2000

The characteristics of intake port flow and engine performance with swirl ratio variance in a turbocharged D.I. diesel engine were studied in this paper. The intake port flow is important factor which have influence on the engine performance and exhaust emission because the properties in the injected fuel depend on the combustion characteristics. Through these experiments it can be expected to satisfy performance and emission by optimizing the main parameters; the swirl ratio of intake port, injection timing and compression ratio. The swirl ratio for ports was modified by hand-working and measured by impulse swirl meter. For the effects on performance and emission, the brake torque and brake specific fuel consumption were measured by engine dynamometer, NOx and smoke were measured by gas analyzer and smoke meter. The results of steady flow test are as follows; as the valve eccentricity ratio are closed to cylinder wall, the flow coefficient and swirl intensity are increased. Also we realized that there is a trade-off that the increase of swirl ratio decreases mean flow coefficient and increases the Gulf factor. And the optimum parameters to meet performance and emission through engine test are as follows; the swirl ratio 2.43, injection timing BTDC 13oCA and compression ratio 15.5.

• 한국산업보건학회지
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• 제3권2호
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• pp.188-193
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• 1993

Toluene in air and blood and hippuric acid in urine were checked for the 41 female workers who are exposed to toluene and have normal liver function in shoe making factories in July, 1993. Toluene in air was sampled with charcoal by personal air sampler at least 4 times and analyzed by gas chromatography. At the end of shift, blood and spot urine were collected with a vacuum tube containing EDTA and a polyethylene bottle for detecting blood toluene and urine hippuric acid and analyzed by gas chromatography and high performance liquid chromatography. Means of air and blood toluene and urine hippuric acid concentrations were 34.35ppm, 0.360mg/L, and 1.78g/g creatinine, respectively. Toluene in air showed a good correlation with hippuric acid in urine(r=0.4503) and toluene in blood(r=0.4596). The hippuric acid in urine and toluene in blood corresponded 10 exposure of 100ppm toluene in air were 2.628g/g creatinine and 0.481mg/L. Blood toluene and urine hippuric acid expected ratio were not correlated to the obesity index and working duration, however increased with age.

• 청정기술
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• 제7권3호
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• pp.203-214
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• 2001

플라즈마를 발생시키는 반응기체의 종류에 따라 실리콘 산화막 세정에 어떠한 영향을 미치는지에 대해 연구하였다. 압력 (100 mTorr), 전력 (300 W, 500 W), 전극간 거리 (5, 8, 11.5 cm), 세정시간 (90초, 180초), 가스유량 (50sccm) 등의 변수들을 고정시키고 $CHF_3$, $CF_4$, 아르곤, 산소 등의 세정가스를 변화시키며 세정성능을 비교하였다. 세정결과 아르곤 플라즈마는 단지 물리적인 스퍼터링 효과만으로 세정속도가 느렸다. 산소 플라즈마는 5cm 전극거리, 300W, 180초 세정시 좋은 세정효과를 내었으나, 표면거칠기가 증가하였다. $CF_4$ 플라즈마의 경우 가장 좋은 세정효과를 얻었다. $CHF_3$ 플라즈마는 CFx/F의 비율을 낮출 수 있는 첨가기체가 필요함을 알 수 있었다. $CHF_3$에 아르곤을 첨가하였을 경우에는 원활한 세정효과를 얻을 수 없었으나, 산소를 첨가하였을 경우 좋은 세정효과를 얻을 수 있었다.

• 한국항공우주학회지
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• 제32권3호
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• pp.66-73
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• 2004

탄화수소 계열의 액체로켓엔진용 연료로서의 액화천연가스의 특성을 성분 및 함량 분석, 냉각제로서의 특성과 엔진 성능 인자로서 특성속도와 비추력 관점에서 평가하였다. 액화천연가스내의 메탄의 함량이 연료로서의 특성을 결정짓는 주요한 인자이었으며, 재생냉각형 액체로켓엔진의 연료로 사용되기 위해서는 최소 90% 이상의 메탄 함량이 요구되는 것으로 판단된다. 한편, 예비 냉각에 의한 액화천연가스의 일부 성분의 응결이 예상되어 정상적인 엔진 작동을 방해하는 요소가 될 수 있다. 약 90%의 메탄 체적 함량을 가지는 액화천연가스의 액체로켓엔진의 작동 조건은 화학 당량비적 혼합비로 표준화한 추진제 혼합비로 0.75가 최적이었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집
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• pp.22-25
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• 2002

