• Title/Summary/Keyword: type of defects

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Improvement of Pad Lifetime using POU (Point of Use) Slurry Filter and High Spray Method of De-Ionized Water (POU 슬러리 필터와 탈이온수의 고분사법에 의한 패드수명의 개선)

  • 박성우;김상용;서용진
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.9
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    • pp.707-713
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    • 2001
  • As the integrated circuit device shrinks to smaller dimensions, chemical mechanical polishing (CMP) process was requirdfo the global planarization of inter-metal dielectric (IMD) layer with free-defect. However, as the IMD layer gest thinner, micro-scratches are becoming as major defects. However, as the IMD layer gets thinner, micro-scratches are becoming as major defects. Micro-scratches are generated by agglomerated slurry, solidified and attached slurry in pipe line of slurry supply system. To prevent agglomerated slurry particle from inflow, we installed 0.5${\mu}{\textrm}{m}$ point of use (POU) filter, which is depth-type filter and has 80% filtering efficiency for the 1.0${\mu}{\textrm}{m}$ size particle. In this paper, we studied the relationship between defect generation and polished wafer counts to understand the exact efficiency fo the slurry filteration, and to find out the appropriate pad usage. Our experimental results showed that it sis impossible to prevent defect-causing particles perfectly through the depth-type filter. Thus, we suggest that it is necessary to optimize the slurry flow rate, and to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of depth type filter.

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A Case of Vitamin D-Dependent Rickets, Type 1 (제 1형 비타민 D 의존성 구루병 1례)

  • Hur, Ji Hye;Lee, Chong Guk;Sur, Chung Wook
    • Clinical and Experimental Pediatrics
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    • v.48 no.6
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    • pp.665-668
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    • 2005
  • "Rickets" is the term applied to impaired mineralization at epiphyseal growth plate, resulting in deformity and impaired linear growth of long bones. Rickets may arise as a result of vitamin D deficiency or abnormality in metabolism. Vitamin D-dependent rickets(VDDR) is rare autosomal recessive disorder in which affected individuals have clinical features of vitamin D deficiency. In 1961, Prader first described this disorder including severe clinical features of rickets, such as hypophosphatemia, hypocalcemia, muscle weakness and seizure. Two distinctive hereditary defects, type I VDDR and type II VDDR have been recognized in vitamin D metabolism. Type I VDDR may be due to congenital defects of renal 1 ${\alpha}$-hydroxylase, the enzyme responsible for conversion of $25(OH)D_3$. These patients have low to detectable $1,25(OH)_2D_3$ in presence of normal to raised $25(OH)D_3$. In type II VDDR, renal production of $1,25(OH)_2D_3$ is intact but $1,25(OH)_2D_3$ is not used effectively and target organ resistant to $1,25(OH)_2D_3$ is respectively derived from the abnormality in the vitamin D receptor. We report a case of a 25 month-old girl with typical clinical features of VDDR type I rickets, hypocalcemia, increased alkaline phosphatase and secondary hyperparathyroidism.

Internal Fault Detection and Fault Type Discrimination for AC Generator Using Detail Coefficient Ratio of Daubechies Wavelet Transform (다우비시 웨이브릿 변환의 상세계수 비율을 이용한 교류발전기의 내부고장 검출 및 고장종류 판별)

  • Park, Chul-Won;Shin, Kwang-Chul;Shin, Myong-Chul
    • The Transactions of the Korean Institute of Electrical Engineers P
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    • v.58 no.2
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    • pp.136-141
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    • 2009
  • An AC generator is an important components in producing a electric power and so it requires highly reliable protection relays to minimize the possibility of demage occurring under fault conditions. Conventionally, a DFT based RDR has been used for protecting the generator stator winding. However, when DFTs based on Fourier analysis are used, it has been pointed out that defects can occur during the process of transforming a time domain signal into a frequency domain one which can lead to loss of time domain information. This paper proposes the internal fault detection and fault type discrimination for the stator winding by applying the detailed coefficients by Daubechies Wavelet Transform to overcome the defects in the DFT process. For the case studies reported in the paper, a model system was established for the simulations utilizing the ATP, and this verified the effectiveness of the proposed technique through various off-line tests carried out on the collected data. The propose method is shown to be able to rapidly identify internal fault and did not operate a miss-operation for all the external fault tested.

