• 한국태양에너지학회 논문집
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• 제33권2호
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• pp.11-17
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• 2013

Silicon nitride($SiN_x:H$) deposited by radio frequency plasma enhanced chemical vapor deposition(RF-PECVD) is commonly used for anti-reflection coating and passivation in crystalline silicon solar cell fabrication. In this paper, characteristics of the deposited silicon nitride was studied with change of working pressure, deposition temperature, gas ratio of $NH_3$ and $SiH_4$, and RF power during deposition. The deposition rate, refractive index and effective lifetime were analyzed. The (100) p-type silicon wafers with one-side polished, $660-690{\mu}m$, and resistivity $1-10{\Omega}{\cdot}cm$ were used. As a result, when the working pressure increased, the deposition rate of SiNx was increased while the effective life time for the $SiN_x$-deposited wafer was decreased. The result regarding deposition temperature, gas ratio and RF power changes would be explained in detail below. In this paper, the optimized condition in silicon nitride deposition for silicon solar cell was obtained as 1.0 Torr for the working pressure, $400^{\circ}C$ for deposition temperature, 500 W for RF power and 0.88 for $NH_3/SiH_4$ gas ratio. The silicon nitride layer deposited in this condition showed the effective life time of > $1400{\mu}s$ and the surface recombination rate of 25 cm/s. The crystalline silicon solar cell fabricated with this SiNx coating showed 18.1% conversion efficiency.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2012년도 제38회 춘계학술대회논문집
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• pp.356-363
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• 2012

This paper addresses an analytical study on the gas-solid two phase flows in a nozzle. The primary purpose is to get recognition into the gas-solid suspension flows and to investigate the particle motion and its influence on the gas flow field. The present study is the primal step to comprehend the gas-solid suspension flow in the convergent-divergent nozzle. This paper try to made a development of an analytical model to study the back pressure ratio, particles loading and the particle diameter effect on gas-solid suspension flow. Mathematical model of gas-solid two phase flow was developed based on the single phase flow models to solve the quasi-one-dimensional mass, momentum equations to calculate the steady pressure field. The influence of particles loading and particle diameter is analyzed. The results obtained show that the suspension flow of smaller diameter particles has almost same trend as that of single phase flow using ideal gas as working fluid. And the presence of particles will weaken the strength of the shock wave; the bigger particle will have larger slip velocity with gas flow. The thrust coefficient is found to be higher for larger particles/gas loading or back pressure ratio, but it also depends on the ambient pressure.

• 에너지공학
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• 제21권4호
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• pp.393-397
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• 2012

본 연구에서는 산업용 가스 엔진의 배기 폐열을 회수하여 발전하는 유기랭킨사이클을 구성하고 시스템 성능 분석 실험을 수행하였다. 엔진 배기가스 열을 작동유체(냉매 R134a)에 흡수시키기 위해 Shell & Tube 방식 열교환기를 엔진 배기 매니폴드 후단에 장착하였다. 엔진출력 60 kW인 조건에서 약 63 kW의 배기가스 열을 배출하였으며, 열교환기를 통해 작동유체에 흡수된 열량은 43~46 kW로서 배기가스 열회수율은 68~73%, 최대출력은 4.6 kW로서 배기가스 열량에 대한 최대출력의 비는 7.3%을 나타내었다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집E
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• pp.595-600
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• 2001

Thermal mass flow meter(TMF) and thermal mass flow controller(MFC) were used to measure and to control the mass flow rate of gases. TMF and MFC were designed for specified working pressure and gas. For the case of different working pressure and gases, the flow rate measurement accuracy decreased dramatically. In this study, a TMF and MFC was tested with three different gases and pressure range from 0.2 MPa up to 1.0 MPa. Effect of specific heat causes to increase flow measurement error as much as ratio of specific heat compared with reference gas. Changing of pressure causes to increase flow rate measurement error about -0.2% as the working pressure decreased 0.1 MPa. Response time of MFC was below 3.12 s for the case of increasing of flow rate. But the response time was increased up to 6.92 s for the case of decreasing of flow rate. When the solenoid valve was fully closed, a initial delay time of output of MFC was increased up to 1.36 s.

