• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.25 no.2
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• pp.202-210
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• 2015

Objectives: The purpose of this study was to examine clean room(C/R) structure, air conditioning and contamination control systems and to provide basic information for identifying a correlation between the semiconductor work environment and workers' disease. Methods: This study was conducted at 200 mm and 300 mm semiconductor wafer fabrication facilities. The C/R structure and air conditioning method were investigated using basic engineering data from documentation for C/R construction. Furthermore, contamination parameters such as airborne particles, temperature, humidity, acids, ammonia, organic compounds, and vibration in the C/R were based on the International Technology Roadmap for Semiconductors(ITRS). The properties of contamination control systems and the current status of monitoring of various contaminants in the C/R were investigated. Results: 200 mm and 300 mm wafer fabrication facilities were divided into fab(C/R) and sub fab(Plenum), and fab, clean sub fab and facility sub fab, respectively. Fresh air(FA) is supplied in the plenum or clean sub fab by the outdoor air handling unit system which purifies outdoor air. FA supply or contaminated indoor air ventilation rates in the 200 mm and 300 mm wafer fabrication facilities are approximately 10-25%. Furthermore, semiconductor clean rooms strictly controlled airborne particles(${\leq}1,000{\sharp}/ft^3$), temperature($23{\pm}0.5^{\circ}C$), humidity($45{\pm}5%$), air velocity(0.4 m/s), air change(60-80 cycles/hr), vibration(${\leq}1cm/s^2$), and differential pressure(atmospheric pressure$+1.0-2.5mmH_2O$) through air handling and contamination control systems. In addition, acids, alkali and ozone are managed at less than internal criteria by chemical filters. Conclusions: Semiconductor clean rooms can be a pleasant environment for workers as well as semiconductor devices. However, based on the precautionary principle, it may be necessary to continuously improve semiconductor processes and the work environment.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.19 no.5
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• pp.611-617
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• 2018

The application of health monitoring, including a fault detection technique, is needed to secure the structural safety of large structures. A 2-step crack identification method for detecting the crack location and size of the beam structure is presented. First, a crack occurrence region was estimated using the modified Laplacian operator for the strain mode shape obtained from the distributed local strain data. The crack location and size were then identified based on the natural frequencies obtained from the acceleration data and the neural network technique for the pre-estimated crack occurrence region. The natural frequencies of a cracked beam were calculated based on an equivalent bending stiffness induced by the energy method, and used to generate the training patterns of the neural network. An experimental study was carried out on an aluminum cantilever beam to verify the present method for crack identification. Cracks were produced on the beam, and free vibration tests were performed. A crack occurrence region was estimated using the modified Laplacian operator for the strain mode shape, and the crack location and size were assessed using the natural frequencies and neural network technique. The identified crack occurrence region agrees well with the exact one, and the accuracy of the estimation results for the crack location and size could be enhanced considerably for 3 damage cases. The presented method could be applied effectively to the structural health monitoring of large structures.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.28 no.4
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• pp.401-408
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• 2015

Conventional model updating methods for the structures have used global structural responses which are modal parameters obtained through vibration measurements. Although models updated by modal parameters estimate global structural responses accurately, they have difficulties to predict local responses for safety assesment of structural members. The safety of structural members in the structures has been evaluated through the stress estimation based on strain measurements. Thus, this study additionally uses measured strain responses of structural members to perform model updating besides modal parameters. In the proposed method, the objective functions are set to the differences of the global and local responses obtained from updated model and measurement and those functions are minimized by NSGA-II, one of the multi-objective optimization techniques. The strain responses predicted from updated model are used for safety assessment of the steel frame structures. The proposed method are verified by numerical and experimental studies through the impact hammer tests for a steel frame specimen.

