• 제목/요약/키워드: vibration sensor

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Development and Evaluation of Self-powered Energy Harvester in Wireless Sensor Node for Diagnosis of Electric Power System (전력계통 구조물의 상태진단용 자가발전 무선 센서 노드 개발 및 평가)

  • Kim, Chang Il;Jeong, Young-Hun;Yun, Ji Sun;Hong, Youn Woo;Jang, Yong-Ho;Choi, Beom-Jin;Park, Shin-Seo;Son, Chun Myung;Seo, Duck Ki;Paik, Jong Hoo
    • Journal of Sensor Science and Technology
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    • v.25 no.5
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    • pp.371-376
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    • 2016

  • A self-powered piezoelectric energy harvester was developed for the application in wireless sensor node. The energy harvester was evaluated with power generation characteristics for the wireless sensor node for structural diagnosis of the electric power system. The self-powered wireless sensor node was set to measure temperature, vibration frequency of the electric power system. A piezoelectric harvester composed of 7 uni-morph cantilevers (functionalized as 6 generators and 1 vibration sensor) was connected to be an array and revealed to produce significantly high output power of approximately 10 mW at 120 Hz under 3.4 g((1 g = $9.8m/sec^2$). The wireless sensor node could work as the electric power generated by the developed piezoelectric harvester.

  • https://doi.org/10.5369/JSST.2016.25.5.371 인용 PDF KSCI

The Characteristic Analysis of Thin Film Sensor using The Membrane (Membrane을 이용한 박막센서 특성 분석)

  • 이순우;김상훈;안진호
    • Journal of the Microelectronics and Packaging Society
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    • v.9 no.3
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    • pp.37-41
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    • 2002

  • In this research, we investigate the properties of membrane and thin film sensor which is using magnetic resonance properties. we expect to $Si_xN_y$ and SiC materials as membrane materials, we measured thin film stress and properties to find the best membrane fabrication condition. Of the two membrane, $Si_xN_y$ thin film is the better than SiC thin film. because of an adequate tensile stress and lower thermal expansion coefficient as sensor structure layer. After performing deposition and patterning thin film sensor material on $Si_xN_y$, we analyzed the magnetic hysteresis and magnetic resonance frequency of sensor. If the magnetic field which is applied in sensor material is removed, magnetization made by magnetic field is transited to elastic mode. moreover. energy radiation is induced during the transition and voltage generates in sensor by energy radiation. At this moment, If voltage generation period is longer, mechanical vibration is induced and signal is generated by mechanical vibration. we also see that as the increase of thin film sensor' length and width, magnetic resonance frequency is decreased.

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