• 제목/요약/키워드: via holes

검색결과 139건 처리시간 0.032초

Positive Type Photoresist for Patterning of Interdielectric Layer of TFT Array

  • Lee, Hyo-Jung;Kim, Hyo-Jin;Kim, Soon-Hak;Park, Lee-Soon;Lee, Yun-Su;Song, Gab-Deuk
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권1호
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    • pp.564-566
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    • 2007
  • Synthesis of two photoactive compounds containing core imide moiety was carried out for an application to interdielectric layer in TFTLCD array. An aqueous alkaline developable polymer matrix was synthesized by free radical copolymerization. A positive photoresist formulation was developed utilizing synthesized UV monomers, photoactive compound, binder polymer, sulfactant and alkali developable polymer matrix. It was found that via-holes with good resolution, high transmittance and thermal resistance could be obtained by photolithographic process utilizing the new positive interdielectric material with high thermal stability.

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The comparative analysis of optimal designed web expanded beams via improved harmony search method

  • Erdal, Ferhat
    • Structural Engineering and Mechanics
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    • 제54권4호
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    • pp.665-691
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    • 2015
  • This study aims at comparing the optimum design of two common types open web expanded beams: with hexagonal openings, also called castellated beams and beams with circular openings referred to as cellular beams. The minimum weights of both beams are taken as the objective functions while the design constraints are respectively implemented from The Steel Construction Institute Publication Numbers 5 and 100. The design methods adopted in these publications are consistent with BS5950 parts. The formulation of the design problem considering the limitations of the above mentioned turns out to be a discrete programming problem. Improved harmony search algorithm is suggested to compare the optimum design of mentioned web-expanded beams to analysis the performance of both beams. The design algorithms based on the technique select the optimum Universal Beam sections, dimensional properties of hexagonal and circular holes and total number of openings along the beam as design variables.

내장형 수동소자의 제조를 위한 포토 이미징 후막리소그라피 기술 (Photo-imageable Thick-Film Lithography Technology for Embedded Passives Fabrication)

  • 임종우;김효태;김종희
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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    • pp.303-303
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    • 2007
  • Photo-imageable thick-film lithography technology was developed for the fabrication of embedded passives such as inductors and capacitors. In this study, photo-imageable dielectric and conductor pastes have apoted a negative type. Sodalime glass wafer, alumina substrate and zero-shrinkage LTCC green tapes were used as substrates. In result, The lithographic patterns were designed as lines and spaces for conductor material, or via-holes for ceramic, LTCC, materials. The scattering and reflection of UV-beam on the substrate had negative effects on fine patterning. The patterning performance was varied with the exposing and developing process conditions, and also varied with the substrate materials. Fine resolution of less then $50/50{\mu}m$ in line and space was obtained, which is difficult in screen printing method.

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"Charge Neutralization for Deposit Control"

  • Buikema, Peter D.
    • 펄프종이기술
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    • 제29권3호
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    • pp.87-94
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    • 1997
  • As the paper market becomes more and more competitive, more mills will want to switch to alkaline papermaking to take advantage of the Vowing demand. Many papermakers have tried to do this without success in the past much like the American papermakers did in the late 1970's. The Problem is that runnability Problems occur, drainage slows, Presses pick drying becomes more difficult and sheet quality suffers as a result Sheet holes and breaks occur, and runnability becomes a real operating problem. Converting to alkaline papermaking is not as simple as turning off the alum. We must be aware of the numerous factions that alum served at acid pH and provide alkaline alternatives. It is the purpose of this paper to discuss methods of deposit control via charge neutralization and system control at alkaline pH. This article explains the concept as well as the measurement and control. The resultant benefits are seen in runnability, quality and profitability for the papermaker.

