• Title/Summary/Keyword: vacuum Co2

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Epitaxial Growth of Nickel Silicide $(NiSi_2)$ in Vacuum Deposited Nickel and Gold Films on (III) Silicon Single Crystals (규소(III) 단 결정에 진공 증착한 닉켈과 금 박막에서 $NiSi_2$의 적층성장)

  • 윤기현;이희수
    • Journal of the Korean Ceramic Society
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    • v.13 no.3
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    • pp.55-62
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    • 1976
  • 순수한 닉켈과 금 박막을 (III)규소 단 결정위에 진공 증착시켰다. Ni/Au/Si나 Au/Ni/Si시료를 진공중에서 약 55$0^{\circ}C$로 가열하였을 때 육방정 혹은 변형된 육방정의 미소 결정들이 규소 기질위에 형성되었다. 이들 미소 결정들의 형성과정 및 조성은 X-선 회절법, scanning electron microscopy 및 scanning Auger microprobe 법을 사용하여 결정하였다. 이들 미소 결정은 NiSi2임이 확인되었다. Ni/Au/Si 시료에서는 Au-Si 공융점(37$0^{\circ}C$) 이상으로 온도가 증가됨에 따라 닉켈과 규소가 Au-Si 공융체 속으로 이동한 후 반응하여 NiSi2를 형성하였다. Au/Ni/Si 시료에 있어서의 Au-Si 공융체 형성은 닉켈 박막에 있는 바늘구멍형의 표면 결함과 관련 지을 수 있겠다. 금이 닉켈 박막의 grain boundary를 통하여 Ni/Si 계면으로 확산되어 그 계면을 습윤시킨 다음 Au-Si 공융체를 형성하였다. 이런 Au-Si 공용체는 닉켈과 규소 원자에 대한 높은 확산 매질로서 작용하여 NiSi2 형성을 촉진시켰다. 표면에 평행한 (III)규소면 위의 NiSi2 미소 결정은 유사한 육방정으로 나타났으며, 경사진 미소결정은 부등변 사변형과 유사하였다. Auger 스펙트럼 및 Ni, Au 및 Si에 대한 내층조성(indepth Composition Profiles)은 NiSi2 미소 결정이 Au-Si 공융체의 matrix에 미소 부분으로 나타났음을 보여주었다.

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Effect of Forming Process and Particle Size on Properties of Porous Silicon Carbide Ceramic Candle Filters (성형공정(成形工程)과 원료입도(原料粒度)가 다공성(多孔性) 탄화규소(炭火硅素) 세라믹 캔들 필터 특성(特性)에 미치는 영향(影響))

  • Han, In-Sub;Seo, Doo-Won;Hong, Ki-Seog;Woo, Sang-Kuk
    • Resources Recycling
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    • v.19 no.5
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    • pp.31-43
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    • 2010
  • To fabricate porous SiC candle filter for filtration facility of the IGCC system, the candle type filter preforms were fabricated by ramming and vacuum extrusion process. A commercially available ${\alpha}$-SiC powders with various particle size were used as starting raw materials, and $44\;{\mu}m$ mullite, $CaCO_3$ powder were used as non-clay based inorganic sintering additive. The candle typed preforms by ramming process and vacuum extrusion were sintered at $1400^{\circ}C$ for 2h in air atmosphere. The effect of forming method and particle size of filter matrix on porosity, density, strength (flexural and compressive strength) and microstructure of the sintered porous SiC candle tilters were investigated. The sintered porous SiC filters which were fabricated by ramming process have more higher density and strength than extruded filter in same particle size of the matrix, and its maximum density and 3-point bending strength were $2.00\;g/cm^3$ and 45 MPa, respectively. Also, corrosion test of the sintered candle filter specimens by different forming method was performed at $600^{\circ}C$ for 2400h using IGCC syngas atmosphere for estimation of long-term reliability of the candle filter matrix.

