• 제목/요약/키워드: vacuum process

검색결과 2,258건 처리시간 0.03초

패턴전사 프린팅을 활용한 리튬이온 배터리 양극 기초소재 Li2CO3의 나노스케일 패턴화 방법 (Nanoscale Pattern Formation of Li2CO3 for Lithium-Ion Battery Anode Material by Pattern Transfer Printing)

  • 강영림;박태완;박은수;이정훈;왕제필;박운익
    • 마이크로전자및패키징학회지
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    • 제27권4호
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    • pp.83-89
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    • 2020
  • 지난 수십년간 인류에게 핵심적인 에너지 자원이었던 화석연료가 갈수록 고갈되고 있고, 산업발전에 따른 오염이 심해지고 있는 환경을 보호하기 위한 노력의 일환으로, 친환경 이차전지, 수소발생 에너지 장치, 에너지 저장 시스템 등과 관련한 새로운 에너지 기술들이 개발되고 있다. 그 중에서도 리튬이온 배터리 (Lithium ion battery, LIB)는 높은 에너지 밀도와 긴 수명으로 인해, 대용량 배터리로 응용하기에 적합하고 산업적 응용이 가능한 차세대 에너지 장치로 여겨진다. 하지만, 친환경 전기 자동차, 드론 등 증가하는 배터리 시장을 고려할 때, 수명이 다한 이유로 어느 순간부터 많은 양의 배터리 폐기물이 쏟아져 나올 것으로 예상된다. 이를 대비하기 위해, 폐전지에서 리튬 및 각종 유가금속을 회수하는 공정개발이 요구되는 동시에, 이를 재활용할 수 있는 방안이 사회적으로 요구된다. 본 연구에서는, 폐전지의 재활용 전략소재 중 하나인, 리튬이온 배터리의 대표적 양극 소재 Li2CO3의 나노스케일 패턴 제조 방법을 소개하고자 한다. 우선, Li2CO3 분말을 진공 내 가압하여 성형하고, 고온 소결을 통하여 매우 순수한 Li2CO3 박막 증착용 3인치 스퍼터 타겟을 성공적으로 제작하였다. 해당 타겟을 스퍼터 장비에 장착하여, 나노 패턴전사 프린팅 공정을 이용하여 250 nm 선 폭을 갖는, 매우 잘 정렬된 Li2CO3 라인 패턴을 SiO2/Si 기판 위에 성공적으로 형성할 수 있었다. 뿐만 아니라, 패턴전사 프린팅 공정을 기반으로, 금속, 유리, 유연 고분자 기판, 그리고 굴곡진 고글의 표면에까지 Li2CO3 라인 패턴을 성공적으로 형성하였다. 해당 결과물은 향후, 배터리 소자에 사용되는 다양한 기능성 소재의 박막화에 응용될 것으로 기대되고, 특히 다양한 기판 위에서의 리튬이온 배터리 소자의 성능 향상에 도움이 될 것으로 기대된다.

나노 납/활성탄을 사용한 ISG용 울트라 전지 음극소재의 전기화학적 특성 (Electrochemical Characteristics of Ultra Battery Anode Material using the Nano Pb/AC for ISG)

  • 황진웅;이종대
    • Korean Chemical Engineering Research
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    • 제55권5호
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    • pp.593-599
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    • 2017
  • 본 연구에서는 활성탄과 납 전구체를 사용하여 나노 Pb/AC 복합소재를 제조한 후, 울트라 전지용 음극소재의 전기화학적 특성을 조사하였다. 나노 Pb/AC 복합소재는 활성탄에 나노 Pb 입자를 흡착시킨 후 감압 수세하여 제조하였다. 제조된 복합소재의 물리적 특성은 SEM, BET, EDS를 통해 분석하였으며, $1740m^2/g$, 1.95 nm의 비표면적과 평균 기공크기를 얻었다. 울트라 전지의 음극은 납 극판에 나노 Pb/AC를 딥코팅하여 제조되었다. 울트라 전지는 이산화납을 사용한 양극과 나노 Pb/AC 복합소재 음극을 사용하였으며 전해액은 5M의 황산용액($1.31g/cm^3$)을 사용하였다. 전기화학적 성능은 충 방전, 순환전압전류, 임피던스, 사이클 테스트를 통해 조사되었다. 제조된 나노 Pb/AC를 이용한 울트라 배터리는 기존의 납 축전지와 AC를 코팅한 납 축전지보다 개선된 초기 용량과 사이클 특성을 보였다. 이러한 실험 결과로부터 나노 Pb/AC의 적절한 첨가가 수소발생 반응이 억제됨에 따라 용량 및 장기 사이클 안정성을 향상시킴을 알 수 있었다.