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딥러닝 기반의 TSV Hole TCD 계측 방법 (Deep Learning Based TSV Hole TCD Measurement)

  • 정준희;구창모;조중휘
    • 반도체디스플레이기술학회지
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    • 제20권2호
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    • pp.103-108
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    • 2021
  • The TCD is used as one of the indicators for determining whether TSV Hole is defective. If the TCD is not normal size, it can lead to contamination of the CMP equipment or failure to connect the upper and lower chips. We propose a deep learning model for measuring the TCD. To verify the performance of the proposed model, we compared the prediction results of the proposed model for 2461 via holes with the CD-SEM measurement data and the prediction results of the existing model. Although the number of trainable parameters in the proposed model was about one two-thousandth of the existing model, the results were comparable. The experiment showed that the correlation between CD-SEM and the prediction results of the proposed model measured 98%, the mean absolute difference was 0.051um, the standard deviation of the absolute difference was 0.045um, and the maximum absolute difference was 0.299um on average.

Effects of Transfer Gate on the Photocurrent Characteristics of Gate/Body-Tied MOSFET-Type Photodetector

  • Jang, Juneyoung;Seo, Sang-Ho;Kong, Jaesung;Shin, Jang-Kyoo
    • 센서학회지
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    • 제31권1호
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    • pp.12-15
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    • 2022
  • In this study, we studied the effects of transfer gate on the photocurrent characteristics of gate/body-tied (GBT) metal-oxide semiconductor field-effect transistor (MOSFET)-type photodetector. The GBT MOSFET-type photodetector has high sensitivity owing to the amplifying characteristic of the photocurrent generated by light. The transfer gate controls the flow of photocurrent by controlling the barrier to holes, thereby varying the sensitivity of the photodetector. The presented GBT MOSFET-type photodetector using a built-in transfer gate was designed and fabricated via a 0.18-㎛ standard complementary metal-oxide-semiconductor (CMOS) process. Using a laser diode, the photocurrent was measured according to the wavelength of the incident light by adjusting the voltage of the transfer gate. Variable sensitivity of the presented GBT MOSFET-type photodetector was experimentally confirmed by adjusting the transfer gate voltage in the range of 405 nm to 980 nm.

딥 러닝 회귀 모델 기반의 TSOM 계측 (A Through-focus Scanning Optical Microscopy Dimensional Measurement Method based on a Deep-learning Regression Model)

  • 정준희;조중휘
    • 반도체디스플레이기술학회지
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    • 제21권1호
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    • pp.108-113
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    • 2022
  • The deep-learning-based measurement method with the through-focus scanning optical microscopy (TSOM) estimated the size of the object using the classification. However, the measurement performance of the method depends on the number of subdivided classes, and it is practically difficult to prepare data at regular intervals for training each class. We propose an approach to measure the size of an object in the TSOM image using the deep-learning regression model instead of using classification. We attempted our proposed method to estimate the top critical dimension (TCD) of through silicon via (TSV) holes with 2461 TSOM images and the results were compared with the existing method. As a result of our experiment, the average measurement error of our method was within 30 nm (1σ) which is 1/13.5 of the sampling distance of the applied microscope. Measurement errors decreased by 31% compared to the classification result. This result proves that the proposed method is more effective and practical than the classification method.