Effects of nitrogen doping on mechanical and tribological properties of thick tetrahedral amorphous carbon (ta-C) coatings (질소 첨가된 ta-C 후막코팅의 기계 및 트라이볼로지적 특성연구)

  • Gang, Yong-Jin;Jang, Yeong-Jun;Kim, Jong-Guk
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2016.11a
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    • pp.156-156
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    • 2016
  • The effect of nitrogen doping on the mechanical and tribological performance of single-layer tetrahedral amorphous carbon (ta-C:N) coatings of up to $1{\mu}m$ in thickness was investigated using a custom-made filtered cathode vacuum arc (FCVA). The results obtained revealed that the hardness of the coatings decreased from $65{\pm}4.8GPa$ to $25{\pm}2.4GPa$ with increasing nitrogen gas ratio, which indicates that nitrogen doping occurs through substitution in the $sp^2$ phase. Subsequent AES analysis showed that the N/C ratio in the ta-C:N thick-film coatings ranged from 0.03 to 0.29 and increased with the nitrogen flow rate. Variation in the G-peak positions and I(D)/I(G) ratio exhibit a similar trend. It is concluded from these results that micron-thick ta-C:N films have the potential to be used in a wide range of functional coating applications in electronics. To achieve highly conductive and wear-resistant coatings in system components, the friction and wear performances of the coating were investigated. The tribological behavior of the coating was investigated by sliding an SUJ2 ball over the coating in a ball-on-disk tribo-meter. The experimental results revealed that doping using a high nitrogen gas flow rate improved the wear resistance of the coating, while a low flow rate of 0-10 sccm increased the coefficient of friction (CoF) and wear rate through the generation of hematite (${\alpha}-Fe_2O_3$) phases by tribo-chemical reaction. However, the CoF and wear rate dramatically decreased when the nitrogen flow rate was increased to 30-40 sccm, due to the nitrogen inducing phase transformation that produced a graphite-like structure in the coating. The widths of the wear track and wear scar were also observed to decrease with increasing nitrogen flow rate. Moreover, the G-peaks of the wear scar around the SUJ2 ball on the worn surface increased with increasing nitrogen doping.

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Role of Alloyed Components on Densification of Mixed and Prealloyed High Speed Steel Powder Compacts (흔합 및 합금고속도강 소결체의 치밀화에 미치는 구성성분의 역할)

  • 임태환
    • Journal of Powder Materials
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    • v.1 no.2
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    • pp.153-158
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    • 1994
  • The effect of the role of alloyed components on the densification of two kind of high speed steel (mixed and prealloyed powder), which were sintered at 1403~ 1573 K for 7.2 ks in vacuum, was investigated. The results obtained were as follows. (1) Without the presence of Vanadium (V), the relative density of sintered compacts (Ds) could not reached the density of 100% regardless of the. elements in the compacts. (2) The addition of V up to 2 mass% did not result In the complete densification when the carbon content was fixed at 2% in the compact. (3) With the fixed amount of V of 7%, Ds decreased with the increase of the carbon content. (4) The addition of mixed fine powder to the prealloyed powder in the range of 20 to 40% provided the complete densification and carbide panicles of 1~2 $\mu\textrm{m}$ through the solid phase sintering. (5) The V element played important role in controlling the complete or incomplete densification of the sintered compacts in the alloyed component because of its formation of stable oxide and carbide as well as the low equilibrium pressure of CO gas.

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Fabrication of [320×256]-FPA Infrared Thermographic Module Based on [InAs/GaSb] Strained-Layer Superlattice ([InAs/GaSb] 응력 초격자에 기초한 [320×256]-FPA 적외선 열영상 모듈 제작)

  • Lee, S.J.;Noh, S.K.;Bae, S.H.;Jung, H.
    • Journal of the Korean Vacuum Society
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    • v.20 no.1
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    • pp.22-29
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    • 2011
  • An infrared thermographic imaging module of [$320{\times}256$] focal-plane array (FPA) based on [InAs/GaSb] strained-layer superlattice (SLS) was fabricated, and its images were demonstrated. The p-i-n device consisted of an active layer (i) of 300-period [13/7]-ML [InAs/GaSb]-SLS and a pair of p/n-electrodes of (60/115)-period [InAs:(Be/Si)/GaSb]-SLS. FTIR photoresponse spectra taken from a test device revealed that the peak wavelength (${\lambda}_p$) and the cutoff wavelength (${\lambda}_{co}$) were approximately $3.1/2.7{\mu}m$ and $3.8{\mu}m$, respectively, and it was confirmed that the device was operated up to a temperature of 180 K. The $30/24-{\mu}m$ design rule was applied to single pixel pitch/mesa, and a standard photolithography was introduced for [$320{\times}256$]-FPA fabrication. An FPA-ROIC thermographic module was accomplished by using a $18/10-{\mu}m$ In-bump/UBM process and a flip-chip bonding technique, and the thermographic image was demonstrated by utilizing a mid-infrared camera and an image processor.