Fabrication of Field Emitter Arrays by Transferring Filtered Carbon Nanotubes onto Conducting Substrates

  • Jang, Eun-Soo;Goak, Jung-Choon;Lee, Han-Sung;Lee, Seung-Ho;Lee, Nae-Sung
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
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    • pp.311-311
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    • 2009
  • Carbon nanotubes (CNTs) belong to an ideal material for field emitters because of their superior electrical, mechanical, and chemical properties together with unique geometric features. Several applications of CNTs to field emitters have been demonstrated in electron emission devices such as field emission display (FED), backlight unit (BLU), X-ray source, etc. In this study, we fabricated a CNT cathode by using filtration processes. First, an aqueous CNT solution was prepared by ultrasonically dispersing purified single-walled CNTs (SWCNTs) in deionized water with sodium dodecyl sulfate (SDS). The aqueous CNT solution in a milliliter or even several tens of micro-litters was filtered by an alumina membrane through the vacuum filtration, and an ultra-thin CNT film was formed onto the alumina membrane. Thereafter, the alumina membrane was solvated by acetone, and the floating CNT film was easily transferred to indium-tin-oxide (ITO) glass substrate in an area defined as 1 cm with a film mask. The CNT film was subjected to an activation process with an adhesive roller, erecting the CNTs up to serve as electron emitters. In order to measure their luminance characteristics, an ITO-coated glass substrate having phosphor was employed as an anode plate. Our field emitter array (FEA) was fairly transparent unlike conventional FEAs, which enabled light to emit not only through the anode frontside but also through the cathode backside, where luminace on the cathode backside was higher than that on the anode frontside. Futhermore, we added a reflecting metal layer to cathode or anode side to enhance the luminance of light passing through the other side. In one case, the metal layer was formed onto the bottom face of the cathode substrate and reflected the light back so that light passed only through the anode substrate. In the other case, the reflecting layer coated on the anode substrate made all light go only through the cathode substrate. Among the two cases, the latter showed higher luminance than the former. This study will discuss the morphologies and field emission characteristics of CNT emitters according to the experimental parameters in fabricating the lamps emitting light on the both sides or only on the either side.

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Si and Mg doped Hydroxyapatite Film Formation by Plasma Electrolytic Oxidation

  • Park, Seon-Yeong;Choe, Han-Cheol
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2016년도 추계학술대회 논문집
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    • pp.195-195
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    • 2016
  • Titanium and its alloys are widely used as implants in orthopedics, dentistry and cardiology due to their outstanding properties, such as high strength, high level of hemocompatibility and enhanced biocompatibility. Hence, recent works showed that the synthesis of new Ti-based alloys for implant application involves more biocompatible metallic alloying element, such as, Nb, Hf, Zr and Mo. In particular, Nb and Hf are one of the most effective Ti ${\beta}-stabilizer$ and reducing the elastic modulus. Plasma electrolyte oxidation (PEO) is known as excellent method in the biocompatibility of biomaterial due to quickly coating time and controlled coating condition. The anodized oxide layer and diameter modulation of Ti alloys can be obtained function of improvement of cell adhesion. Silicon (Si) and magnesium (Mg) has a beneficial effect on bone. Si in particular has been found to be essential for normal bone and cartilage growth and development. In vitro studies have shown that Mg plays very important roles in essential for normal growth and metabolism of skeletal tissue in vertebrates and can be detected as minor constituents in teeth and bone. The aim of this study is to research Si and Mg doped hydroxyapatite film formation by plasma electrolytic oxidation. Ti-29Nb-xHf (x= 0, 3, 7 and 15wt%, mass fraction) alloys were prepared Ti-29Nb-xHf alloys of containing Hf up from 0 wt% to 15 wt% were melted by using a vacuum furnace. Ti-29Nb-xHf alloys were homogenized for 2 hr at $1050^{\circ}C$. Each alloy was anodized in solution containing typically 0.15 M calcium acetate monohydrate + 0.02 M calcium glycerophosphate at room temperature. A direct current power source was used for the process of anodization. Anodized alloys was prepared using 270V~300V anodization voltage at room. A Si and Mg coating was produced by RF-magnetron sputtering system. RF power of 100W was applied to the target for 1h at room temperature. The microstructure, phase and composition of Si and Mg coated oxide surface of Ti-29Nb-xHf alloys were examined by FE-SEM, EDS, and XRD.

