• Journal of the Optical Society of Korea
• /
• v.18 no.3
• /
• pp.236-243
• /
• 2014

Surface profiling and film thickness measurement play an important role for inspection. White light interferometry is widely used for engineering surfaces profiling, but its applications are limited primarily to opaque surfaces with relatively simple optical reflection behavior. The conventional bucket algorithm had given inaccurate surface profiles because of the phase error that occurs when a thin-film exists on the top of the surface. Recently, reflectometry and white light scanning interferometry were combined to measure the film thickness and surface profile. These techniques, however, have found that many local minima exist, so it is necessary to make proper initial guesses to reach the global minimum quickly. In this paper we propose combing reflectometry and white light scanning interferometry to measure the thin-film thickness and surface profile. The key idea is to divide the measurement into two states; reflectometry mode and interferometry mode to obtain the thickness and profile separately. Interferogram modeling, which considers transparent thin-film, was proposed to determine parameters such as height and thickness. With the proposed method, the ambiguity in determining the thickness and the surface has been eliminated. Standard thickness specimens were measured using the proposed method. Multi-layered film measurement results were compared with AFM measurement results. The comparison showed that surface profile and thin-film thickness can be measured successfully through the proposed method.

• Journal of the Korean Society for Precision Engineering
• /
• v.25 no.1
• /
• pp.85-91
• /
• 2008

White light scanning interferometry has gotten a firm position in 3D surface profile measuring field. Recently, the LCD industry gave a chance for this technology to enter into real industry fields. It is known that white-light phase-shifting algorithm give a best resolution compare to other algorithms, but there are some problems to be resolved. One of them is 300nm jump in height profile, called bat-wing effect. The main reason of this problem is an ambiguity of phase-peak detection algorithm, and some solution has been proposed, but it didn't work perfectly. In this paper, I will show the cases when these effects are occurred, and these height discrepancies will be almost disappeared when broad-band illuminators are used.

• Fashion Information and Technology
• /
• v.1
• /
• pp.20-27
• /
• 2004

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
• /
• 2017.05a
• /
• pp.175-178
• /
• 2017

The relative position of the eyeballs in the orbit can be a criterion for estimating multiple pathological conditions. Especially, it is useful to diagnose orbital fracture, thyroid eye disease, orbital tumor, and to evaluate the result of drug and surgical treatment. The Hertel and the Naugle exophthalmometer, which are typical measuring instruments used mainly to measure the protrusion of the eye, are inevitably error by the measurer. In this paper, we propose a method to increase the accuracy and repeatability of the measurement of eyeball exophthalmometric values by using a white light interferometer.

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.7 no.3
• /
• pp.81-86
• /
• 2008

I present a 3-D profiler specially devised for the profile measurement of specular surfaces that requires precision shape accuracy up to a few nanometer. A profile is reconstructed from the curvature of a test part of the surface at several locations along a line. The local curvature data are acquired with White-light Scanning Interferometry. Test measurement proves that the proposed profiler is well suited for the specular surface inspection like precision mirror.

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.10 no.2
• /
• pp.104-109
• /
• 2011

I present a method of aspheric surface profile measurement using 2nd derivative of local area profile. This method is based on the principle of curvature sensor which measures the local 2nd derivative under test along a line. The profile is then reconstructed from the data on the each point. Unlike subaperture-stiching method and slope detection method, 2nd derivative method has strong points from a geometric point of view in measuring the aspheric surface profile. The second derivative terms of surface profile is an intrinsic property of the test piece, which is independent of its position and tip-tilt motion. The curvature is measured at every local area with high accuracy and high lateral resolution by using White-light scanning interferometry.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
• /
• 2005.05a
• /
• pp.424-428
• /
• 2005

This paper shows a non-contact optical method to inspect micron scale parts which will be manufactured in micro-factory system. This inspection system should have some characteristics like a small size, flexibility, and high measuring speed. In the viewpoint of measuring capabilities, it also has resolution under micron scale with measuring range over millimeter scale. Two methods will be presented in this paper, one is Moire and the other is white-light scanning interferometry. Also some experimental results will be presented to show the possibilities of the proposed inspection system.

• Restorative Dentistry and Endodontics
• /
• v.16 no.2
• /
• pp.197-212
• /
• 1991

The purpose of this study was to roughness on the polished surface of visible light composite resins and was to observe the polished surfaces under Scanning Electrom Microscope(ISI DS 130 AKASHI Co. JAPAN). The surface roughness tester(Surfcom 700A Seimtsu profilometer Tokyo, Japan) was used to measure roughness of polished surfaces. In this study, 5 brands of visible of composite resins were examined, Pyrofile light bond Anterior Lite fil anterior Photo clearfil anterior & posterior Palfique light Anterior and posterior Silux Anterior. White point, Silicure point, Super snap Sof-Lex medium disk as cutting instrument, and celluloid matrix were used. The results obtained were as follows. 1. The Celluloid matrix produced the smoothest surfaces. 2. The surfaces made by Soflex medium disk was smoother than the surfaces made by any other polishing instruments. 3. The values of surface roughness made by White point, Silicon point and Super snap were similer. 4. Palfique light (AP) visible light composite resin showed the smoothest surface after polishing with Silicone point, Super snap disk and Soflex mediuem disk in all tested materials.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2001.04a
• /
• pp.110-113
• /
• 2001

We present an interferometer system, which is able to perform both the phase shifting interferometry and white light interferometry. The interferometer system uses a d.c. motor to control the probe position with an accuracy of 10nm, which shows an outstanding performance on white light interferometry. However, the moving mechanism of d.c. motor is not accurate enough for the phase shifting interferometry that requires a moving precision less than 1 nm. We therefore propose a Fourier transform technique to calculate the phase of interferograms, which is strongly resistant to calibration errors and external vibration. Experimental results show that the Fourier transform technique is capable of reducing the measurement error caused by inaccurate movement within 0.1nm.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2006.05a
• /
• pp.23-24
• /
• 2006

We present a dispersive scheme of white-light interferometry that enables not only to perform tomographical measurements of thin-film layers but also to measure a refractive index without mechanical depth scanning. The interferometry is found useful particularly for in-situ 3-D inspection of micro-engineered surfaces such as liquid crystal displays, semi-conductor and MEMS structure, which requires for high-speed implementation of 3-D surface metrology.