• Proceedings of the Korean Vacuum Society Conference
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• 2008.08a
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• pp.206-206
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• 2008

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.29-29
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• 2000

반도체 제조 공정을 비롯한 진공 산업에서는 진공 펌프에서 발생하는 backstream으로 인한 contamination이 주요 관심사가 되고 있다. 그러나 로타리 오일 펌프를 사용하는 경우에는 오일의 backstream으로 인한 contamination을 피할 수가 없어 현재는 오염 문제가 생산에 미치는 영향이 큰 반도체 공정에서는 건식 펌m을 적용/사용하고 있다. 본 발표서는 반도체는 제조 공정에 필수적으로 사용되고 있는 건식 펌프(dry pump)의 세계적 기술 동향을 살펴보고 건식펌프의 동작 원리 및 반도체 공정에서의 적용 사례등을 살펴보고자 한다.

• Proceedings of the Korean Society of Marine Engineers Conference
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• 2001.11a
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• pp.45-49
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• 2001

To maintain the freshness of produce, because of stand away between produced and consumer, we need refrigeration system that can supply to consumer at cold chain as soon as gathering. General refrigeration system consist of refrigeration chamber or low temperature store. But the vacuum technology can rapidly refrigeration without refrigerator. This precool system possible to get low precooled temperature, suitable for the fishes, the meat, the vegetables, the fruit etc. Especially get advantage that quality maintain through rapid refrigeration of ferment directly generate heat. Vacuum precool system's principle is that water saturated temperature reduce according to pressure is get to vacuum area, so product temperature reduce as water evaporation at product. In vacuum suction, unit, on early experiment period run the rotary type vacuum pump at purpose pressure, then maintain pressure by water-diven ejector. As the results, cabbage took about 60 minutes to reach from $23.2^{\circ}C$ to $4.5^{\circ}C$at 5mgHg abs.

• Journal of the Korean Vacuum Society
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• v.14 no.1
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• pp.7-16
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• 2005

Oil-Hydraulic pump consisting of swing twin-cylinder becomes to be used as a next generation of low vacuum pump. However, there is no enough flow-analysis for design improvement. It is essential to develope a numerical method for flow-analysis before manufacturing, in economic sense. Using a commercial code (Fluent), developed for flow-analysis, useful informations for design of pump were provided. Two-dimensional analysis has been performed to investigate the flow parameters such as pressure and velocity distributions between the swing twin-cylinder and the fixed cylinder. This numerical method will be used to design a better performance of pump consisting of swing twin-cylinder.

• Journal of the Korean Vacuum Society
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• v.15 no.5
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• pp.451-457
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• 2006

We measured pumping speed of a sputter ion pump with a honeycomb anode cell structure and compared the result with that of another sputter ion pump with a typical cylindrical anode cell structure. A cell module with a honeycomb structure has no dead space which is about 10 % of the entire horizontal area of the cell module with a cylindrical structure. This dead space makes a little contribution to the ionization of the gas, so the pumping performance of the pump with dead space is expected to be lowered by the amount. From the experimental data we concluded that the honeycomb cell structure is superior to the cylindrical structure by $5{\sim}10%$ in performance.

• Progress in Superconductivity and Cryogenics
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• v.15 no.1
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• pp.45-50
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• 2013

Closed-loop J-T (Joule-Thomson) refrigeration cycle is advantageous compared to common open loop $N_2$ decompression system in terms of nitrogen consumption. In this study, two closed-loop pure $N_2$ J-T refrigeration systems with sub-atmospheric device for cooling High Temperature Superconductor (HTS) power cable are investigated. J-T cooling systems include 2-stage compressor, 2-stage precooling cycle, J-T valve and a cold compressor or an auxiliary vacuum pump at the room temperature. The cold compressor and the vacuum pump are installed after the J-T valve to create sub-atmospheric condition. The temperature of 67 K is possible by lowering the pressure up to 24 kPa at the cold part. The optimized hydrocarbon mixed refrigerant (MR) J-T system is applied for precooling stage. The cold head of precooling MR J-T have the temperature from 120 K to 150 K. The various characteristics of cold compressor are invstigated and applied to design parameter of the cold compressor. The Carnot efficiency of cold compressor system is calculated as 16.7% and that of vacuum pump system as 16.4%. The efficiency difference between the cold compressor system and the vacuum pump system is due to difference of enthalpy change at cryogenic temperature, enthalpy change at room temperature and different work load at the pre-cooling cycle. The efficiency of neon-nitrogen MR J-T system is also presented for comparison with the sub-atmospheric devices. These systems have several pros and cons in comparison to typical MR J-T systems such as vacuum line maintainability, system's COP and etc. In this paper, the detailed design of the subcooled $N_2$ J-T systems are examined and some practical issues of the sub-atmospheric devices are discussed.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.102-102
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• 2011