• Smart Structures and Systems
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• v.15 no.2
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• pp.355-373
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• 2015

An optimal sensor placement (OSP) method based on structural subsection technique (SST) and model reduction technique was proposed for modal identification of truss structures, which was conducted using genetic algorithm (GA). The constraints of GA variables were determined by SST in advance. Subsequently, according to model reduction technique, the optimal group of master degrees of freedom and the optimal objective function value were obtained using GA in a case of the given number of sensors. Correspondingly, the optimal number of sensors was determined according to optimal objective function values in cases of the different number of sensors. The proposed method was applied on a scaled jacket offshore platform to get its optimal number of sensors and the corresponding optimal sensor layout. Then modal kinetic energy and modal assurance criterion were adopted to evaluate vibration energy and mode independence property. The experiment was also conducted to verify the effectiveness of the selected optimal sensor layout. The results showed that experimental modes agreed reasonably well with numerical results. Moreover the influence of the proposed method using different optimal algorithms and model reduction technique on optimal results was also compared. The results showed that the influence was very little.

• Geomechanics and Engineering
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• v.16 no.4
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• pp.399-413
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• 2018

This paper addresses the issue of field measurement of excavation damage zone (EDZ) and its numerical simulation method considering both excavation unloading and blasting load effects. Firstly, a 2000 m-deep rock cavern in China is focused. A detailed analysis is conducted on the field measurement data regarding the mechanical response of rock masses subjected to excavation and blasting operation. The extent of EDZ is revealed 3.6 m-4.0 m, accounting for 28.6% of the cavern span, so it is significantly larger than rock caverns at conventional overburden depth. The rock mass mechanical response subjected to excavation and blasting is time-independent. Afterwards, based on findings of the field measurement data, a numerical evaluation method for EDZ determination considering both excavation unloading and blasting load effects is presented. The basic idea and general procedures are illustrated. It features a calibration operation of damage constant, which is defined in an elasto-plastic damage constitutive model, and a regression process of blasting load using field blasting vibration monitoring data. The numerical simulation results are basically consistent with the field measurement results. Further, some issues regarding the blasting loads, applicability of proposed numerical method, and some other factors are discussed. In conclusion, the field measurement data collected from the 2000 m-deep rock cavern and the corresponding findings will broaden the understanding of tunnel behavior subjected to excavation and blasting at great depth. Meanwhile, the presented numerical simulation method for EDZ determination considering both excavation unloading and blasting load effects can be used to evaluate rock caverns with similar characteristics.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.31 no.4A
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• pp.287-293
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• 2011

This paper investigates the applicability of a piezoelectric cantilever for energy supply of wireless sensor node used in structural health monitoring of bridges. By combining the constitutive equation of piezoelectric material and the dynamic equation of cantilever structure, the coupled governing equation for cantilever equipped piezoelectric patches has been addressed in matrix form. Forced excitation tests were carried out to validate the numerical model and to investigate the power output characteristics of the energy harvester. From the numerical simulation based on the measured bridge accelerations under KTX, Saemaul, Mugunghwa trains, the peak powers generated from the device were found to be 28.5 mW, 0.65 mW, 0.51 mW respectively. It is revealed from the results that bridge vibrations caused by moving loads is not a practical source for energy harvesting because of its low acceleration level, low frequency and short duration.

• Wind and Structures
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• v.23 no.4
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• pp.313-350
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• 2016

Taipei 101 Tower, which has 101 stories with height of 508 m, is located in Taipei where typhoons and earthquakes commonly occur. It is currently the second tallest building in the world. Therefore, the dynamic performance of the super-tall building under strong wind actions requires particular attentions. In this study, Large Eddy Simulation (LES) integrated with a new inflow turbulence generator and a new sub-grid scale (SGS) model was conducted to simulate the wind loads on the super-tall building. Three-dimensional finite element model of Taipei 101 Tower was established and used to evaluate the wind-induced responses of the high-rise structure based on the simulated wind forces. The numerical results were found to be consistent with those measured from a vibration monitoring system installed in the building. Furthermore, the equivalent static wind loads on the building, which were computed by the time-domain and frequency-domain analysis, respectively, were in satisfactory agreement with available wind tunnel testing results. It has been demonstrated through the validation studies that the numerical framework presented in this paper, including the recommended SGS model, the inflow turbulence generation technique and associated numerical treatments, is a useful tool for evaluation of the wind loads and wind-induced responses of tall buildings.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.32 no.1
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• pp.29-35
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• 2019