• 한국산학기술학회논문지
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• 제17권7호
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• pp.510-517
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• 2016

고압을 사용하는 초음속 제트기술은 작동유체와 관련하여 다양한 형태의 산업 및 공학응용분야에 널리 이용되고 있다. 본 연구에서는 고압파이프에서 분출되는 초음속 제트유동에 의해 생성되는 충격파의 영향을 고찰하기 위해 ANSYS FLUENT v.16를 가지고 SST $k-{\omega}$ 난류모델을 적용하여 작동유체(공기, 산소, 수소)에 따른 압력비 및 Mach수의 유동특성을 해석하였다. CFD 해석시 경계조건으로 입구의 가스온도는 300 K이고, 압력비율은 5:1로 설정하였으며, 밀도함수는 이상기체의 법칙을 이용하였고, 점성함수는 Sutherland 점성의 법칙을 이용하였다. 그 해석결과로 작동유체의 밀도가 작은 기체일수록 분출거리에 따라 압력비가 더 크게 떨어짐을 알 수 있었고, Mach수는 작동유체의 밀도가 높을수록 낮음을 알 수 있었다. 따라서 작동유체의 밀도에 따라 충격파의 영향이 크다는 점을 알았다. 본 연구를 토대로 다양한 작동유체에 따른 제트의 형상 및 직경 변화, 압력비의 변화 등에 따른 초음속 제트유동이 충격파에 미치는 영향에 대한 실험 및 CFD 해석연구와 실증연구가 병행하여 진행된다면 해석결과의 신뢰성은 더 높아질 것으로 사료된다.

• Nuclear Engineering and Technology
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• 제39권1호
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• pp.21-30
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• 2007

Current high-temperature gas-cooled reactors (HTGRs) are based on a closed Brayton cycle with helium gas as the working fluid. Thermodynamic performance of the axial-flow helium gas turbines is of critical concern as it considerably affects the overall cycle efficiency. Helium gas turbines pose some design challenges compared to steam or air turbomachinery because of the physical properties of helium and the uniqueness of the operating conditions at high pressure with low pressure ratio. This report present a review of the helium Brayton cycle experiences in Germany and in Japan. The design and availability of helium gas turbines for HTGR are also presented in this study. We have developed a new throughflow calculation code to calculate the design-point performance of helium gas turbines. Use of the method has been illustrated by applying it to the GTHTR300 reference.

• 반도체디스플레이기술학회지
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• 제7권3호
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• pp.51-54
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• 2008

In this study, we investigated variations in undoped ZnO thin film properties with working pressure, $O_2$/Ar ratio, and annealing ambient. Higher vacuum pressure during deposition was observed to bring about slower growth rate resulting in samples with better crystallinity as well as hole generation efficiency through formation of shallower oxygen interstitial. Given that $O_2$/Ar ratio is greater than unity, O provided from the ambient to ZnO during annealing was found to preferably situate at interstitial sites. When He was used for the second annealing, significant changes were not observed. On the other hand, O ambient caused increased density of oxygen interstitial, thereby making the film more intrinsic-like high resistivity ZnO.

• Transactions on Electrical and Electronic Materials
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• 제7권5호
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• pp.271-275
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• 2006

Al oped zinc oxide (AZO) films were prepared by Facing Targets Sputtering (FTS) system for TCO applications. The electrical, optical and structural properties of AZO thin films have been investigated with input current, oxygen gas flow ratio and substrate temperature. Deposition was carried out at room temperature and $200^{\circ}C$. Working gas pressures were fixed at 1mTorr. As a result, AZO thin film deposited with an optical transmittance over 80 % and a resistivity about $10^{-4}{Omega}{\cdot}cm$.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2011년도 제36회 춘계학술대회논문집
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• pp.16-19
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• 2011

고성능의 다단연소 사이클 액체로켓 엔진에 사용되는 Gas-centered swirl coaxial injector(GCSCI)의 분무특성에 대한 연구가 상압수류시험을 통해 이루어졌다. 시험은 물과 질소를 사용하였고, 고속카메라를 이용하여 분무형상을 측정하였고 이미지 프로세싱으로 데이터 처리에 활용하였다. 본 연구에서는 분사기의 리세스 길이와 액체노즐과 기체노즐의 간격과 같은 형상에 따른 영향과 기체와 액체의 운동량비에 따른 분무특성을 알아보았다.

• 한국전기전자재료학회논문지
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• 제15권10호
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• pp.909-913
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• 2002

The luminance and discharge characteristics of ac PDP may be significantly affected by a small amount of impurity gas in working gas. These impurity gases such as O$_2$, O, C and H$_2$ can be mixed in the manufacturing and /or discharge process. In this paper a small amount of impurity gas in acPDP are introduced quantitatively and the relationship between the amount of impurity gas and the luminance/discharge characteristics are investigated. The luminous efficiency decreased seriously with increase in the partial pressure of impurity gases, especially in H$_2$, O$_2$ and CO$_2$. Under the condition of the impurity gas ratio of 2${\times}$10$\^$-3/ for Ar, N2, H$_2$, CO$_2$ and O$_2$, the luminous efficiency decreased about 8%, 8%, 32%, 36% and 50%, respectively.