• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.77-80
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• 2005

Local probe techniques such as scanning probe microscopy (SPM) or atomic force microscopy (AFM) extended our perception into ultra small world. Specially, the sense of touching was extended by AFM into the micro- and nanoworld and has provided complementary new insights of the microscopic world. In addition, touching objects is an essential step before trying to manipulate things. SPM as a touch sensor not only measure the mechanical properties but also detect different properties such as magnetic, electrical, ionic, thermal, chemical and biophysical properties in nanoscale and even less. Obtaining biophysical measurements, monitoring dynamics and processes together with high-resolution imaging of the biomolecules and cells with rather simpler sample preparation than any other techniques give great attractions to the scientists experimenting with biological samples. Among the many AFM capabilities we will specifically introduce the force plot which is used to measure tip-sample interactions and its application this time.

• Analytical Science and Technology
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• v.36 no.2
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• pp.89-98
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• 2023

Analytical methods for detecting atranol, chloroatranol, evernic acid, (+)-usnic acid, and atranorin in sanitary napkins and mouthwashes were developed using ultrahigh performance liquid chromatography-tandem mass spectrometry (UHPLC-MS/MS). UHPLC-MS/MS conditions were optimized for rapid, sensitive, and simultaneous analysis of the five allergenic compounds. The methods were validated by assessing their specificity, matrix effects, limit of detection (LOD), limit of quantification (LOQ), linearity, accuracy, and precision. Good linearity was achieved with a determination coefficient of ≥0.99. The LOD and LOQ were 2.1-9.8 and 6.4-29.6 ng/g for sanitary napkins and 0.29-0.48 and 0.87-1.45 ng/mL for mouthwashes, respectively. The accuracy and precision were within an acceptable range according to the criteria reported in the European SANTE/11813/2017 guidelines (70-120 % recovery, <20 % relative standard deviation). Therefore, these methods can be used to analyze atranol, chloroatranol, evernic acid, (+)-usnic acid, and atranorin in sanitary napkins and mouthwashes.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.5
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• pp.85-91
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• 1997

Air grinding time in grinding process has a great effect on its efficiency due to low feedrate. This paper presents a reduction methos of air grinding time in cylindrical plunge grinding operation. Tje reduction of air grinding time is accomplished by finding the distance between contact point and rising point of ultra- sonic signal of the grinding wheel to workpiece. It uses a variation of sound signal generated by the flow of coolant when the grinding wheel approaches to workpiece. The ultrasonic sensor with 23 kHz center fre- quency and 8 kHz bandwidth is used to find the nearest approaching point(NAP). Monitoring and control system of the grinding conditions is implemented with CNC controller to control feedrate override and ultrasonic sensor to find NAP. The experimental result shows that the ultrasonic signal is a good measure- ment to find NAP. But it needs the considerations for the effect of the relationship between flowrate of coolant and diameter of workpiece.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.12
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• pp.1279-1284
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• 2012

Micro structures which are widely used at various fields are commonly fabricated by lithograph, etching and laser methods. Recently, with the emergence of micro tools and ultra-precision machine tools, fabrication of the micro structures obtained using end-milling are studied. However, there are some problems due to the diameter of the micro end-mill getting smaller below $100{\mu}m$. The micro run-out resulted from miniaturization of end-mills have influence seriously on accuracy of micro structures. The error of run-out with a tooling jig showed a decrease of about $9.3{\mu}m$. Furthermore, micro structures with width of $30{\mu}m$ could be applied through experiments of slot machining obtained using 30 and $50{\mu}m$ end-mill. Also, narrow angle structures with $30^{\circ}$ angle could be applied through analysis of machining acute angle structures. Based on basic experiments, micro fluidics channels and spiral patterns for air bearing were machined.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.22 no.2
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• pp.372-379
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• 1998

A new 6 degrees-of-freedom micro stage, based on parallel mechanisms and actuated by using piezoelectric elements, has been developed for the application of micro positioning such as semiconductor manufacturing devices, high precision optical measurement systems, and high accurate machining. The micro stage structure consists of a base platform and an upper platform(stage). The base platform can effectively generates planar motion with yaw motion, while the stage can do vertical motion with roll and pitch motions with respect to the base platform. This separated structure has an advantage of less interference among actuators. The forward and inverse kinematics of the micro stage are discussed. Also, through linearization of kinematic equations about an operating point on the assumption that the configuration of the micro stage remains essentially constant throughout a workspace is performed. To maximize the workspace of the stage relative to fixed frame, an optimal design procedure of geometric parameter is shown. Hardware description and a prototype are presented. The prototype is about 150mm in height and its base platform is approximately 94mm in diameter. The workspace of the prototype is obtained by computer simulation. Kinematic calibration procedure of the micro stage and its results are presented.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1223-1227
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• 2005

