13.56 MHz discharge at atmospheric pressure & its possibilities for surface modification of material

• Alexandrov, A.F. (Physical Faculty of Moscow State University) ;
• Bugrov, G.E. (Physical Faculty of Moscow State University) ;
• Kondranin, S.G. (Plasma Tech. Co., Ltd.) ;
• Kralkina, E.A. (Plasma Tech. Co., Ltd.) ;
• Pavlov, V.B. (Plasma Tech. Co., Ltd.) ;
• Plaksin, V. (Physical Faculty of Moscow State University) ;
• Sergeenko, V.Yu. (Physical Faculty of Moscow State University) ;
• Timofeev, I.B. (Physical Faculty of Moscow State University) ;
• Choi, W.K. (Thin Film Technology Research Center, Korea Institute of Science and Technology) ;
• Vavilin, K.V. (Plasma Tech. Co., Ltd.)

• Published : 2001.07.05

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