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Morphology of RF-sputtered Mn-Coatings for Ti-29Nb-xHf Alloys after Micro-Pore Form by PEO

  • Park, Min-Gyu;Park, Seon-Yeong;Choe, Han-Cheol
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2016년도 추계학술대회 논문집
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    • pp.197-197
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    • 2016
  • Commercially pure titanium (CP Ti) and Ti-6Al-4V alloys have been widely used for biomedical applications. However, the use of the Ti-6Al-4V alloy in biomaterial is then a subject of controversy because aluminum ions and vanadium oxide have potential detrimental influence on the human body due to vanadium and aluminum. Hence, recent works showed that the synthesis of new Ti-based alloys for implant application involves more biocompatible metallic alloying element, such as, Nb, Hf, Zr and Mo. In particular, Nb and Hf are one of the most effective Ti ${\beta}-stabilizer$ and reducing the elastic modulus. Plasma electrolyte oxidation (PEO) is known as excellent method in the biocompatibility of biomaterial due to quickly coating time and controlled coating condition. The anodized oxide layer and diameter modulation of Ti alloys can be obtained function of improvement of cell adhesion. Manganese(Mn) plays very important roles in essential for normal growth and metabolism of skeletal tissue in vertebrates and can be detected as minor constituents in teeth and bone. Radio frequency(RF) magnetron sputtering in the various PVD methods has high deposition rates, high-purity films, extremely high adhesion of films, and excellent uniform layers for depositing a wide range of materials, including metals, alloys and ceramics like a hydroxyapatite. The aim of this study is to research the Mn coatings on the micro-pore formed Ti-29Nb-xHf alloys by RF-magnetron sputtering for dental applications. Ti-29Nb-xHf (x= 0, 3, 7 and 15wt%, mass fraction) alloys were prepared Ti-29Nb-xHf alloys of containing Hf up from 0 wt% to 15 wt% were melted by using a vacuum furnace. Ti-29Nb-xHf alloys were homogenized for 2 hr at $1050^{\circ}C$. Each alloy was anodized in solution containing typically 0.15 M calcium acetate monohydrate + 0.02 M calcium glycerophosphate at room temperature. A direct current power source was used for the process of anodization. Anodized alloys was prepared using 270V~300V anodization voltage at room. Mn coatings was produced by RF-magnetron sputtering system. RF power of 100W was applied to the target for 1h at room temperature. The microstructure, phase and composition of Mn coated oxide surface of Ti-29Nb-xHf alloys were examined by FE-SEM, EDS, and XRD.

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Temperature Analysis for the Point-Cell Source in the Vapor Deposition Process

