• The KSFM Journal of Fluid Machinery
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• v.16 no.2
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• pp.10-14
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• 2013

The present study conducts CFD analyses on the internal flow fields of roots type vacuum pumps of semiconductor fabrication facility, and the computed CFD results for internal pressure and temperature distributions are applied to structural analyses of the pumps. The coupled analysis results between flow and structure show that the deformation of pump structure is mainly resulted from the thermal expansion of gas in pump, and the deformed impeller and housing produce their severe contact and impact phenomena causing mechanical damage and fracture.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.05a
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• pp.349-354
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• 2007

This paper considers acoustic analysis of silencer within a Dry vacuum pump. Main object is noise reduction of Dry Vacuum Pump using the silencer. First, we measured SPL and Intensity for noise source identification and then, designed for the silencer corresponding with noise character. 4-pole parameter are used for predicting transmission loss which is one of characteristics of silencer when we designed for silencer. Calculated Transmission Loss to change main effective factor and selected to optimal value using Design of Experiment. Finally, noise reduction is estimated to compare existing silencer with optimal silencer.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.17 no.10
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• pp.950-957
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• 2007

This paper considers acoustic characteristics of silencer within a dry vacuum pump. The main objective is to reduce noise in dry vacuum pump using the new designed silencer. First, SPL and sound intensity are measured for noise source identification and the new model silencer is designed corresponding to noise characteristics. 4-pole parameters are used to predict the transmission loss which is one of the interest characteristics of the new silencer. The calculated transmission loss is then used to change main effective factor and optimal value is selected by using design of experiment. By conducting an experiment, it is proved that the new designed silencer has reduced noise level by 6 dB(A) more than the original one.

• Proceedings of the Korean Vacuum Society Conference
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• 2009.02a
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• pp.210.1-210.1
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• 2009

• Proceedings of the Korean Vacuum Society Conference
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• 2007.08a
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• pp.119-119
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• 2007

• Journal of the Korean Vacuum Society
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• v.11 no.2
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• pp.87-96
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• 2002

Outgassing from such sources as paints, coatings, adhesives and other non-metallic surfaces can contaminate satellites, especially second surface mirror and optical lens, it cause satellite to fail in own missions. The vacuum bake-out test using high temperature(more than $85 ^{\circ}C$)and high vacuum(less than $5.0{\times}1-^{-3}$ Pa) certify that the components of satellite work properly and can survive and operate in space environment like high vacuum. In the bake-out chamber installed at SITC of KARI, Rotary vacuum pump and Booster pump produce low vacuum of 5.0 Pa, and then two cryopumps produce high vacuum of below $5.0{\times}10^{-3}$ Pa. Also 48 ceramic heaters were provided to simulate high temperature. During the vacuum bake-out test, we detected contaminants using RGA(Residual Gas Analyzer) and measure the outgassing rate of the contaminant using the TQCM(Thermoelectric Quartz Crystal Microbalance). Also, IR/UV Spectrometer and witness plate be used to certify that the components were suitable for the spacecraft. This paper includes the preparation and procedures of the bake-out test for SAR(Solar Array Regulator) and MLI(Multi Layer Insulator), which were the components of the spacecraft. Especially, we discussed the methods and results of the contamination measurement. In the bake-out for SAR, the contamination was measured continuously although it was on the decrease from TQCM results. And RCA established that it is a highly polymerized compound. In the MLI bake-out using RGA and witness plate, we didn't detect any contamination materials.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2017.05a
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• pp.1160-1164
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• 2017

In this research, a high altitude simulating test facility is designed using vacuum pump system composed of roots pumps and screw pumps. Air flow rate and chamber pressure are 1 kg/s and 2500 Pa, respectively. To design the test facility, experimental tests using certain pump combinations are performed for air injection of the order of hundreds of g/s. From the tests, it is found that 11 roots pumps and 33 screw pumps are required for the considered test facility. Test results are compared with theoretically estimated values. However, intake capacity theoretically estimated is found to be 20 percent larger than test results. This is thought because of higher pressure difference of roots pump for test conditions. Therefore, if more screw pumps are added for the considered pump system, it would be possible to lower the vacuum level of test chamber.

• Proceedings of the Korean Vacuum Society Conference
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• 1993.02a
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• pp.4-5
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• 1993

• Proceedings of the Korean Vacuum Society Conference
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• 1994.06a
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• pp.42-42
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• 1994

• Journal of the Korean Vacuum Society
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• v.2 no.1
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• pp.113-120
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• 1993