In this paper, a low-cost dynamic measurement system using the RGB-depth camera, Microsoft $Kinect^{(R)}$ v2, is proposed for measuring time-varying free surface motion of liquid dampers used in building vibration mitigation. Various experimental studies are conducted consecutively: performance evaluation and validation of the $Kinect^{(R)}$ v2, real-time monitoring using the $Kinect^{(R)}$ v2 SDK(software development kits), point cloud acquisition of liquid free surface in the 3D space, comparison with the existing video sensing technology. Utilizing the proposed $Kinect^{(R)}$ v2-based measurement system in this study, dynamic behavior of liquid in a laboratory-scaled small tank under a wide frequency range of input excitation is experimentally analyzed.

• IEMEK Journal of Embedded Systems and Applications
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• v.17 no.1
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• pp.9-17
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• 2022

As the COVID-19 pandemic situation worsens, the time spent indoors increases, and the exposure to indoor environmental pollution such as indoor air pollution and noise also increases, causing problems such as deterioration of human health, stress, and discord between neighbors. This paper designs and implements a system that measures and monitors indoor air quality and noise, which are representative evaluation criteria of the indoor environment. The system proposed in this paper consists of a particulate matter measurement subsystem that measures and corrects the concentration of particulate matters to monitor indoor air quality, and a noise measurement subsystem that detects changes in sound and converts it to a sound pressure level. The concentration of indoor particulate matters is measured using a laser-based light scattering method, and an error caused by temperature and humidity is compensated in this paper. For indoor noise measurement, the voltage measured through a microphone is basically measured, Fourier transform is performed to classify it by frequency, and then A-weighting is performed to correct loudness equality. Then, the RMS value is obtained, high-frequency noise is removed by performing time-weighting, and then SPL is obtained. Finally, the equivalent noise level for 1 minute and 5 minutes are calculated to show the indoor noise level. In order to classify noise into direct impact sound and air transmission noise, a piezo vibration sensors is mounted to determine the presence or absence of direct impact transmitted through the wall. For performance evaluation, the error of particulate matter measurement is analyzed through TSI's AM510 instrument. and compare the noise error with CEM's noise measurement system.

• Journal of dental hygiene science
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• v.23 no.2
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• pp.176-184
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• 2023

Background: Recently, a piezoelectric ultrasonic scaler based on a feedback control mechanism was introduced for pain relief. This study aimed to investigate the effects of a new ultrasonic scaler in reducing pain and discomfort in adults. Methods: A newly introduced ultrasonic scaler (Master 700^®) was used as the test device and a conventional ultrasonic scaler device (PIEZON^®) was used as the control device. Forty-one healthy adults visited the dental clinic for dental scaling but did not undergo scaling or periodontal treatment within 6 months. Intraoral examinations were performed before scaling and 3 months later; before scaling, both devices were randomly assigned on the left or right side of each dentition (split-mouth model) and scaling was performed by a registered dental hygienist. The levels of pain and discomfort during scaling were evaluated subjectively and objectively using the visual analog scale (VAS) and physiological monitoring of the heart rate (HR), respectively. Time was measured for each device. Results: All clinical indicators, except bleeding on probing, significantly improved with both devices. The treatment times were 7 minutes, 13 minutes (control) and 6 minutes, 59 minutes (test). VAS scores for pain were 4.89±2.12 (control) and 4.58±2.77 (test) points out of 10; for noise, these were 4.68±2.33 (control) and 4.55±2.55 (test), and for vibration, the values were 4.26±2.0 (control) and 4.18±2.48 (test). HR averages were 72.34±3.39 (control) and 75.97±9.78 (test) beats/min. No statistically significant differences were observed between the devices. Conclusion:The pain, discomfort levels, and scaling time of the new piezoelectric ultrasonic scaler did not differ from those of the conventional device. Further research and development are necessary for more prominent pain-relief effects of scaling devices.