Improvement of Electron Emission Characteristics and Emission Stability from Metal-coated Carbon Nanotubes (금속 코팅된 탄소나노튜브의 전계 방출 특성 및 신뢰성 향상)

  • Uh, H.S.;Park, S.;Kim, B.
    • Journal of the Korean Vacuum Society
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    • v.20 no.6
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    • pp.436-441
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    • 2011
  • Metal coating with several nanometer thickness was applied on the carbon nanotubes (CNTs) in order to improve electron emission characteristics and emission reliability for the potential applications in the area of various electron sources and displays. CNTs were grown on the 2-nm thick Invar (52% Fe, 42% Ni, 6% Co alloy)-catalized Si substrate by using plasma-enhanced chemical vapor deposition at $450^{\circ}C$. In order to reduce the spatial density of densely packed CNTs, as-grown CNTs were partly etched back by $N_2$ plasma and subsequently coated with 5~150 nm thick Ti by a sputtering method. 5 nm thick Ti-coated CNTs produced four times higher emission current density at the electric field of 6 V/${\mu}m$ and much lower emission current fluctuation, compared with the as-grown CNTs. These improved emission properties are mainly due to not only the work function of Ti (4.3 eV) lower than that of pristine CNTs (5 eV), but also lower contact resistance and better adhesion between CNT emitters and substrate accomplished by Ti coating.

Development of a Noble Gas Isotope Dilution Mass Spectrometric System Combined with a Cryogenic Cold Trap (초저온 냉각 트랩을 결합한 비활성기체 동위원소 희석 질량분석 시스템의 제작)

  • HONG, BONGJAE;SHIN, DONGYOUB;PARK, KEYHONG;HAHM, DOSHIK
    • The Sea:JOURNAL OF THE KOREAN SOCIETY OF OCEANOGRAPHY
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    • v.27 no.3
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    • pp.144-157
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    • 2022
  • Noble gases, which are chemically inert and behave conservatively in marine environments, have been used as tracers of physical processes such as air-sea gas exchange, mixing of water masses, and distribution of glacial meltwater in the ocean. For precise measurements of Ne, Ar, and Kr, we developed a mass spectrometric system consisting of a quadrupole mass spectrometer (QMS), a high vacuum preparation line, an activated charcoal cryogenic trap (ACC), and a set of isotope standard gases. The high vacuum line consists of three sections: (1) a sample extraction section that extracts the dissolved gases in the sample and mixes them with the standard gases, (2) a gas preparation section that removes reactive gases using getters and separates the noble gases according to their evaporation points with the ACC, and (3) a gas analysis section that measures concentrations of each noble gas. The ACC attached to the gas preparation section markedly lowered the partial pressures of Ar and CO2 in the QMS, which resulted in a reduced uncertainty of Ne isotope analysis. The isotope standard gases were prepared by mixing 22Ne, 36Ar, and 86Kr. The amounts of each element in the mixed standard gases were determined by the reverse isotope dilution method with repeated measurements of the atmosphere. The analytical system achieved precisions for Ne, Ar, and Kr concentrations of 0.7%, 0.7%, and 0.4%, respectively. The accuracies confirmed by the analyses of air-equilibrated water were 0.5%, 1.0%, and 1.7% for Ne, Ar, and Kr, respectively.