  • Park, Jong-Wook;Kim, Sung-Cho;Hun Jung
    • Journal of Mechanical Science and Technology
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    • 제18권9호
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    • pp.1680-1688
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    • 2004
  • The information indicating device plays an important part in the information times. Recently, the classical CRT (Cathod Ray Tube) display is getting transferred to the LCD (Liquid Crystal Display) one which is a kind of the FPDs (Flat Panel Displays). The OLED (Organic Light Emitting Diodes) display of the FPDs has many advantages for the low power consumption, the luminescence in itself, the light weight, the thin thickness, the wide view angle, the fast response and so on as compared with the LCD one. The OLED has lately attracted considerable attention as the next generation device for the information indicators. And also it has already been applied for the outside panel of a mobile phone, and its demand will be gradually increased in the various fields. It is manufactured by the vapor deposition method in the vacuum state, and the uniformity of thin film on the substrate depends on the temperature distribution in the point-cell source. This paper describes the basic concepts that are obtained to design the point-cell source using the computational temperature analysis. The grids are generated using the module of AUTOHEXA in the ICEM CFD program and the temperature distributions are numerically obtained using the STAR-CD program. The temperature profiles are calculated for four cases, i.e., the charge rate for the source in the crucible, the ratio of diameter to height of the crucible, the ratio of interval to height of the heating bands, and the geometry modification for the basic crucible. As a result, the blowout phenomenon can be shown when the charge rate for the source increases. The temperature variation in the radial direction is decreased as the ratio of diameter to height is decreased and it is suggested that the thin film thickness can be uniformed. In case of using one heating band, the blowout can be shown as the higher temperature distribution in the center part of the source, and the clogging can appear in the top end of the crucible in the lower temperature. The phenomena of both the blowout and the clogging in the modified crucible with the nozzle-diffuser can be prevented because the temperature in the upper part of the crucible is higher than that of other parts and the temperature variation in the radial direction becomes small.

13X 제올라이트 흡착제 충진에 의한 Na형 Faujasite 제올라이트 분리막의 $CO_2/N_2$ 선택도 및 $CO_2$ 투과도 동시 증가 현상 (A Simultaneous Improvement in $CO_2$ Flux and $CO_2/N_2$ Separation Factor of Sodium-type FAU Zeolite Membranes through 13X Zeolite Beads Embedding)

  • 조철희;여정구;안영수;한문희;문종호;이창하
    • 멤브레인
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    • 제17권3호
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    • pp.269-275
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    • 2007
  • 분리층 두께가 5${\mu}m$이며 Si/Al 몰비가 1.5인 Na형 faujasite 제올라이트 분리막을 이차성장 공정에 의하여 제조하였고, 투과부에 13X 제올라이트 흡착제 충진 전후의 진공모드에서의 $CO_2/N_2$ 분리거동을 $CO_2/N_2$ 몰비가 1인 혼합기체에 대하여 $30^{\circ}C$에서 평가하였다. 충진된 13X 제올라이트 흡착제는 $CO_2$ 투과도와 $CO_2/N_2$ 선택도를 동시에 증진시켰다. 이 현상은 13X 제올라이트 흡착제 충진이 다공성 $\alpha$-알루미나 지지체의 기공채널을 통한 $CO_2$ 탈출을 증진시킴으로써 faujasite 제올라이트/$\alpha$-알루미나 상계면에서의 $CO_2$ 탈착을 증진시켰기 때문으로 설명되었다. 본 논문으로부터 흡착제와 분리막의 혼성화는 일반적으로 보여지는 선택도와 투과도의 역비례 관계를 획기적으로 개선할 방법임이 확인되었다.

탄소섬유/Si/SiC 및 탄소섬유/탄소/SiC 복합재의 기계적 물성 (Mechanical Properties of Carbon Fiber/Si/SiC and Carbon Fiber/C/SiC Composites)

  • 신동우;박삼식;김경도;오세민
    • Composites Research
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    • 제12권3호
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    • pp.8-16
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    • 1999
  • 탄소직포/탄소/SiC 복합재는 탄소직포/탄소 프로폼을 SiC의 유기전구체인 polycarbosilane에 다중함침 열처리하여 제조하였다. 더불어 탄소 섬유의 분율과 배열 형태가 다른 두 가지 종류의 저밀도 탄소/탄소 복합재 즉, 탄소직포($\thickapprox$55 vol%)/탄소 복합재와 chopped 탄소섬유($\thickapprox$40 vol%)/탄소 복합재를 $1700^{\circ}C$ 진공 분위기에서 용융 실리콘과 반응결합하여 고밀도의 탄소섬유/Si/SiC 복합재도 제조하였다. 이 반응 결합 공정 이전 각 밀도가 1.6g/$cm^3$인 탄소직포/탄소 복합재와 1.15g/$cm^3$인 chopped 탄소섬유/탄소 복합재는 반응결합 후 그 밀도가 각각 2.1g/$cm^3$로 증가하였다. 제조한 복합재는 전형적인 섬유강화 복합재의 파괴거동을 보였으며 반응결합 후 밀도와 stiffness 그리고 탄성 한계 강도 등은 모두 현저히 증가하였다. 3점 곡강도와 인장 시험으로 기계적 물성을 비교평가하였다. 탄소직포/탄소 복합재와 chopped 탄소섬유/탄소 복합재의 곡강도에 대한 인장 강도의 비는 약 1/3이었다. 탄소직포/Si/SiC 복합재의 밀도는 2.06g/$cm^3$, 최대 곡강도는 ~120 MPa, 탄성한계 응력은 ~80 MPa를 나타내었다.

