• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.777-780
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• 2005

The high vacuum in a electron beam lithography is basic condition, because electron beam vanish by collision with air molecules in generally atmosphere. To make high vacuum state, the vacuum control valve is essential. Most vacuum control valve are manual units. So, user of manual vacuum valve must have understanding vacuum process to change from low vacuum to high vacuum state. The user of electron beam lithography are troubled with operation of manual vacuum valve, in case the vacuum chamber is frequently open. In this paper, the design and performance test of auto vacuum control valve for electron beam lithography are described. With the auto vacuum control valve, the high vacuum level can reach 2.8E-5 Torr.

• Transactions of Materials Processing
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• v.20 no.7
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• pp.473-478
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• 2011

In this study, the performance of a thermo siphon type radiator made of copper for LED lighting system was evaluated by using an inverse heat transfer method. Heating experiments and finite element heat transfer analysis were conducted for three different cases. The data obtained from experiments were compared with the analysis results. Based on the data obtained from experiments, the inverse heat transfer method was used in order to evaluate the heat transfer coefficient. First, the heat transfer analysis was conducted for non-vacuum state, without the refrigerant. The evaluated heat transfer coefficient on the radiator surface was 40W/$m^2^{\circ}C$. Second, the heat transfer analysis was conducted for non-vacuum state, with the refrigerant, resulting in the heat transfer coefficient of 95W/$m^2^{\circ}C$. Third, the heat transfer analysis was conducted for vacuum state, with refrigerant. For the third case, the evaluated heat transfer coefficients were 140W/$m^2^{\circ}C$. Third, the heat transfer analysis was conducted for vacuum state, with refrigerant. For the third case, the evaluated heat transfer coefficients were 140W/$m^2^{\circ}C$ for the radiator body, 5W/$m^2^{\circ}C$. Third, the heat transfer analysis was conducted for vacuum state, with refrigerant for the rising position of radiator pipe, 35W/$m^2^{\circ}C$. Third, the heat transfer analysis was conducted for vacuum state, with refrigerant. For the highest position of radiator pipe, and 120W/$m^2^{\circ}C$ for the downturn position of radiator pipe. As a result of inverse heat transfer analysis, it was confirmed that the thermal performance of the current radiator was best in the case of the vacuum state using the refrigerant.

• Proceedings of the Korean Vacuum Society Conference
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• 2003.02a
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• pp.206-206
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• 2003

• Proceedings of the Korean Vacuum Society Conference
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• 1997.07a
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• pp.121-121
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• 1997

• Proceedings of the Korean Vacuum Society Conference
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• 1998.06a
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• pp.167-167
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• 1998

• Proceedings of the Korean Vacuum Society Conference
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• 1995.02a
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• pp.102-102
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• 1995

• Vacuum Magazine
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• v.2 no.1
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• pp.31-34
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• 2015

This article introduces fundamentals of self-diagnosis and predictive (or preventive) maintenance technologies for dry vacuum pumps. The state variables of dry pumps are addressed, such as the pump and motor body temperatures, consumption currents of main and booster pumps, mechanical vibration, and exhaust pressure, etc. The adaptive parametric models of the state variables of the dry pump are exploited to provide dramatic reduction of data size and computation time for self-diagnosis. Two indicators, the Hotelling's $T^2$ and the sum of squares residuals (Q), are illustrated to be quite effective and successful in diagnosing dry pumps used in the semiconductor processes.

• Proceedings of the Korean Vacuum Society Conference
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• 2001.07a
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• pp.130-131
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• 2001

• Proceedings of the Korean Vacuum Society Conference
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• 2002.06a
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• pp.183-184
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• 2002

• International Journal of Naval Architecture and Ocean Engineering
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• v.6 no.3
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• pp.723-736
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• 2014

Glass Fiber Reinforced Plastic (GFRP) structures are primarily manufactured using hand lay-up or vacuum infusion techniques, which are cost-effective for the construction of marine vessels. This paper aims to investigate the mechanical properties and failure mechanisms of the hybrid GFRP composites, formed by applying the hand lay-up processed exterior and the vacuum infusion processed interior layups, providing benefits for structural performance and ease of manufacturing. The hybrid GFRP composites contain one, two, and three vacuum infusion processed layer sets with consistent sets of hand lay-up processed layers. Mechanical properties assessed in this study include tensile, compressive and in-plane shear properties. Hybrid composites with three sets of vacuum infusion layers showed the highest tensile mechanical properties while those with two sets had the highest mechanical properties in compression. The batch homogeneity, for the GFRP fabrication processes, is evaluated using the experimentally obtained mechanical properties.