Repair of Plasma Damaged Low-k Film in Supercritical Carbon Dioxide (초임계이산화탄소를 이용한 플라즈마 손상된 다공성 저유전 막질의 복원)

  • Jung, Jae-Mok;Lim, Kwon-Taek
    • Clean Technology
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    • v.16 no.3
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    • pp.191-197
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    • 2010
  • Repair reaction of plasma damaged porous methyl doped SiOCH films was carried out with silylation agents dissolved in supercritical carbon dioxide ($scCO_2$) at various reaction time, pressure, and temperature. While a decrease in the characteristic bands at $3150{\sim}3560cm^{-1}$ was detectable, the difference of methyl peaks was not identified apparently in the FT-IR spectra. The surface hydrophobicity was rapidly recovered by the silylation. In order to induce effective repair in bulk phase, the wafer was heat treated before reaction under vacuum or ambient condition. The contact angle was slightly increased after the treatment and completely recovered after the subsequent silylation. Methyl groups were decreased after the plasma damage, but their recovery was not identified apparently from the FT-IR, spectroscopic ellipsometry, and secondary ion mass spectroscopy analyses. Furthermore, Ti evaporator was performed in a vacuum chamber to evaluate the pore sealing effect. The GDS analysis revealed that the open pores in the plasma damaged films were efficiently sealed with the silylation in $scCO_2$.

Principles and Applications of Multi-Level H2O/CO2 Profile Measurement System (다중 수증기/이산화탄소 프로파일 관측 시스템의 원리와 활용)

  • Yoo, Jae-Ill;Lee, Dong-Ho;Hong, Jin-Kyu;Kim, Joon
    • Korean Journal of Agricultural and Forest Meteorology
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    • v.11 no.1
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    • pp.27-38
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    • 2009
  • The multi-level profile system is designed to measure the vertical profile of $H_2O$ and $CO_2$ concentrations in the surface layer to estimate the storage effects within the plant canopy. It is suitable for long-term experiments and can be used also in advection studies for estimating the spatial variability and vertical gradients in concentration. It enables the user to calculate vertical fluxes of water vapor, $CO_2$ and other trace gases using the surface layer similarity theory and to infer their sources or sinks. The profile system described in this report includes the following components: sampling system, calibration and flow control system, closed path infrared gas analyzer(IRGA), vacuum pump and a datalogger. The sampling system draws air from 8 inlets into the IRGA in a sequence, so that for 80 seconds air from all levels is measured. The calibration system, controlled by the datalogger, compensates for any deviations in the calibration of the IRGA by using gas sources with known concentrations. The datalogger switches the corresponding valves, measures the linearized voltages from the IRGA, calculates the concentrations for each monitoring level, performs statistical analysis and stores the final data. All critical components are mounted in an environmental enclosure and can operate with little maintenance over long periods of time. This report, as a practical manual, is designed to provide helpful information for those who are interested in using profile system to measure evapotranspiration and net ecosystem exchanges in complex terrain.

Enamel strengthening effect of the dental fluoride compound (수종의 치과용 불소화합물의 물리적 조건에 따른 치질강화에 미치는 영향)

  • Kim, Joo-Won;Lee, Jung-Ae;Lee, Ka-Yean
    • Journal of Korean society of Dental Hygiene
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    • v.10 no.4
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    • pp.757-764
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    • 2010
  • Objectives : The fluoride coating for caries prevention and strengthen enamel use NaF(sodium fluoride, Junsei Chemical Co., Ltd, Japan) 2% gel, SnF2(stannous fluoride, SIGMA-ALDRICH Gmbh, USA)8% gel and APF(acidulated phosphate fluoride, Sultan health care, USA) 1.23% gel. Methods : After put the enamel piece in these fluoride compound gel, we observed density level. And after measuring the vickers hardness, Got the following conclusions. Results : 1. After settling in the APF 1.23% during 6 days, we observed high density level of enamel surface using 250 magnification scanning microscope. The vacuum of surface packed (in) like sardines. 2. After settling in the APF 1.23% during 6 days, we observed reducing the space between the cluster of enamel surface using 50,000 magnification scanning microscope. 3. The vickers hardness change was very much on the all kinds of fluoride compound gel[2% NaF(sodium fluoride)gel, 8% SnF2(stannous fluoride) gel, 1.23% APF(acidulated phosphate fluoride)gel]. It's all because of reducing the space between the cluster of enamel surface(p<0.001). Conclusions : The vickers hardness change was very much on the all kinds of fluoride compound. It's all because of reducing the space between the cluster of enamel surface.