In this paper, we deposited MgO buffer layer on p-type (100)Si substrate in the condition of substrate temperature 400$^{\circ}C$, working gas ratio Ar:O$_2$=80:20, RF Power 50W, working pressure 10mtorr, and the thickness of the film was about 300${\AA}$. Then we deposited Ba$\sub$0.5/Sr$\sub$0.5/TiO$_3$ thin film using RF Magnetron sputtering method on the MgO/Si substrate in various RF power of 25W, 50W, 75W. The film deposited in 50W showed the best crystalline from the XRD measurement. To know the electrical properties of the film, we manufactured Al/BSTMgO(300${\AA}$)/Si/Al structure capacitor. In the result of I-V measurement, The leakage current density of the capacitor was lower than 10$\^$-7/A/$\textrm{cm}^2$ at the range of ${\pm}$150kV/cm. From C-V characteristics of the capacitor, can calculate the dielectric constant and it was 305. Finally we deposited BST thin film on bare Si substrate and (100)MgO substrate in the same deposition condition. From the comparate of the properties of these samples, we found the properties of BST thin film which deposited on MgO/Si substrate were better than on bare Si substrate and similar to on MgO substrate.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 하계학술대회 논문집
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• pp.51-54
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• 2000

In this paper, $Ba_{0.5}$Sr$_{0.5}$TiO$_3$ thin films were prepared on Pt/Ti/SiO$_2$/Si substrate by RF magnetron sputtering method. We investigated effect of deposition conditions (especially RF input power) on structural properties of BST thin films. Deposit conditions of BST films were set working gas ratio, Ar:O$_2$= 70 : 30, working pressure 10mTorr, and RF input power 25W, 50W, 75W and 100W. Post-annealing using rapid thermal annealing(RTA) performed at 45$0^{\circ}C$, 55$0^{\circ}C$, $650^{\circ}C$, and 75$0^{\circ}C$ in oxigen ambient for 60 sec, respectively. The structural properties of BST films on Pt/Ti/SiO$_2$/Si substrate analysed by X-ray diffraction(XRD).).).

• 대한기계학회논문집B
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• 제36권9호
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• pp.937-944
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• 2012

선박의 주 추진용 디젤엔진에서 배출되는 배기가스의 폐열을 회수하는 발전시스템에 대하여, 작동유체로서 물이 적용된 3 변 사이클에 대한 열역학적 특성을 이론적으로 조사하였다. 그 결과로, 하나의 열원이 주어지면, 에너지 및 엑서지 효율은 터빈입구에서 작동유체에 대한 압력 및 온도의 특정한 조건에 의하여 최대화될 수 있었다. 그러한 조건에 대하여 응축온도의 증가에 따라, 터빈의 체적 팽창비를 적절하게 감소시킬 수 있었는데, 열원의 엑서지 손실률 및 응축기에서 엑서지 파괴율이 크게 증가되었다. 따라서, 상부 사이클에서 버려지는 엑서지를 회수하기 위하여, 저온 열원에 적합한 유기랭킨사이클을 하부 사이클로 적용하는 복합 사이클이 유용할 수 있다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.1980-1985
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• 2007

The purpose of this study is to investigate the performance of an autocascade refrigeration system using the refrigerant mixtures of R-134a(64${\sim}$72wt%), R-23(20${\sim}$25wt%) and R-14(8${\sim}$12wt%) as working fluids by experiment. The experimental apparatus consisted of a autocascade system with a compressor, condenser, evaporator, gas-liquid separator and cascade condenser, etc. Two main causes to this failure were considered as follows. First, the pressure ratio in the compressor was extremely increased at the beginning of the experiment. Second, the outlet temperature in compressor was higher than its limited temperature. For a stable operation of the compressor, a portion of the mixed refrigerant was by-passed at the inlet of the heat exchanger and transferred directly to the suction of the compressor in the modified system. The experimental parameters were changed weight of R-134a(1800g, 2800g), R-23(700, 800, 900g) and R-14(300, 400, 500g). The results showed that the best performance in case of R-134a of 2800g, R-23 of 900g and R-14 of 500g.

• 한국환경과학회지
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• 제23권5호
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• pp.943-962
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• 2014

Industrial gas drying, dilute gas mixtures purification, air fractionation, hydrogen production from steam reformers and petroleum refinery off-gases, etc are conducted by using adsorptive separation technology. The pressure swing adsorption (PSA) has certain advantages over the other methods, such as absorption and membrane, that are a low energy requirement and cost-effectiveness. A key component of PSA systems is adsorbents that should be highly selective to a gas being separated from its mixture streams and have isotherms suitable for the operation principle. The six standard types of isotherms have been examined in this review, and among them the best behavior in the adsorption of $CO_2$ as a function of pressure was proposed in aspects of maximizing a working capacity upon excursion between adsorption and desorption cycles. Zeolites and molecular sieves are historically typical adsorbents for such PSA applications in gas and related industries, and their physicochemical features, e.g., framework, channel structure, pore size, Si-to-Al ratio (SAR), and specific surface area, are strongly associated with the extent of $CO_2$ adsorption at given conditions and those points have been extensively described with literature data. A great body of data of $CO_2$ adsorption on the nanoporous zeolitic materials have been collected according to pressure ranges adsorbed, and these isotherms have been discussed to get an insight into a better $CO_2$ adsorbent for PSA processes.