Investigation of Various Radiation Proton Energy Effect on n, p Type Silicon by Positron Annihilation Method (양전자 소멸 측정법으로 양성자 조사에너지 변화에 대한 n, p형 실리콘 구조 특성)

  • Lee, Chong Yong
    • Journal of the Korean Vacuum Society
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    • v.22 no.6
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    • pp.341-347
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    • 2013
  • The n-type and p-type silicon samples were exposed by 40.0, 3.98 MeV proton beams ranging between 0 to $20.0{\times}10^{13}protons/cm^2$. Coincidence Doppler Broadening Positron Annihilation Spectroscopy (CDBPAS) were applied to study of defect characteristics of p type and n type silicon samples. In this investigation the numerical analysis of the spectra was employed to the determination of the shape parameter, S, defined as the ratio between the amount of counts in a central portion of the gamma spectrum and the total counts of whole gamma spectrum. The S-parameter values strongly depend on the irradiated proton beam that indicated the defects generate more, rather than the energy intensity. 40 MeV irradiated proton beam in the n-type silicon at $20.0{\times}10^{13}protons/cm^2$ was larger defects than 3.98 MeV irradiated proton beam. It was analysis between the proton irradiation beams and the proton intensities of the irradiation. Because of the Bragg peak, SRIM results shows mainly in a certain depth of the sample to form the defect by the proton irradiation, rather than the defects to appear for the entire sample.

Analysis of the Defects in Wooden Landscape Facilities according to the Type of Timber - Focused on the Defects in Pillars of Out Door Rest Furniture - (목재 조경시설물의 목재 종류별 하자분석 - 휴게시설물 목재기둥의 균열하자를 중심으로-)

  • Park, Won-Kyu;Shin, Hoon
    • Journal of the Korean Institute of Landscape Architecture
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    • v.40 no.3
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    • pp.81-90
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    • 2012
  • Improvements in the quality of life have resulted in a heightened awareness of safety and the environment. As a result, timber as an environmentally friendly material, is used for landscape facilities and a wide range of purposes. But there are a large number of defects since there are twists and cracks that can be found in wooden landscape facilities. This has led to the use of imported hardwood instead of the Western Hemlock which has been in widespread use. Hardwood is expensive. However, it is being used without any information or research on how much it reduces the actual defects. Construction contractors are in great need of information on the characteristics and defect rates of different types of timber. This study investigated and analyzed the cracks in four types of timber - namely the Western Hemlock, Burckella, Nyatoh and Malas - in order to provide basic information to construction contractor for them to be able to select and use the appropriate type of timber. The main results of this study are as follows. First, the Western Hemlock had 1.90 $cracks/m^2$, Malas had 0.83 $cracks/m^2$, Burckella had 0.14 $cracks/m^2$, and the Nyatoh had the least number of surface defects at 0.04 $cracks/m^2$. Second, while Malas has the highest degree of strength timber, Nyatoh had the smallest defect rate. This showed that having high timber strength does not necessarily mean it has less defects. Third, the Western Hemlock was the least expensive and Burckella was the most expensive. However, considering the cost of repairing defects, it would be economically advantageous to use Burckella and Nyatoh which have low defect rates. This study aimed to provide basic information to landscape construction contractors for them to be able to select and use the appropriate type of timber when constructing wooden outdoor rest furniture. The results are expected to contribute to quality enhancements and defect reduction in landscape facilities.

