• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.527-527
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• 2012

In the Pohang Light Source (PLS), a major upgrade (PLS-II) of existing machine had been performed in last 3 years. Big improvements in beam parameters are expected from this major upgrade and various diagnostic instruments were installed to measure them. These include beam position monitor, beam current monitor, tune monitor, scraper, beam loss monitor, photon beam monitor, beam size monitor, streak camera, and so on. In this work, we would like to briefly introduce diagnostic instruments of the PLS-II and present measurement results in the commissioning process of the PLS-II.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.24 no.10
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• pp.1359-1367
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• 2000

In-situ particle monitors(ISPMs) are widely used for monitoring contaminant particles in vacuum-based semiconductor manufacturing equipment. In the present research, the performance of a Particle Measuring Systems(PMS) Vaculaz-2 ISPM at low pressures has been studied. We generated the uniform sized methylene blue particle beams using three identical aerodynamic lenses in the center of the vacuum line, and measured the detection efficiency of the ISPM. The effects of particle size, particle concentration, mass flow rate, system pressure, and arrangement of aerodynamic lenses on the detection efficiency of the ISPM were examined. Results show that the detection efficiency of the ISPM greatly depends on the mass flow rate, and the particle Stokes number. We also found that the optimum Stokes number ranges from 0.4 to 1.9 for the experimental conditions.

• Journal of the Korean Vacuum Society
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• v.18 no.6
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• pp.418-425
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• 2009

To get the stable and optimized proton beam in the KIRAMS-13 cyclotron which installed in the regional cyclotron center, it is necessary to measure the transverse profile of proton beam. Beam Induced Fluorescence monitor is one of the non-destructive methods to measure the beam profiles, and it has many advantages such as a simple structure, real-time measurement, and minimum energy loss. The objective of this research is the design and development of Beam Induced Fluorescence monitor to measure the proton beam profiles in the KIRAMS-13 cyclotron.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.50-50
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• 2000

당사는 1970년 제우스 콤 상사로부터 출발하여 1988년 12우러 주식회사 제우스로 법인 전환한 후 현재 한국반도체 산업협회 및 회원으로 등록 활동하고 있다. 이번 발표에서는 회사에 대한 소개와 함께 취급품목을 설명하고자 한다. 취급품목은 Ion beam sources(CSC), E-beam evaporator & E-beam source(Temescal), Residual Gas Analyzer(SPECTRA), Cryopump & Waterpump(CTI-Cryogenics), Thickness Monitor & Controller, Electrical Feedthrough, RTP system, Thin Film Analyzer, PECVD, RIE 등이다.

• Journal of the Korean Vacuum Society
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• v.20 no.1
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• pp.1-6
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• 2011

A sudden step change is observed in the vertical position readings from beam position monitors (BPMs) mounted at the several sector vacuum chambers of Pohang Light Source. To study the source of this sudden step change, we measured the RF transmission scattering matrix (S21) through the pickup electrodes of BPMs mounted at the both ends of the sector vacuum chamber. The measured $S_{21}$ graph of the sector vacuum chambers suffering sudden step change has a peak in the BPM operation frequency bandwidth. Otherwise that of the other sector vacuum chambers doesn't have a peak. It is shown by the numerical simulation that the peak found in the BPM operation frequency bandwidth corresponds to the longitudinal harmonic of transverse electric resonance mode.

• Journal of the Korean Vacuum Society
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• v.12 no.4
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• pp.207-213
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• 2003

We have developed the hardware and software for automation of the national medium vacuum standard. The automation is necessary to control and monitor the complex system consists of several vacuum chambers, pumping systems, vacuum gauges, thermometers, and valves. By using the automation program, we have measured volume ratios of the system and performed calibration of a capacitance diaphragm gauge in order to evaluate the system.

• Proceedings of the Korean Vacuum Society Conference
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• 1994.02a
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• pp.122-123
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• 1994

RHEED ppattern을 C.C.D Camera를 이용하여 관측한 후 C.C.D outpput signal을 Frame Garbber를 이용하여 Digitize하였다. Digitize된 RHEED ppattern의 정보로부터 원하는 Sppot의 intensity를 Image pprocessing Software를 개발하여 측정할 수 있다. [그림 1] 특히 thin film growth를 monitor하기 위하여 RHEED diffraction Sppot의 Intensity oscillation을 측정할 경우 실시간 측정이 필요하며 이를 위해 매우 빠른 속도의 data aquisition과 dispplay를 필요로 한다. 그림2는 이런 조건을 만족하는 software를 개발하여 실시간으로 측정한 AlGaAs/GaAs. multilayer RHEED Oscillation을 보여주고 있다. 이 실험은 매우 간단하고, 특별한 주의를 요하지 않으며, 측정되는 RHEED Sppot을 눈으로 동시에 관찰할 수 있어 실험 상황을 좀더 쉽게 monitor할 수 있게 해준다. 또한 data-aquitition. data-analysis, data-dispplay를 한 대의 compputer를 이용해 손쉽고 값싸게 할 수 있으므로, opptical fiber와 pphoto-diode, X-Y recorder등을 동원한 기존의 번잡한 실험을 대체할 수 있을 것이다.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.229-229
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• 2012

It is significant issue to control the unwanted transverse electric (TE) modes in the vacuum chamber for preventing the position reading noise from the beam position monitor (BPM) of storage ring. We introduce shunt structure to control the frequency distribution of TE resonance modes excited in the vacuum chambers of the Pohang Light Source II (PLS-II). The design of shunt structure is performed using the full three dimensional finite-difference time-domain (FDTD) simulation. It is verified that the sympton of the BPM noise is not oberved up to the beam current of 190 mA in the commmissioning of PLS-II.

• Journal of the Semiconductor & Display Technology
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• v.18 no.4
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• pp.129-133
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• 2019

In this paper, we developed a system to monitor the storage capacity of suction-type device such as vacuum cleaner or crop harvesters. The monitoring system consists of load cells and a differential pressure sensor which simultaneously monitor the weight and volume of the stock. Since weighing objects stored in storage containers alone cannot fully monitor the level of filling, more accurate monitoring can be achieved by monitoring volume and fusion with weight information. The volume was monitored using a phenomenon in which the flow rate of the inhaled air varies depending on the volume of the object filled in the storage container. In this paper, we developed a system to monitor the storage in three stages: low, medium and high.

• The KSFM Journal of Fluid Machinery
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• v.13 no.2
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• pp.54-58
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• 2010

The most recent, Vacuum Pipeline for Waste Collecting System, to collect MSW(Municipal Solid Waste) efficiently, is used environmental preservative, to emit less air pollution, in New City. However, it is difficult to monitor broken pipe and filled mass of Waste, because Vacuum Pipeline is laid underground. Therefore, FBG, optical fiber sensor, is used to inspect the temperature change and longitudinal strain to take proper action for unusual situation. I have need to accumlate sensor data of district control. I hope to be used Vacuum Pipeline more than 30 years in New City.