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0.4 MW 급 분절형 아크 히터를 이용한 초음속 플라즈마 풍동 특성 실험 (Experimental Analysis of a Supersonic Plasma Wind Tunnel Using a Segmented Arc Heater with the Power Level of 0.4 MW)

  • 김민호;이미연;김정수;최채홍;서준호;문세연;홍봉근
    • 한국항공우주학회지
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    • 제41권9호
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    • pp.700-707
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    • 2013
  • 0.4 MW 급 분절형 아크 히터를 장착한 전북대학교 플라즈마 풍동의 초음속 유동 특성 실험을 수행하고 그 결과를 분석하였다. 실험에 사용된 분절형 아크 히터와 초음속 노즐은 16.3 g/s 의 질량유량에 대해 전극 당 150 A, 전체 300 A의 입력전류 조건으로 운전되었으며, 운전 결과 350 kW의 입력전력과 약 51.4 %의 열효율이 계측되었다. 이 때, 아크 히터 내 고엔탈피 플라즈마의 내부압력은 약 4 bar 로 측정되었으며, 이를 초음속 노즐을 통해 압력 45 mbar로 유지되는 진공쳄버 내로 팽창시킴으로써, 전체 엔탈피 11 MJ/kg을 가진 초음속 플라즈마 유동을 얻을 수 있었다. 전체 엔탈피 측정과 함께, 생성된 초음속 플라즈마 유동에 대해 원뿔각 $30^{\circ}$를 가진 원뿔 탐침을 삽입하여 경사 충격파와 이루는 각을 측정하였으며, 이 측정값들로부터, 발생된 초음속 플라즈마의 온도와 마하 수는 각각 약 2,950 K 및 약 3.7에 이를 것으로 예상되었다.

초고추장첨가 과메기통조림의 제조 및 특성 (Processing and Characteristics of Canned Kwamaegi Cololabis saira using Red Pepper Paste with Vinegar)

  • 권순재;박태호;이재동;윤문주;공청식;제해수;정제헌;김정균
    • 한국수산과학회지
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    • 제47권5호
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    • pp.537-544
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    • 2014
  • Kwamaegi is a traditional Korean seafood made from the flesh of Pacific saury Cololabis saira. It is recognized as a valuable, healthy food containing the ${\omega}$-3 fatty acids EPA (eicosapentaenoic acid) and DHA (docosahexaenoic acid). This study was conducted in order to obtain basic data for application to the canning process of Kwamaegi using red pepper paste with vinegar. Commercial Kwamaegi was cut into $2{\times}3cm$ lengths and 90 g was put into cans (301-3). Then, 60 g of water was added and precooked for 10 minutes at $100^{\circ}C$. The water was drained after precooking. The precooked Kwamaegi was packed into cans, and 60 g of red pepper paste with vinegar was added. The cans were seamed using a vacuum seamer, then sterilized for differing times (8-12 minutes) in a steam system retort at $121^{\circ}C$. Parameters such as: pH, TVB-N, amino-N, total amino acid content, free amino acid content, color value (L, a, b), texture profile, TBA value, mineral content, sensory evaluation and viable bacterial count of the product produced under varying sterilization times (8-12 minutes) were measured. There were no remarkable differences between sterilization conditions and textural characteristics. The results showed that product sterilized for 8 minutes proved to be the most desirable.