Analysis of Photoluminescence for N-doped and undoped p-type ZnO Thin Films Fabricated by RF Magnetron Sputtering Method

  • Liu, Yan-Yan;Jin, Hu-Jie;Park, Choon-Bae;Hoang, Geun C.
    • Transactions on Electrical and Electronic Materials
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    • v.10 no.1
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    • pp.24-27
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    • 2009
  • N-doped ZnO thin films were deposited on n-type Si(100) and homo-buffer layer, and undoped ZnO thin film was also deposited on homo-buffer layer by RF magnetron sputtering method. After deposition, all films were in-situ annealed at $800^{\circ}C$ for 5 minutes in ambient of $O_2$ with pressure of 10Torr. X -ray diffraction shows that the homo-buffer layer is beneficial to the crystalline of N-doped ZnO thin films and all films have preferable c-axis orientation. Atomic force microscopy shows that undoped ZnO thin film grown on homo-buffer layer has an evident improvement of smoothness compared with N-dope ZnO thin films. Hall-effect measurements show that all ZnO films annealed at $800^{\circ}C$ possess p-type conductivities. The undoped ZnO film has the highest carrier concentration of $1.145{\times}10^{17}cm{-3}$. The photoluminescence spectra show the emissions related to FE, DAP and many defects such as $V_{Zn}$, $Zn_O$, $O_i$ and $O_{Zn}$. The p-type defects ($O_i$, $V_{Zn}$, and $O_{Zn}$) are dominant. The undoped ZnO thin film has a better p-type conductivity compared with N-doped ZnO thin film.

The characteristics of $p^+$-InGaAs layer implanted with oxygen (Oxygen이 주입된 $p^+$-InGaAs층에서의 compensation 특성)

  • 시상기;김성준
    • Journal of the Korean Vacuum Society
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    • v.6 no.4
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    • pp.343-347
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    • 1997
  • The dependence of compensation mechanism in $P^+$-InGaAs layer implanted with oxygen on the annealing temperatures was investigated. The oxygen implantation was performed for electrical isolation. The conductivity was controlled by damage related traps below $500^{\circ}C$. For the temperature of 500 to $600^{\circ}C$, oxygen began to show the chemical effect of compensating the acceptors due to activation and type conversion (plongrightarrown-type) occurred at $600^{\circ}C$. This indicates that the defects generated by the chemical activity of oxygen increased with increasing annealing temperature, where activation energy of 24.2 meV was obtained. It is attributed to the formation of native defects, such as In interstitials, acting as shallow donor in InGaAs. Above $600^{\circ}C$, the interstitial Be atoms become reactivated and the n-type conductivity decreases.

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Influence of vacancy defects on vibration analysis of graphene sheets applying isogeometric method: Molecular and continuum approaches

  • Tahouneh, Vahid;Naei, Mohammad Hasan;Mashhadi, Mahmoud Mosavi
    • Steel and Composite Structures
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    • v.34 no.2
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    • pp.261-277
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    • 2020
  • The main objective of this research paper is to consider vibration analysis of vacancy defected graphene sheet as a nonisotropic structure via molecular dynamic and continuum approaches. The influence of structural defects on the vibration of graphene sheets is considered by applying the mechanical properties of defected graphene sheets. Molecular dynamic simulations have been performed to estimate the mechanical properties of graphene as a nonisotropic structure with single- and double- vacancy defects using open source well-known software i.e., large-scale atomic/molecular massively parallel simulator (LAMMPS). The interactions between the carbon atoms are modelled using Adaptive Intermolecular Reactive Empirical Bond Order (AIREBO) potential. An isogeometric analysis (IGA) based upon non-uniform rational B-spline (NURBS) is employed for approximation of single-layered graphene sheets deflection field and the governing equations are derived using nonlocal elasticity theory. The dependence of small-scale effects, chirality and different defect types on vibrational characteristic of graphene sheets is investigated in this comprehensive research work. In addition, numerical results are validated and compared with those achieved using other analysis, where an excellent agreement is found. The interesting results indicate that increasing the number of missing atoms can lead to decrease the natural frequencies of graphene sheets. It is seen that the degree of the detrimental effects differ with defect type. The Young's and shear modulus of the graphene with SV defects are much smaller than graphene with DV defects. It is also observed that Single Vacancy (SV) clusters cause more reduction in the natural frequencies of SLGS than Double Vacancy (DV) clusters. The effectiveness and the accuracy of the present IGA approach have been demonstrated and it is shown that the IGA is efficient, robust and accurate in terms of nanoplate problems.