OPTICAL MULTI-CHANNEL INTENSITY INTERFEROMETRY - OR: HOW TO RESOLVE O-STARS IN THE MAGELLANIC CLOUDS

  • Trippe, Sascha;Kim, Jae-Young;Lee, Bangwon;Choi, Changsu;Oh, Junghwan;Lee, Taeseok;Yoon, Sung-Chul;Im, Myungshin;Park, Yong-Sun
    • 천문학회지
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    • 제47권6호
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    • pp.235-253
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    • 2014
  • Intensity interferometry, based on the Hanbury Brown-Twiss effect, is a simple and inexpensive method for optical interferometry at microarcsecond angular resolutions; its use in astronomy was abandoned in the 1970s because of low sensitivity. Motivated by recent technical developments, we argue that the sensitivity of large modern intensity interferometers can be improved by factors up to approximately 25 000, corresponding to 11 photometric magnitudes, compared to the pioneering Narrabri Stellar Interferometer. This is made possible by (i) using avalanche photodiodes (APD) as light detectors, (ii) distributing the light received from the source over multiple independent spectral channels, and (iii) use of arrays composed of multiple large light collectors. Our approach permits the construction of large (with baselines ranging from few kilometers to intercontinental distances) optical interferometers at the cost of (very) long-baseline radio interferometers. Realistic intensity interferometer designs are able to achieve limiting R-band magnitudes as good as $m_R{\approx}14$, sufficient for spatially resolved observations of main-sequence O-type stars in the Magellanic Clouds. Multi-channel intensity interferometers can address a wide variety of science cases: (i) linear radii, effective temperatures, and luminosities of stars, via direct measurements of stellar angular sizes; (ii) mass-radius relationships of compact stellar remnants, via direct measurements of the angular sizes of white dwarfs; (iii) stellar rotation, via observations of rotation flattening and surface gravity darkening; (iv) stellar convection and the interaction of stellar photospheres and magnetic fields, via observations of dark and bright starspots; (v) the structure and evolution of multiple stars, via mapping of the companion stars and of accretion flows in interacting binaries; (vi) direct measurements of interstellar distances, derived from angular diameters of stars or via the interferometric Baade-Wesselink method; (vii) the physics of gas accretion onto supermassive black holes, via resolved observations of the central engines of luminous active galactic nuclei; and (viii) calibration of amplitude interferometers by providing a sample of calibrator stars.

LTCC 적층 기술을 이용한 이중대역 칩 안테나의 설계 (Design of Dual-Band Chip Antenna using LTCC Multilayer Technology)

  • 김영두;원충호;이홍민
    • 대한전자공학회논문지TC
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    • 제42권3호
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    • pp.19-24
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    • 2005
  • 본 논문에서는 GPS/K-PCS 대역의 무선 이동 단말기 응용을 위한 LTCC 소형 칩 안테나의 모의실험과 제작, 측정 결과를 나타내었다. 설계된 LTCC 칩 안테나의 전체 크기는 $9mm\times15mm\times1.2mm$ 이다. 이중 대역 동작 특성을 위해 적층된 상부 미엔더 방사 패치는 하부 미엔더 방사 소자에 0.3mm의 높이를 갖는 비아홀을 통해 연결되었다. 하부의 미엔더 방사 소자는 GPS 대역에 중심 주파수가 일치하도록 설계되었으며, 상부의 미엔더 방사 페치는 K-PCS 중심 주파수에 일치하도록 설계 변수가 결정되었다. 제안된 안테나의 공진 주파수와 주파수 비는 미엔더 방사 패치의 실효 공진 길이와 비아홀의 높이 설계 변수에 의해 결정될 수 있었다. 제작된 안테나의 제반 특성으로부터 본 논문에서 제안된 안테나는 다중대역에서 동작하는 소형 칩 안테나로 응용될 수 있을 것이다.

마이크로스트립과 슬롯라인 천이기술을 이용한 전송선로 구현과 전력 분배기에 응용 (Transmission Line using Microstrip-Slotline Transition Technology and Its Application to Power Divider)

  • 김영;심석현;윤영철
    • 한국항행학회논문지
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    • 제17권6호
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    • pp.687-692
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    • 2013
  • 본 논문은 마이크로스트립과 슬롯라인 천이기술을 이용한 소형 전력분배기 설계를 제안하였다. 마이크로스트립과 슬롯라인 천이기술은 전력 분배기를 구성하는 ${\lambda}/4$ 전송선로를 멀티 레이어 구조 PCB를 이용하면 두개의 ${\lambda}/8$ 전송선로로 작게 구현할 수 있다. 여기서는 마이크로스트립과 슬롯라인 천이 지점에서 마이크로스트립 전송선로는 via를 사용하여 단락시켰고, 슬롯라인은 스파이럴 구조를 이용하여 전송선로의 길이를 짧게 사용하였다. 이러한 마이크로스트립과 슬롯라인 천이기술의 타당성을 보기위해서 중심주파수 2 GHz 에서 동작하는 전력분배기의 마이크로스트립 선로를 천이기술을 이용한 방법으로 구현하여 그 특성을 시뮬레이션, 제작 및 측정을 하여 기존의 전력분배기와 동일한 특성을 얻었다.