Fine microgroove is the key component to fabricate micro-grating, micro-grating lens and so on. Conventional groove fabrication methods such as etching and lithography have some problems in efficiency and surface integrity. This study deals with the creation of ultra-precision micro grooves using non-rotational diamond tool and CNC machining center. The shaping type machining method proposed in the study allows to produce V-shaped grooves of $40\mu{m}$ in depth with enough dimensional accuracy and surface. For the analysis of machining characteristics in micro V-grooving, three components of cutting forces and AE signal are measured and processed. Experimental results showed that large amplitude of cutting forces and AE appeared at the beginning of every cutting path, and cutting forces had a linear relation with the cross-sectional area of uncut chip thickness. From the results of this study, proposed micro V-grooving technique could be successfully applied to forming the precise optical parts like prism patterns on light guide panel of TFT-LCD.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.769-772
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• 2005

Five DOF motion errors of a hydrostatic bearing table driven by the coreless type linear motor were compensated utilizing the active controlled capillaries in this study. Horizontal linear motion and yaw error were simultaneously compensated using two active controlled capillaries and vertical linear motion, pitch and yaw error were also simultaneously compensated using three active controlled capillaries. By the compensation, horizontal linear motion accuracy and yaw were improved from 0.16 ${\mu}m$ and 1.96 arcsec to 0.02 ${\mu}m$ and 0.03 arcsec. Vertical linear motion accuracy, pitch and roll were also largely improved from 0.18 ${\mu}m$, 2.26 arcsec and 0.14 arcsec upto 0.03 ${\mu}m$, 0.07 arcsec and 0.02 arcsec. The compensated motion errors were within the range of measuring repeatability which was ${\pm}0.02\;{\mu}m$ in the linear motion and ${\pm}0.05$ arcsec in the angular motion. From these results, it is found that the motion error compensation method utilizing the active controlled capillaries are very effective to improve the five motion accuracies of the hydrostatic bearing tables.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.17-17
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• 2010

This paper address technical issues in calibrating discharge coefficients of sonic nozzles used to measure the volume flow rate of low vacuum dry pumps. The first challenging issue comes from the technical limit that their calibration results available from the flow measurement standard laboratories do not fully cover the low vacuum measurement range although the use of sonic nozzles for precision measurement of gas flow has been well established in NMIs. The second is to make an ultra low flow sonic nozzlesufficient to measure the throughput range of 0.01 mbar-l/s. Those small-sized sonic nozzles do not only achieve the noble stability and repeatability of gas flow but also minimize effects of the fluctuation of down stream pressures for the measurement of the volume flow rate of vacuum pumps. These distinctive properties of sonic nozzles are exploited to measure the pumping speed of low vacuum dry pumps widely used in the vacuum-related academic and industrial sectors. Sonic nozzles have been standard devices for measurement of steady state gas flow, as recommended in ISO 9300. This paper introduces two small-sized sonic nozzles of diameter 0.03 mm and 0.2 mm precisely machined according to ISO 9300. The constant volume flow meter (CVFM) readily set up in the Vacuum center of KRISS was used to calibrate the discharge coefficients of the machined nozzles. The calibration results were shown to determine them within the 3% measurement uncertainty. Calibrated sonic nozzles were found to be applicable for precision measurement of steady state gas flow in the vacuum process. Both calibrated sonic nozzles are demonstrated to provide the precision measurement of the volume flow rate of the dry vacuum pump within one percent difference in reference to CVFM. Calibrated sonic nozzles are applied to a new 'in-situ and in-field' equipment designed to measure the volume flow rate of low vacuum dry pumps in the semiconductor and flat display processes.

• Journal of the Korean Society for Precision Engineering
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• v.33 no.11
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• pp.885-891
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• 2016

3D images are generally manufactured by complex production processes. We suggested a simple method to make 3D images based on a mechanical machining technology in this study. We designed a tetrahedron consisted of many arcs having the depth of $100{\mu}m$ and the pitch of $500{\mu}m$, and machined them on an aluminum plate using end-milling under several conditions of feed-rate and depth of cut. The area of undeformed chip including depth of cut and feed-rate can predict quality of the machined arcs more precisely than the undeformed chip thickness including only feed rate. Moreover, a diamond tool can improve the quality than a CBN tool when many arcs are machined. Based on the analysis, the designed tetrahedron having many arcs was machined with no burr, and it showed different images when observed from the left and right directions. Therefore, it is verified that a 3D image can be designed and manufactured on a metal plate by end-milling under optimized machining conditions.

• Journal of the Korean Society of Industry Convergence
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• v.23 no.6_2
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• pp.1015-1024
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• 2020

By nature, smart construction technology is a convergence technology, therefore aptly constructing and running an information system is needed in order to effectively develop and maintain it. Thus, in this study, an information system prototype was developed for the creation and linking of high precision digital maps at road construction sites for the effective performance of the development of the Information Collecting and Analyzing Techniques in the Construction Site (ICAT). For this, (1) defined input/output (I/O) data of each technical detail of ICAT, (2) analyzed the data flow, (3 ) proposed an information system prototype for high precision digital maps development and connection. Based on the information system prototype constructed in this study, it was inferred that each technique and its information for the Smart Construction Technique Development Business was in a consistent flow. Developed information system prototype would enable effective cooperation between subjects directly involved in the technique development, by defining I/O data in advance. Moreover, it would be of value to practitioners for refining the output data from each technique, thereby linking databases and forming Entity Relationship Diagram.