Assessment of dehydrothermally cross-linked collagen membrane for guided bone regeneration around peri-implant dehiscence defects: a randomized single-blinded clinical trial

  • Lee, Jae-Hong;Lee, Jung-Seok;Baek, Won-Sun;Lim, Hyun-Chang;Cha, Jae-Kook;Choi, Seong-Ho;Jung, Ui-Won
    • Journal of Periodontal and Implant Science
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    • v.45 no.6
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    • pp.229-237
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    • 2015
  • Purpose: The aim of this study was to determine the clinical feasibility of using dehydrothermally cross-linked collagen membrane (DCM) for bone regeneration around peri-implant dehiscence defects, and compare it with non-cross-linked native collagen membrane (NCM). Methods: Dehiscence defects were investigated in twenty-eight patients. Defect width and height were measured by periodontal probe immediately following implant placement (baseline) and 16 weeks afterward. Membrane manipulation and maintenance were clinically assessed by means of the visual analogue scale score at baseline. Changes in horizontal thickness at 1 mm, 2 mm, and 3 mm below the top of the implant platform and the average bone density were assessed by cone-beam computed tomography at 16 weeks. Degradation of membrane was histologically observed in the soft tissue around the implant prior to re-entry surgery. Results: Five defect sites (two sites in the NCM group and three sites in the DCM group) showed soft-tissue dehiscence defects and membrane exposure during the early healing period, but there were no symptoms or signs of severe complications during the experimental postoperative period. Significant clinical and radiological improvements were found in all parameters with both types of collagen membrane. Partially resorbed membrane leaflets were only observed histologically in the DCM group. Conclusions: These findings suggest that, compared with NCM, DCM has a similar clinical expediency and possesses more stable maintenance properties. Therefore, it could be used effectively in guided bone regeneration around dehiscence-type defects.

Surgical Considerations of One-Stage Reconstruction of Large Extremity Defects Using a Thin Deep Inferior Epigastric Perforator Flap

  • Seung Yeol Lee;Moon Chul Seok;Bo Young Park
    • Archives of Plastic Surgery
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    • v.50 no.6
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    • pp.586-592
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    • 2023
  • Background One-stage reconstruction with "thin perforator flaps" has been attempted to salvage limbs and restore function. The deep inferior epigastric perforator (DIEP) flap is a commonly utilized flap in breast reconstruction (BR). The purpose of this study is to present the versatility of DIEP flaps for the reconstruction of large defects of the extremities. Methods Patients with large tissue defects on extremities who were treated with thin DIEP flaps from January 2016 to January 2018 were included. They were minimally followed up for 36 months. We analyzed the etiology and location of the soft tissue defect, flap design, anastomosis type, outcome, and complications. We also considered the technical differences in the DIEP flap between breast and extremity reconstruction. Results Overall, six free DIEP flaps were included in the study. The flap size ranged from 15 × 12 to 30 × 16 cm2. All flaps were transversely designed similar to a traditional BR design. Three flaps were elevated with two perforators. Primary closure of the donor site was possible in all cases. Five flaps survived with no complications. However, partial necrosis occurred in one flap. Conclusion A DIEP flap is not the first choice for soft tissue defects, but it should be considered for one-stage reconstruction of large defects when the circulation zone of the DIEP flap is considered. In addition, this flap has many advantages over other flaps such as provision of the largest skin paddle, low donor site morbidity with a concealed scar, versatile supercharging technique, and a long pedicle.