• Journal of the Semiconductor & Display Technology
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• v.21 no.2
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• pp.144-149
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• 2022

A cryogenic Mixed Refrigerant Joule-Thomson refrigeration cycle was designed to be applied to the semiconductor etching process with non-flammable constituents. 3-stage cascade refrigerator, single mixed refrigerant Joule-Thomson refrigerator, and 2-stage cascade type mixed refrigerant Joule-Thomson refrigerator are analyzed to figure out the coefficient of performance. Non-flammable mixture of argon(Ar), tetrafluoromethane(R14), trifluoromethane (R23) and octafluoropropane(R218) were utilized to analyze the refrigeration cycle efficiency. The designed refrigeration cycle was adapted to cool down the coolant of HFE7200(Ethoxy-nonafluorobutane, C₄F₉OC₂H₅) with certain constraints. Maximum coefficient of performance of the refrigeration system is obtained as 0.289 for the cooling temperature lower than -100℃. The detailed result of the coefficient of performance according to the mixture composition is discussed in this study.

• Korean Journal of Materials Research
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• v.3 no.3
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• pp.237-244
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• 1993

The characteristics of composite polymer electrolytes obtained by adding a fine ceramic powder($\gamma-{LiAlO}_{2}$) with a diameter of $1{\mu}$m to a poly(ethylene oxide)/lithium trifluoromethane sulfonate (LiC$F_3$S$O_3$) complex are described in terms of morphological and mechanical behavior. The addition of uniformly dispersed ceramic powder greatly improves the electrical and mechanical properties of solid polymer electrolytes at ambient temperature. For the composite polymer electrolytes under this study, the optimum composition of the $\gamma-{LiAIO}_{2}$ in the composite for maximum ionic conductivity was found to be 20 wt%.