인공위성이 임무를 수행하는 우주환경은 지상 환경과 달리 고진공 및 극저온의 극한환경으로 지상에서는 제대로 작동하는 것으로 관찰되더라도 우주환경에서는 예상하지 못한 기능장애를 일으켜 위성의 성능에 치명적인 영향을 미치기도 한다. 이에 10-5 torr 이하의 고진공과 -180$^{\circ}C$ 이하의 극저온 환경을지상에서 모사하여 위성체의 안정성 및 신뢰성을 시험한다. 시험에는 열진공챔버라고 불리는 우주환경모사기가 사용이 되며, 기본적으로 챔버 내부 진공형성이 중요하다. 우주환경의 모사를 위해 먼저 저진공펌프로 10-2 Torr 의 저진공을 형성한 후 Turbo-molecular pump 및 Cryopump를 이용하여 10-5 Torr 이하의 고진공을 형성하게 된다. 본 논문에서는 기존 우주환경모사기에 부착된 oil type rotary pump 및 구형 turbo-molecular pump의 교체 과정을 기술한다. 특히, 저진공펌프의 경우는 챔버 내부로의 oil 역류로 인한 오염 문제를 방지하기 위하여 dry type의 펌프가 설치되었다.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.05a
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• pp.202-205
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• 2006

Recently, high vacuum pumps are widely used in the semi-conduction and liquid-crystal display ( LCD ) process. The composite-type high vacuum pumps are widely used in the various processes. In this study, the pumping performance of composite-type molecular pumps has been investigated experimentally. The experimented pumps are a compound molecular pump ( CMP ) and hybrid molecular pump ( HMP ). The CMP consists with helical-type drag pump, at lower part, and with turbomolecular pump ( TMP ), at upper part. The HMP consists with disk-type drag pump, at lower part, and with TMP, at upper part. The experiments are performed in the outlet pressure of $0.2\;{\sim}\;533\;Pa$. We have measured the ultimate pressure, compression ratio, and pumping speed

• Journal of the Korean Vacuum Society
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• v.15 no.4
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• pp.338-346
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• 2006

In semiconductor process, it is so hard to predict an exact failure point of the vacuum pump due to its harsh operation conditions and nonlinear properties, which may causes many problems, such as production of inferior goods or waste of unnecessary materials. Therefore it is very urgent and serious problem to develop diagnostic models which can monitor the operation conditions appropriately and recognize the failure point exactly, indicating when to replace the vacuum pump. In this study, many influencing factors are totally considered and eventually the monitoring model using multivariate statistical methods is suggested. The pivotal algorithms are Multiway Principal Component Analysis(MPCA), Dynamic Time Warping Algorithm(DTW Algorithm), etc.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.95-95
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• 2014

An OLED(Organic Light-Emitting Diode) device based on the emissive electroluminescent layer a film of organic materials. OLED is used for many electronic devices such as TV, mobile phones, handheld games consoles. ULVAC's mass production systems are indispensable to the manufacturing of OLED device. ULVAC is a manufacturer and worldwide supplier of equipment and vacuum systems for the OLED, LCD, Semiconductor, Electronics, Optical device and related high technology industries. The SMD Series are single-substrate sputtering systems for deposition of films such as metal films and TCO (Transparent Conductive Oxide) films. ULVAC has delivered a large number of these systems not only Organic Evaporating systems but also LTPS CVD systems. The most important technology of thin-film encapsulation (TFE) is preventing moisture($H_2O$) and oxygen permeation into flexible OLED devices. As a polymer substrate does not offer the same barrier performance as glass substrate, the TFE should be developed on both the bottom and top side of the device layers for sufficient lifetimes. This report provides a review of promising thin-film barrier technologies as well as the WVTR(Water Vapor Transmission Rate) properties. Multilayer thin-film deposition technology of organic and inorganic layer is very effective method for increasing barrier performance of OLED device. Gases and water in the organic evaporating system is having a strong influence as impurities to OLED device. CRYO pump is one of the very useful vacuum components to reduce above impurities. There for CRYO pump is faster than conventional TMP exhaust velocity of gases and water. So, we suggest new method to make a good vacuum condition which is CRYO Trap addition on OLED evaporator. Alignment accuracy is one of the key technologies to perform high resolution OLED device. In order to reduce vibration characteristic of CRYO pump, ULVAC has developed low vibration CRYO pumps to achieve high resolution alignment performance between Metal mask and substrate. This report also includes ULVAC's approach for these issues.